10/2/2010	12:08:11 AM	Run aborted at 12:08 AM
10/2/2010	12:08:11 AM	Helium valve closed
10/2/2010	12:08:11 AM	H2 valve closed
10/2/2010	12:08:11 AM	BCl3 valve closed
10/2/2010	12:08:11 AM	PH3 valve closed
10/2/2010	12:08:11 AM	SiCl4 pre valve closed
10/2/2010	12:08:11 AM	SiCl4 post valve closed
10/2/2010	12:08:11 AM	Bypass valve closed
10/2/2010	12:08:11 AM	Main Vac valve closed
10/2/2010	12:08:11 AM	Bubbler valve closed
10/2/2010	12:08:11 AM	Helium MFC set to  0.000000
10/2/2010	12:08:11 AM	H2 MFC set to  0.000000
10/2/2010	12:08:11 AM	BCl3 MFC set to  0.000000
10/2/2010	12:08:11 AM	PHl3 MFC set to  0.000000
10/2/2010	12:08:11 AM	SiCl4 MFC set to  0.000000
10/2/2010	12:08:11 AM	Tube furnace set to 0
10/2/2010	12:08:13 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/2/2010	12:08:14 AM	Recipe started at 12:08 AM
10/2/2010	12:08:14 AM	H2 valve closed
10/2/2010	12:08:14 AM	BCl3 valve closed
10/2/2010	12:08:14 AM	PH3 valve closed
10/2/2010	12:08:14 AM	SiCl4 pre valve closed
10/2/2010	12:08:14 AM	SiCl4 post valve closed
10/2/2010	12:08:14 AM	Main Vac valve closed
10/2/2010	12:08:14 AM	Bypass valve closed
10/2/2010	12:08:14 AM	Bubbler valve closed
10/2/2010	12:08:14 AM	Helium valve opened
10/2/2010	12:08:14 AM	Helium MFC set to  500.000000
10/2/2010	12:08:14 AM	H2 MFC set to  0.000000
10/2/2010	12:08:14 AM	BCl3 MFC set to  0.000000
10/2/2010	12:08:14 AM	PHl3 MFC set to  0.000000
10/2/2010	12:08:14 AM	SiCl4 MFC set to  0.000000
10/2/2010	12:08:14 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	12:08:14 AM	Tube furnace set to 0
10/2/2010	12:08:14 AM	Helium valve closed
10/2/2010	12:08:14 AM	H2 valve closed
10/2/2010	12:08:14 AM	BCl3 valve closed
10/2/2010	12:08:14 AM	PH3 valve closed
10/2/2010	12:08:14 AM	SiCl4 pre valve closed
10/2/2010	12:08:14 AM	SiCl4 post valve closed
10/2/2010	12:08:14 AM	Main Vac valve closed
10/2/2010	12:08:14 AM	Bypass valve closed
10/2/2010	12:08:14 AM	Bubbler valve closed
10/2/2010	12:08:14 AM	Helium MFC set to  0.000000
10/2/2010	12:08:14 AM	H2 MFC set to  0.000000
10/2/2010	12:08:14 AM	BCl3 MFC set to  0.000000
10/2/2010	12:08:14 AM	PHl3 MFC set to  0.000000
10/2/2010	12:08:14 AM	SiCl4 MFC set to  0.000000
10/2/2010	12:08:14 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	12:08:14 AM	Tube furnace set to 0
10/2/2010	12:08:15 AM	Run finished at 12:08 AM
10/2/2010	12:08:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/2/2010	12:24:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	12:24:40 AM	Recipe started at 12:24 AM
10/2/2010	12:24:40 AM	Helium valve closed
10/2/2010	12:24:40 AM	H2 valve closed
10/2/2010	12:24:40 AM	BCl3 valve closed
10/2/2010	12:24:40 AM	PH3 valve closed
10/2/2010	12:24:40 AM	SiCl4 pre valve closed
10/2/2010	12:24:40 AM	SiCl4 post valve closed
10/2/2010	12:24:40 AM	Main Vac valve closed
10/2/2010	12:24:40 AM	Bubbler valve closed
10/2/2010	12:24:40 AM	Bypass valve opened
10/2/2010	12:24:40 AM	Helium MFC set to  0.000000
10/2/2010	12:24:40 AM	H2 MFC set to  0.000000
10/2/2010	12:24:40 AM	BCl3 MFC set to  0.000000
10/2/2010	12:24:40 AM	PHl3 MFC set to  0.000000
10/2/2010	12:24:40 AM	SiCl4 MFC set to  0.000000
10/2/2010	12:24:40 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	12:24:41 AM	Tube furnace set to 0
10/2/2010	12:25:24 AM	Helium valve closed
10/2/2010	12:25:24 AM	H2 valve closed
10/2/2010	12:25:24 AM	BCl3 valve closed
10/2/2010	12:25:24 AM	PH3 valve closed
10/2/2010	12:25:24 AM	SiCl4 pre valve closed
10/2/2010	12:25:24 AM	SiCl4 post valve closed
10/2/2010	12:25:24 AM	Bubbler valve closed
10/2/2010	12:25:24 AM	Main Vac valve opened
10/2/2010	12:25:24 AM	Bypass valve opened
10/2/2010	12:25:24 AM	Helium MFC set to  0.000000
10/2/2010	12:25:24 AM	H2 MFC set to  0.000000
10/2/2010	12:25:24 AM	BCl3 MFC set to  0.000000
10/2/2010	12:25:24 AM	PHl3 MFC set to  0.000000
10/2/2010	12:25:24 AM	SiCl4 MFC set to  0.000000
10/2/2010	12:25:24 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	12:25:24 AM	Tube furnace set to 0
10/2/2010	12:25:24 AM	Run finished at 12:25 AM
10/2/2010	12:25:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	12:25:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/2/2010	12:25:41 AM	Recipe started at 12:25 AM
10/2/2010	12:25:41 AM	Helium valve closed
10/2/2010	12:25:41 AM	H2 valve closed
10/2/2010	12:25:41 AM	BCl3 valve closed
10/2/2010	12:25:41 AM	PH3 valve closed
10/2/2010	12:25:41 AM	SiCl4 pre valve closed
10/2/2010	12:25:41 AM	SiCl4 post valve closed
10/2/2010	12:25:41 AM	Main Vac valve closed
10/2/2010	12:25:41 AM	Bubbler valve closed
10/2/2010	12:25:41 AM	Bypass valve opened
10/2/2010	12:25:41 AM	Helium MFC set to  0.000000
10/2/2010	12:25:41 AM	H2 MFC set to  0.000000
10/2/2010	12:25:41 AM	BCl3 MFC set to  0.000000
10/2/2010	12:25:41 AM	PHl3 MFC set to  0.000000
10/2/2010	12:25:41 AM	SiCl4 MFC set to  0.000000
10/2/2010	12:25:41 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	12:25:41 AM	Tube furnace set to 0
10/2/2010	12:25:41 AM	Helium valve closed
10/2/2010	12:25:41 AM	H2 valve closed
10/2/2010	12:25:41 AM	BCl3 valve closed
10/2/2010	12:25:41 AM	PH3 valve closed
10/2/2010	12:25:41 AM	SiCl4 pre valve closed
10/2/2010	12:25:41 AM	SiCl4 post valve closed
10/2/2010	12:25:41 AM	Bubbler valve closed
10/2/2010	12:25:41 AM	Main Vac valve opened
10/2/2010	12:25:41 AM	Bypass valve opened
10/2/2010	12:25:41 AM	Helium MFC set to  0.000000
10/2/2010	12:25:41 AM	H2 MFC set to  0.000000
10/2/2010	12:25:41 AM	BCl3 MFC set to  0.000000
10/2/2010	12:25:41 AM	PHl3 MFC set to  0.000000
10/2/2010	12:25:41 AM	SiCl4 MFC set to  0.000000
10/2/2010	12:25:41 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	12:25:42 AM	Tube furnace set to 0
10/2/2010	12:26:42 AM	H2 valve closed
10/2/2010	12:26:42 AM	BCl3 valve closed
10/2/2010	12:26:42 AM	PH3 valve closed
10/2/2010	12:26:42 AM	SiCl4 pre valve closed
10/2/2010	12:26:42 AM	SiCl4 post valve closed
10/2/2010	12:26:42 AM	Bubbler valve closed
10/2/2010	12:26:42 AM	Helium valve opened
10/2/2010	12:26:42 AM	Main Vac valve opened
10/2/2010	12:26:42 AM	Bypass valve opened
10/2/2010	12:26:42 AM	Helium MFC set to  100.000000
10/2/2010	12:26:42 AM	H2 MFC set to  0.000000
10/2/2010	12:26:42 AM	BCl3 MFC set to  0.000000
10/2/2010	12:26:42 AM	PHl3 MFC set to  0.000000
10/2/2010	12:26:42 AM	SiCl4 MFC set to  0.000000
10/2/2010	12:26:42 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	12:26:42 AM	Tube furnace set to 0
10/2/2010	12:27:42 AM	Helium valve closed
10/2/2010	12:27:42 AM	H2 valve closed
10/2/2010	12:27:42 AM	BCl3 valve closed
10/2/2010	12:27:42 AM	PH3 valve closed
10/2/2010	12:27:42 AM	SiCl4 pre valve closed
10/2/2010	12:27:42 AM	SiCl4 post valve closed
10/2/2010	12:27:42 AM	Bubbler valve closed
10/2/2010	12:27:42 AM	Main Vac valve opened
10/2/2010	12:27:42 AM	Bypass valve opened
10/2/2010	12:27:42 AM	Helium MFC set to  0.000000
10/2/2010	12:27:42 AM	H2 MFC set to  0.000000
10/2/2010	12:27:42 AM	BCl3 MFC set to  0.000000
10/2/2010	12:27:42 AM	PHl3 MFC set to  0.000000
10/2/2010	12:27:42 AM	SiCl4 MFC set to  0.000000
10/2/2010	12:27:42 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	12:27:42 AM	Tube furnace set to 0
10/2/2010	12:28:42 AM	H2 valve closed
10/2/2010	12:28:42 AM	BCl3 valve closed
10/2/2010	12:28:42 AM	PH3 valve closed
10/2/2010	12:28:42 AM	SiCl4 pre valve closed
10/2/2010	12:28:42 AM	SiCl4 post valve closed
10/2/2010	12:28:42 AM	Bubbler valve closed
10/2/2010	12:28:42 AM	Helium valve opened
10/2/2010	12:28:42 AM	Main Vac valve opened
10/2/2010	12:28:42 AM	Bypass valve opened
10/2/2010	12:28:42 AM	Helium MFC set to  100.000000
10/2/2010	12:28:42 AM	H2 MFC set to  0.000000
10/2/2010	12:28:42 AM	BCl3 MFC set to  0.000000
10/2/2010	12:28:42 AM	PHl3 MFC set to  0.000000
10/2/2010	12:28:42 AM	SiCl4 MFC set to  0.000000
10/2/2010	12:28:42 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	12:28:42 AM	Tube furnace set to 0
10/2/2010	12:29:42 AM	Helium valve closed
10/2/2010	12:29:42 AM	H2 valve closed
10/2/2010	12:29:42 AM	BCl3 valve closed
10/2/2010	12:29:42 AM	PH3 valve closed
10/2/2010	12:29:42 AM	SiCl4 pre valve closed
10/2/2010	12:29:42 AM	SiCl4 post valve closed
10/2/2010	12:29:42 AM	Bubbler valve closed
10/2/2010	12:29:42 AM	Main Vac valve opened
10/2/2010	12:29:42 AM	Bypass valve opened
10/2/2010	12:29:42 AM	Helium MFC set to  0.000000
10/2/2010	12:29:42 AM	H2 MFC set to  0.000000
10/2/2010	12:29:42 AM	BCl3 MFC set to  0.000000
10/2/2010	12:29:42 AM	PHl3 MFC set to  0.000000
10/2/2010	12:29:42 AM	SiCl4 MFC set to  0.000000
10/2/2010	12:29:42 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	12:29:42 AM	Tube furnace set to 0
10/2/2010	12:30:42 AM	H2 valve closed
10/2/2010	12:30:42 AM	BCl3 valve closed
10/2/2010	12:30:42 AM	PH3 valve closed
10/2/2010	12:30:42 AM	SiCl4 pre valve closed
10/2/2010	12:30:42 AM	SiCl4 post valve closed
10/2/2010	12:30:42 AM	Bubbler valve closed
10/2/2010	12:30:42 AM	Helium valve opened
10/2/2010	12:30:42 AM	Main Vac valve opened
10/2/2010	12:30:42 AM	Bypass valve opened
10/2/2010	12:30:42 AM	Helium MFC set to  100.000000
10/2/2010	12:30:42 AM	H2 MFC set to  0.000000
10/2/2010	12:30:42 AM	BCl3 MFC set to  0.000000
10/2/2010	12:30:42 AM	PHl3 MFC set to  0.000000
10/2/2010	12:30:42 AM	SiCl4 MFC set to  0.000000
10/2/2010	12:30:42 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	12:30:43 AM	Tube furnace set to 0
10/2/2010	12:31:43 AM	Helium valve closed
10/2/2010	12:31:43 AM	H2 valve closed
10/2/2010	12:31:43 AM	BCl3 valve closed
10/2/2010	12:31:43 AM	PH3 valve closed
10/2/2010	12:31:43 AM	SiCl4 pre valve closed
10/2/2010	12:31:43 AM	SiCl4 post valve closed
10/2/2010	12:31:43 AM	Bubbler valve closed
10/2/2010	12:31:43 AM	Main Vac valve opened
10/2/2010	12:31:43 AM	Bypass valve opened
10/2/2010	12:31:43 AM	Helium MFC set to  0.000000
10/2/2010	12:31:43 AM	H2 MFC set to  0.000000
10/2/2010	12:31:43 AM	BCl3 MFC set to  0.000000
10/2/2010	12:31:43 AM	PHl3 MFC set to  0.000000
10/2/2010	12:31:43 AM	SiCl4 MFC set to  0.000000
10/2/2010	12:31:43 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	12:31:43 AM	Tube furnace set to 0
10/2/2010	12:32:43 AM	H2 valve closed
10/2/2010	12:32:43 AM	BCl3 valve closed
10/2/2010	12:32:43 AM	PH3 valve closed
10/2/2010	12:32:43 AM	SiCl4 pre valve closed
10/2/2010	12:32:43 AM	SiCl4 post valve closed
10/2/2010	12:32:43 AM	Bubbler valve closed
10/2/2010	12:32:43 AM	Helium valve opened
10/2/2010	12:32:43 AM	Main Vac valve opened
10/2/2010	12:32:43 AM	Bypass valve opened
10/2/2010	12:32:43 AM	Helium MFC set to  100.000000
10/2/2010	12:32:43 AM	H2 MFC set to  0.000000
10/2/2010	12:32:43 AM	BCl3 MFC set to  0.000000
10/2/2010	12:32:43 AM	PHl3 MFC set to  0.000000
10/2/2010	12:32:43 AM	SiCl4 MFC set to  0.000000
10/2/2010	12:32:43 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	12:32:43 AM	Tube furnace set to 0
10/2/2010	12:33:43 AM	Helium valve closed
10/2/2010	12:33:43 AM	H2 valve closed
10/2/2010	12:33:43 AM	BCl3 valve closed
10/2/2010	12:33:43 AM	PH3 valve closed
10/2/2010	12:33:43 AM	SiCl4 pre valve closed
10/2/2010	12:33:43 AM	SiCl4 post valve closed
10/2/2010	12:33:43 AM	Bubbler valve closed
10/2/2010	12:33:43 AM	Main Vac valve opened
10/2/2010	12:33:43 AM	Bypass valve opened
10/2/2010	12:33:43 AM	Helium MFC set to  0.000000
10/2/2010	12:33:43 AM	H2 MFC set to  0.000000
10/2/2010	12:33:43 AM	BCl3 MFC set to  0.000000
10/2/2010	12:33:43 AM	PHl3 MFC set to  0.000000
10/2/2010	12:33:43 AM	SiCl4 MFC set to  0.000000
10/2/2010	12:33:43 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	12:33:43 AM	Tube furnace set to 0
10/2/2010	12:34:43 AM	H2 valve closed
10/2/2010	12:34:43 AM	BCl3 valve closed
10/2/2010	12:34:43 AM	PH3 valve closed
10/2/2010	12:34:43 AM	SiCl4 pre valve closed
10/2/2010	12:34:43 AM	SiCl4 post valve closed
10/2/2010	12:34:43 AM	Bubbler valve closed
10/2/2010	12:34:43 AM	Helium valve opened
10/2/2010	12:34:43 AM	Main Vac valve opened
10/2/2010	12:34:43 AM	Bypass valve opened
10/2/2010	12:34:43 AM	Helium MFC set to  100.000000
10/2/2010	12:34:43 AM	H2 MFC set to  0.000000
10/2/2010	12:34:43 AM	BCl3 MFC set to  0.000000
10/2/2010	12:34:43 AM	PHl3 MFC set to  0.000000
10/2/2010	12:34:43 AM	SiCl4 MFC set to  0.000000
10/2/2010	12:34:43 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	12:34:43 AM	Tube furnace set to 0
10/2/2010	12:35:43 AM	Helium valve closed
10/2/2010	12:35:43 AM	H2 valve closed
10/2/2010	12:35:43 AM	BCl3 valve closed
10/2/2010	12:35:43 AM	PH3 valve closed
10/2/2010	12:35:43 AM	SiCl4 pre valve closed
10/2/2010	12:35:43 AM	SiCl4 post valve closed
10/2/2010	12:35:43 AM	Bubbler valve closed
10/2/2010	12:35:43 AM	Main Vac valve opened
10/2/2010	12:35:43 AM	Bypass valve opened
10/2/2010	12:35:43 AM	Helium MFC set to  0.000000
10/2/2010	12:35:43 AM	H2 MFC set to  0.000000
10/2/2010	12:35:43 AM	BCl3 MFC set to  0.000000
10/2/2010	12:35:43 AM	PHl3 MFC set to  0.000000
10/2/2010	12:35:43 AM	SiCl4 MFC set to  0.000000
10/2/2010	12:35:43 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	12:35:44 AM	Tube furnace set to 0
10/2/2010	12:36:44 AM	H2 valve closed
10/2/2010	12:36:44 AM	BCl3 valve closed
10/2/2010	12:36:44 AM	PH3 valve closed
10/2/2010	12:36:44 AM	SiCl4 pre valve closed
10/2/2010	12:36:44 AM	SiCl4 post valve closed
10/2/2010	12:36:44 AM	Bubbler valve closed
10/2/2010	12:36:44 AM	Helium valve opened
10/2/2010	12:36:44 AM	Main Vac valve opened
10/2/2010	12:36:44 AM	Bypass valve opened
10/2/2010	12:36:44 AM	Helium MFC set to  100.000000
10/2/2010	12:36:44 AM	H2 MFC set to  0.000000
10/2/2010	12:36:44 AM	BCl3 MFC set to  0.000000
10/2/2010	12:36:44 AM	PHl3 MFC set to  0.000000
10/2/2010	12:36:44 AM	SiCl4 MFC set to  0.000000
10/2/2010	12:36:44 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	12:36:44 AM	Tube furnace set to 0
10/2/2010	12:37:44 AM	Helium valve closed
10/2/2010	12:37:44 AM	H2 valve closed
10/2/2010	12:37:44 AM	BCl3 valve closed
10/2/2010	12:37:44 AM	PH3 valve closed
10/2/2010	12:37:44 AM	SiCl4 pre valve closed
10/2/2010	12:37:44 AM	SiCl4 post valve closed
10/2/2010	12:37:44 AM	Bubbler valve closed
10/2/2010	12:37:44 AM	Main Vac valve opened
10/2/2010	12:37:44 AM	Bypass valve opened
10/2/2010	12:37:44 AM	Helium MFC set to  0.000000
10/2/2010	12:37:44 AM	H2 MFC set to  0.000000
10/2/2010	12:37:44 AM	BCl3 MFC set to  0.000000
10/2/2010	12:37:44 AM	PHl3 MFC set to  0.000000
10/2/2010	12:37:44 AM	SiCl4 MFC set to  0.000000
10/2/2010	12:37:44 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	12:37:44 AM	Tube furnace set to 0
10/2/2010	12:38:44 AM	H2 valve closed
10/2/2010	12:38:44 AM	BCl3 valve closed
10/2/2010	12:38:44 AM	PH3 valve closed
10/2/2010	12:38:44 AM	SiCl4 pre valve closed
10/2/2010	12:38:44 AM	SiCl4 post valve closed
10/2/2010	12:38:44 AM	Bubbler valve closed
10/2/2010	12:38:44 AM	Helium valve opened
10/2/2010	12:38:44 AM	Main Vac valve opened
10/2/2010	12:38:44 AM	Bypass valve opened
10/2/2010	12:38:44 AM	Helium MFC set to  100.000000
10/2/2010	12:38:44 AM	H2 MFC set to  0.000000
10/2/2010	12:38:44 AM	BCl3 MFC set to  0.000000
10/2/2010	12:38:44 AM	PHl3 MFC set to  0.000000
10/2/2010	12:38:44 AM	SiCl4 MFC set to  0.000000
10/2/2010	12:38:44 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	12:38:44 AM	Tube furnace set to 0
10/2/2010	12:39:44 AM	Helium valve closed
10/2/2010	12:39:44 AM	H2 valve closed
10/2/2010	12:39:44 AM	BCl3 valve closed
10/2/2010	12:39:44 AM	PH3 valve closed
10/2/2010	12:39:44 AM	SiCl4 pre valve closed
10/2/2010	12:39:44 AM	SiCl4 post valve closed
10/2/2010	12:39:44 AM	Bubbler valve closed
10/2/2010	12:39:44 AM	Main Vac valve opened
10/2/2010	12:39:44 AM	Bypass valve opened
10/2/2010	12:39:44 AM	Helium MFC set to  0.000000
10/2/2010	12:39:44 AM	H2 MFC set to  0.000000
10/2/2010	12:39:44 AM	BCl3 MFC set to  0.000000
10/2/2010	12:39:44 AM	PHl3 MFC set to  0.000000
10/2/2010	12:39:44 AM	SiCl4 MFC set to  0.000000
10/2/2010	12:39:44 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	12:39:44 AM	Tube furnace set to 0
10/2/2010	12:40:44 AM	H2 valve closed
10/2/2010	12:40:44 AM	BCl3 valve closed
10/2/2010	12:40:44 AM	PH3 valve closed
10/2/2010	12:40:44 AM	SiCl4 pre valve closed
10/2/2010	12:40:44 AM	SiCl4 post valve closed
10/2/2010	12:40:44 AM	Bubbler valve closed
10/2/2010	12:40:44 AM	Helium valve opened
10/2/2010	12:40:44 AM	Main Vac valve opened
10/2/2010	12:40:44 AM	Bypass valve opened
10/2/2010	12:40:44 AM	Helium MFC set to  100.000000
10/2/2010	12:40:44 AM	H2 MFC set to  0.000000
10/2/2010	12:40:44 AM	BCl3 MFC set to  0.000000
10/2/2010	12:40:44 AM	PHl3 MFC set to  0.000000
10/2/2010	12:40:44 AM	SiCl4 MFC set to  0.000000
10/2/2010	12:40:44 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	12:40:45 AM	Tube furnace set to 0
10/2/2010	12:41:45 AM	Helium valve closed
10/2/2010	12:41:45 AM	H2 valve closed
10/2/2010	12:41:45 AM	BCl3 valve closed
10/2/2010	12:41:45 AM	PH3 valve closed
10/2/2010	12:41:45 AM	SiCl4 pre valve closed
10/2/2010	12:41:45 AM	SiCl4 post valve closed
10/2/2010	12:41:45 AM	Bubbler valve closed
10/2/2010	12:41:45 AM	Main Vac valve opened
10/2/2010	12:41:45 AM	Bypass valve opened
10/2/2010	12:41:45 AM	Helium MFC set to  0.000000
10/2/2010	12:41:45 AM	H2 MFC set to  0.000000
10/2/2010	12:41:45 AM	BCl3 MFC set to  0.000000
10/2/2010	12:41:45 AM	PHl3 MFC set to  0.000000
10/2/2010	12:41:45 AM	SiCl4 MFC set to  0.000000
10/2/2010	12:41:45 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	12:41:45 AM	Tube furnace set to 0
10/2/2010	12:42:45 AM	H2 valve closed
10/2/2010	12:42:45 AM	BCl3 valve closed
10/2/2010	12:42:45 AM	PH3 valve closed
10/2/2010	12:42:45 AM	SiCl4 pre valve closed
10/2/2010	12:42:45 AM	SiCl4 post valve closed
10/2/2010	12:42:45 AM	Bubbler valve closed
10/2/2010	12:42:45 AM	Helium valve opened
10/2/2010	12:42:45 AM	Main Vac valve opened
10/2/2010	12:42:45 AM	Bypass valve opened
10/2/2010	12:42:45 AM	Helium MFC set to  100.000000
10/2/2010	12:42:45 AM	H2 MFC set to  0.000000
10/2/2010	12:42:45 AM	BCl3 MFC set to  0.000000
10/2/2010	12:42:45 AM	PHl3 MFC set to  0.000000
10/2/2010	12:42:45 AM	SiCl4 MFC set to  0.000000
10/2/2010	12:42:45 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	12:42:45 AM	Tube furnace set to 0
10/2/2010	12:43:45 AM	Helium valve closed
10/2/2010	12:43:45 AM	H2 valve closed
10/2/2010	12:43:45 AM	BCl3 valve closed
10/2/2010	12:43:45 AM	PH3 valve closed
10/2/2010	12:43:45 AM	SiCl4 pre valve closed
10/2/2010	12:43:45 AM	SiCl4 post valve closed
10/2/2010	12:43:45 AM	Bubbler valve closed
10/2/2010	12:43:45 AM	Main Vac valve opened
10/2/2010	12:43:45 AM	Bypass valve opened
10/2/2010	12:43:45 AM	Helium MFC set to  0.000000
10/2/2010	12:43:45 AM	H2 MFC set to  0.000000
10/2/2010	12:43:45 AM	BCl3 MFC set to  0.000000
10/2/2010	12:43:45 AM	PHl3 MFC set to  0.000000
10/2/2010	12:43:45 AM	SiCl4 MFC set to  0.000000
10/2/2010	12:43:45 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	12:43:45 AM	Tube furnace set to 0
10/2/2010	12:44:45 AM	H2 valve closed
10/2/2010	12:44:45 AM	BCl3 valve closed
10/2/2010	12:44:45 AM	PH3 valve closed
10/2/2010	12:44:45 AM	SiCl4 pre valve closed
10/2/2010	12:44:45 AM	SiCl4 post valve closed
10/2/2010	12:44:45 AM	Bubbler valve closed
10/2/2010	12:44:45 AM	Helium valve opened
10/2/2010	12:44:45 AM	Main Vac valve opened
10/2/2010	12:44:45 AM	Bypass valve opened
10/2/2010	12:44:45 AM	Helium MFC set to  100.000000
10/2/2010	12:44:45 AM	H2 MFC set to  0.000000
10/2/2010	12:44:45 AM	BCl3 MFC set to  0.000000
10/2/2010	12:44:45 AM	PHl3 MFC set to  0.000000
10/2/2010	12:44:45 AM	SiCl4 MFC set to  0.000000
10/2/2010	12:44:45 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	12:44:45 AM	Tube furnace set to 0
10/2/2010	12:45:45 AM	Helium valve closed
10/2/2010	12:45:45 AM	H2 valve closed
10/2/2010	12:45:45 AM	BCl3 valve closed
10/2/2010	12:45:45 AM	PH3 valve closed
10/2/2010	12:45:45 AM	SiCl4 pre valve closed
10/2/2010	12:45:45 AM	SiCl4 post valve closed
10/2/2010	12:45:45 AM	Bubbler valve closed
10/2/2010	12:45:45 AM	Main Vac valve opened
10/2/2010	12:45:45 AM	Bypass valve opened
10/2/2010	12:45:45 AM	Helium MFC set to  0.000000
10/2/2010	12:45:45 AM	H2 MFC set to  0.000000
10/2/2010	12:45:45 AM	BCl3 MFC set to  0.000000
10/2/2010	12:45:45 AM	PHl3 MFC set to  0.000000
10/2/2010	12:45:45 AM	SiCl4 MFC set to  0.000000
10/2/2010	12:45:45 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	12:45:46 AM	Tube furnace set to 0
10/2/2010	12:45:47 AM	Run finished at 12:45 AM
10/2/2010	12:45:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/2/2010	12:46:05 AM	Helium MFC set to  100.000000
10/2/2010	12:46:06 AM	Helium valve opened
10/2/2010	12:52:50 AM	Helium valve closed
10/2/2010	12:52:53 AM	Helium MFC set to  100.000000
10/2/2010	12:52:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	12:52:54 AM	Recipe started at 12:52 AM
10/2/2010	12:52:54 AM	Helium valve closed
10/2/2010	12:52:54 AM	H2 valve closed
10/2/2010	12:52:54 AM	BCl3 valve closed
10/2/2010	12:52:54 AM	PH3 valve closed
10/2/2010	12:52:54 AM	SiCl4 pre valve closed
10/2/2010	12:52:54 AM	SiCl4 post valve closed
10/2/2010	12:52:54 AM	Main Vac valve closed
10/2/2010	12:52:54 AM	Bubbler valve closed
10/2/2010	12:52:54 AM	Bypass valve opened
10/2/2010	12:52:54 AM	Helium MFC set to  0.000000
10/2/2010	12:52:54 AM	H2 MFC set to  0.000000
10/2/2010	12:52:54 AM	BCl3 MFC set to  0.000000
10/2/2010	12:52:54 AM	PHl3 MFC set to  0.000000
10/2/2010	12:52:54 AM	SiCl4 MFC set to  0.000000
10/2/2010	12:52:54 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	12:52:55 AM	Tube furnace set to 0
10/2/2010	12:52:55 AM	Helium valve closed
10/2/2010	12:52:55 AM	H2 valve closed
10/2/2010	12:52:55 AM	BCl3 valve closed
10/2/2010	12:52:55 AM	PH3 valve closed
10/2/2010	12:52:55 AM	SiCl4 pre valve closed
10/2/2010	12:52:55 AM	SiCl4 post valve closed
10/2/2010	12:52:55 AM	Bubbler valve closed
10/2/2010	12:52:55 AM	Main Vac valve opened
10/2/2010	12:52:55 AM	Bypass valve opened
10/2/2010	12:52:55 AM	Helium MFC set to  0.000000
10/2/2010	12:52:55 AM	H2 MFC set to  0.000000
10/2/2010	12:52:55 AM	BCl3 MFC set to  0.000000
10/2/2010	12:52:55 AM	PHl3 MFC set to  0.000000
10/2/2010	12:52:55 AM	SiCl4 MFC set to  0.000000
10/2/2010	12:52:55 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	12:52:55 AM	Tube furnace set to 0
10/2/2010	12:52:55 AM	Run finished at 12:52 AM
10/2/2010	12:52:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	12:53:36 AM	Helium MFC set to  100.000000
10/2/2010	12:53:37 AM	Helium valve opened
10/2/2010	1:02:21 AM	Helium valve closed
10/2/2010	1:02:24 AM	Helium MFC set to  100.000000
10/2/2010	1:02:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	1:02:25 AM	Recipe started at 1:02 AM
10/2/2010	1:02:25 AM	Helium valve closed
10/2/2010	1:02:25 AM	H2 valve closed
10/2/2010	1:02:25 AM	BCl3 valve closed
10/2/2010	1:02:25 AM	PH3 valve closed
10/2/2010	1:02:25 AM	SiCl4 pre valve closed
10/2/2010	1:02:25 AM	SiCl4 post valve closed
10/2/2010	1:02:25 AM	Main Vac valve closed
10/2/2010	1:02:25 AM	Bubbler valve closed
10/2/2010	1:02:25 AM	Bypass valve opened
10/2/2010	1:02:25 AM	Helium MFC set to  0.000000
10/2/2010	1:02:25 AM	H2 MFC set to  0.000000
10/2/2010	1:02:25 AM	BCl3 MFC set to  0.000000
10/2/2010	1:02:25 AM	PHl3 MFC set to  0.000000
10/2/2010	1:02:25 AM	SiCl4 MFC set to  0.000000
10/2/2010	1:02:25 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	1:02:25 AM	Tube furnace set to 0
10/2/2010	1:02:26 AM	Helium valve closed
10/2/2010	1:02:26 AM	H2 valve closed
10/2/2010	1:02:26 AM	BCl3 valve closed
10/2/2010	1:02:26 AM	PH3 valve closed
10/2/2010	1:02:26 AM	SiCl4 pre valve closed
10/2/2010	1:02:26 AM	SiCl4 post valve closed
10/2/2010	1:02:26 AM	Bubbler valve closed
10/2/2010	1:02:26 AM	Main Vac valve opened
10/2/2010	1:02:26 AM	Bypass valve opened
10/2/2010	1:02:26 AM	Helium MFC set to  0.000000
10/2/2010	1:02:26 AM	H2 MFC set to  0.000000
10/2/2010	1:02:26 AM	BCl3 MFC set to  0.000000
10/2/2010	1:02:26 AM	PHl3 MFC set to  0.000000
10/2/2010	1:02:26 AM	SiCl4 MFC set to  0.000000
10/2/2010	1:02:26 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	1:02:26 AM	Tube furnace set to 0
10/2/2010	1:02:26 AM	Run finished at 1:02 AM
10/2/2010	1:02:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	1:03:14 AM	Helium MFC set to  100.000000
10/2/2010	1:03:15 AM	Helium valve opened
10/2/2010	1:03:46 AM	Helium valve closed
10/2/2010	1:03:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	1:03:48 AM	Recipe started at 1:03 AM
10/2/2010	1:03:48 AM	Helium valve closed
10/2/2010	1:03:48 AM	H2 valve closed
10/2/2010	1:03:48 AM	BCl3 valve closed
10/2/2010	1:03:48 AM	PH3 valve closed
10/2/2010	1:03:48 AM	SiCl4 pre valve closed
10/2/2010	1:03:48 AM	SiCl4 post valve closed
10/2/2010	1:03:48 AM	Main Vac valve closed
10/2/2010	1:03:48 AM	Bubbler valve closed
10/2/2010	1:03:48 AM	Bypass valve opened
10/2/2010	1:03:48 AM	Helium MFC set to  0.000000
10/2/2010	1:03:48 AM	H2 MFC set to  0.000000
10/2/2010	1:03:48 AM	BCl3 MFC set to  0.000000
10/2/2010	1:03:48 AM	PHl3 MFC set to  0.000000
10/2/2010	1:03:48 AM	SiCl4 MFC set to  0.000000
10/2/2010	1:03:48 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	1:03:48 AM	Tube furnace set to 0
10/2/2010	1:03:48 AM	Helium valve closed
10/2/2010	1:03:48 AM	H2 valve closed
10/2/2010	1:03:48 AM	BCl3 valve closed
10/2/2010	1:03:48 AM	PH3 valve closed
10/2/2010	1:03:48 AM	SiCl4 pre valve closed
10/2/2010	1:03:48 AM	SiCl4 post valve closed
10/2/2010	1:03:48 AM	Bubbler valve closed
10/2/2010	1:03:48 AM	Main Vac valve opened
10/2/2010	1:03:48 AM	Bypass valve opened
10/2/2010	1:03:48 AM	Helium MFC set to  0.000000
10/2/2010	1:03:48 AM	H2 MFC set to  0.000000
10/2/2010	1:03:48 AM	BCl3 MFC set to  0.000000
10/2/2010	1:03:48 AM	PHl3 MFC set to  0.000000
10/2/2010	1:03:48 AM	SiCl4 MFC set to  0.000000
10/2/2010	1:03:48 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	1:03:48 AM	Tube furnace set to 0
10/2/2010	1:03:48 AM	Run finished at 1:03 AM
10/2/2010	1:03:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	1:04:45 AM	Helium MFC set to  100.000000
10/2/2010	1:04:46 AM	Helium valve opened
10/2/2010	1:06:21 AM	Helium valve closed
10/2/2010	1:06:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	1:06:23 AM	Recipe started at 1:06 AM
10/2/2010	1:06:23 AM	Helium valve closed
10/2/2010	1:06:23 AM	H2 valve closed
10/2/2010	1:06:23 AM	BCl3 valve closed
10/2/2010	1:06:23 AM	PH3 valve closed
10/2/2010	1:06:23 AM	SiCl4 pre valve closed
10/2/2010	1:06:23 AM	SiCl4 post valve closed
10/2/2010	1:06:23 AM	Main Vac valve closed
10/2/2010	1:06:23 AM	Bubbler valve closed
10/2/2010	1:06:23 AM	Bypass valve opened
10/2/2010	1:06:23 AM	Helium MFC set to  0.000000
10/2/2010	1:06:23 AM	H2 MFC set to  0.000000
10/2/2010	1:06:23 AM	BCl3 MFC set to  0.000000
10/2/2010	1:06:23 AM	PHl3 MFC set to  0.000000
10/2/2010	1:06:23 AM	SiCl4 MFC set to  0.000000
10/2/2010	1:06:23 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	1:06:23 AM	Tube furnace set to 0
10/2/2010	1:06:24 AM	Helium valve closed
10/2/2010	1:06:24 AM	H2 valve closed
10/2/2010	1:06:24 AM	BCl3 valve closed
10/2/2010	1:06:24 AM	PH3 valve closed
10/2/2010	1:06:24 AM	SiCl4 pre valve closed
10/2/2010	1:06:24 AM	SiCl4 post valve closed
10/2/2010	1:06:24 AM	Bubbler valve closed
10/2/2010	1:06:24 AM	Main Vac valve opened
10/2/2010	1:06:24 AM	Bypass valve opened
10/2/2010	1:06:24 AM	Helium MFC set to  0.000000
10/2/2010	1:06:24 AM	H2 MFC set to  0.000000
10/2/2010	1:06:24 AM	BCl3 MFC set to  0.000000
10/2/2010	1:06:24 AM	PHl3 MFC set to  0.000000
10/2/2010	1:06:24 AM	SiCl4 MFC set to  0.000000
10/2/2010	1:06:24 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	1:06:24 AM	Tube furnace set to 0
10/2/2010	1:06:24 AM	Run finished at 1:06 AM
10/2/2010	1:06:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	1:07:04 AM	Recipe started at 1:07 AM
10/2/2010	1:07:04 AM	Helium valve closed
10/2/2010	1:07:04 AM	BCl3 valve closed
10/2/2010	1:07:04 AM	PH3 valve closed
10/2/2010	1:07:04 AM	SiCl4 pre valve closed
10/2/2010	1:07:04 AM	SiCl4 post valve closed
10/2/2010	1:07:04 AM	Main Vac valve closed
10/2/2010	1:07:04 AM	Bypass valve closed
10/2/2010	1:07:04 AM	Bubbler valve closed
10/2/2010	1:07:04 AM	H2 valve opened
10/2/2010	1:07:04 AM	Helium MFC set to  0.000000
10/2/2010	1:07:04 AM	H2 MFC set to  500.000000
10/2/2010	1:07:04 AM	BCl3 MFC set to  0.000000
10/2/2010	1:07:04 AM	PHl3 MFC set to  0.000000
10/2/2010	1:07:04 AM	SiCl4 MFC set to  0.000000
10/2/2010	1:07:04 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	1:07:05 AM	Tube furnace set to 1000
10/2/2010	1:08:22 AM	Helium valve closed
10/2/2010	1:08:22 AM	BCl3 valve closed
10/2/2010	1:08:22 AM	PH3 valve closed
10/2/2010	1:08:22 AM	SiCl4 pre valve closed
10/2/2010	1:08:22 AM	SiCl4 post valve closed
10/2/2010	1:08:22 AM	Main Vac valve closed
10/2/2010	1:08:22 AM	Bypass valve closed
10/2/2010	1:08:22 AM	H2 valve opened
10/2/2010	1:08:22 AM	Bubbler valve opened
10/2/2010	1:08:22 AM	Helium MFC set to  0.000000
10/2/2010	1:08:22 AM	H2 MFC set to  500.000000
10/2/2010	1:08:22 AM	BCl3 MFC set to  0.000000
10/2/2010	1:08:22 AM	PHl3 MFC set to  0.000000
10/2/2010	1:08:22 AM	SiCl4 MFC set to  0.000000
10/2/2010	1:08:22 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	1:08:22 AM	Tube furnace set to 1000
10/2/2010	1:28:22 AM	Helium valve closed
10/2/2010	1:28:22 AM	PH3 valve closed
10/2/2010	1:28:22 AM	Main Vac valve closed
10/2/2010	1:28:22 AM	Bypass valve closed
10/2/2010	1:28:22 AM	H2 valve opened
10/2/2010	1:28:22 AM	BCl3 valve opened
10/2/2010	1:28:22 AM	SiCl4 pre valve opened
10/2/2010	1:28:22 AM	SiCl4 post valve opened
10/2/2010	1:28:22 AM	Bubbler valve opened
10/2/2010	1:28:22 AM	Helium MFC set to  0.000000
10/2/2010	1:28:22 AM	H2 MFC set to  500.000000
10/2/2010	1:28:22 AM	BCl3 MFC set to  12.000000
10/2/2010	1:28:22 AM	PHl3 MFC set to  0.000000
10/2/2010	1:28:22 AM	SiCl4 MFC set to  50.000000
10/2/2010	1:28:22 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	1:28:22 AM	Tube furnace set to 1000
10/2/2010	1:41:42 AM	Helium valve closed
10/2/2010	1:41:42 AM	BCl3 valve closed
10/2/2010	1:41:42 AM	PH3 valve closed
10/2/2010	1:41:42 AM	SiCl4 pre valve closed
10/2/2010	1:41:42 AM	SiCl4 post valve closed
10/2/2010	1:41:42 AM	Main Vac valve closed
10/2/2010	1:41:42 AM	Bypass valve closed
10/2/2010	1:41:42 AM	H2 valve opened
10/2/2010	1:41:42 AM	Bubbler valve opened
10/2/2010	1:41:42 AM	Helium MFC set to  0.000000
10/2/2010	1:41:42 AM	H2 MFC set to  500.000000
10/2/2010	1:41:42 AM	BCl3 MFC set to  0.000000
10/2/2010	1:41:42 AM	PHl3 MFC set to  0.000000
10/2/2010	1:41:42 AM	SiCl4 MFC set to  0.000000
10/2/2010	1:41:42 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	1:41:42 AM	Tube furnace set to 750
10/2/2010	2:01:42 AM	H2 valve closed
10/2/2010	2:01:42 AM	BCl3 valve closed
10/2/2010	2:01:42 AM	PH3 valve closed
10/2/2010	2:01:42 AM	SiCl4 pre valve closed
10/2/2010	2:01:42 AM	SiCl4 post valve closed
10/2/2010	2:01:42 AM	Main Vac valve closed
10/2/2010	2:01:42 AM	Bypass valve closed
10/2/2010	2:01:42 AM	Helium valve opened
10/2/2010	2:01:42 AM	Bubbler valve opened
10/2/2010	2:01:42 AM	Helium MFC set to  500.000000
10/2/2010	2:01:42 AM	H2 MFC set to  0.000000
10/2/2010	2:01:42 AM	BCl3 MFC set to  0.000000
10/2/2010	2:01:42 AM	PHl3 MFC set to  0.000000
10/2/2010	2:01:42 AM	SiCl4 MFC set to  0.000000
10/2/2010	2:01:42 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	2:01:42 AM	Tube furnace set to 0
10/2/2010	2:18:19 AM	Helium valve closed
10/2/2010	2:18:19 AM	H2 valve closed
10/2/2010	2:18:19 AM	BCl3 valve closed
10/2/2010	2:18:19 AM	PH3 valve closed
10/2/2010	2:18:19 AM	SiCl4 pre valve closed
10/2/2010	2:18:19 AM	SiCl4 post valve closed
10/2/2010	2:18:19 AM	Main Vac valve closed
10/2/2010	2:18:19 AM	Bubbler valve closed
10/2/2010	2:18:19 AM	Bypass valve closed
10/2/2010	2:18:19 AM	Helium MFC set to  0.000000
10/2/2010	2:18:19 AM	H2 MFC set to  0.000000
10/2/2010	2:18:19 AM	BCl3 MFC set to  0.000000
10/2/2010	2:18:19 AM	PHl3 MFC set to  0.000000
10/2/2010	2:18:19 AM	SiCl4 MFC set to  0.000000
10/2/2010	2:18:19 AM	Bypass solenoid MFC set to  760.000000
10/2/2010	2:18:19 AM	Tube furnace set to 0
10/2/2010	2:18:19 AM	Baratron reads 739.276665 Torr and NaOH valve is open.  Emergency exit.
10/2/2010	2:18:24 AM	Run aborted at 2:18 AM
10/2/2010	2:18:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/2/2010	2:18:26 AM	Recipe started at 2:18 AM
10/2/2010	2:18:26 AM	H2 valve closed
10/2/2010	2:18:26 AM	BCl3 valve closed
10/2/2010	2:18:26 AM	PH3 valve closed
10/2/2010	2:18:26 AM	SiCl4 pre valve closed
10/2/2010	2:18:26 AM	SiCl4 post valve closed
10/2/2010	2:18:26 AM	Main Vac valve closed
10/2/2010	2:18:26 AM	Bypass valve closed
10/2/2010	2:18:26 AM	Bubbler valve closed
10/2/2010	2:18:26 AM	Helium valve opened
10/2/2010	2:18:26 AM	Helium MFC set to  500.000000
10/2/2010	2:18:26 AM	H2 MFC set to  0.000000
10/2/2010	2:18:26 AM	BCl3 MFC set to  0.000000
10/2/2010	2:18:26 AM	PHl3 MFC set to  0.000000
10/2/2010	2:18:26 AM	SiCl4 MFC set to  0.000000
10/2/2010	2:18:26 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	2:18:26 AM	Tube furnace set to 0
10/2/2010	2:18:27 AM	Helium valve closed
10/2/2010	2:18:27 AM	H2 valve closed
10/2/2010	2:18:27 AM	BCl3 valve closed
10/2/2010	2:18:27 AM	PH3 valve closed
10/2/2010	2:18:27 AM	SiCl4 pre valve closed
10/2/2010	2:18:27 AM	SiCl4 post valve closed
10/2/2010	2:18:27 AM	Main Vac valve closed
10/2/2010	2:18:27 AM	Bypass valve closed
10/2/2010	2:18:27 AM	Bubbler valve closed
10/2/2010	2:18:27 AM	Helium MFC set to  0.000000
10/2/2010	2:18:27 AM	H2 MFC set to  0.000000
10/2/2010	2:18:27 AM	BCl3 MFC set to  0.000000
10/2/2010	2:18:27 AM	PHl3 MFC set to  0.000000
10/2/2010	2:18:27 AM	SiCl4 MFC set to  0.000000
10/2/2010	2:18:27 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	2:18:27 AM	Tube furnace set to 0
10/2/2010	2:18:27 AM	Run finished at 2:18 AM
10/2/2010	2:18:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/2/2010	2:24:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	2:24:51 AM	Recipe started at 2:24 AM
10/2/2010	2:24:51 AM	Helium valve closed
10/2/2010	2:24:51 AM	H2 valve closed
10/2/2010	2:24:51 AM	BCl3 valve closed
10/2/2010	2:24:51 AM	PH3 valve closed
10/2/2010	2:24:51 AM	SiCl4 pre valve closed
10/2/2010	2:24:51 AM	SiCl4 post valve closed
10/2/2010	2:24:51 AM	Main Vac valve closed
10/2/2010	2:24:51 AM	Bubbler valve closed
10/2/2010	2:24:51 AM	Bypass valve opened
10/2/2010	2:24:51 AM	Helium MFC set to  0.000000
10/2/2010	2:24:51 AM	H2 MFC set to  0.000000
10/2/2010	2:24:51 AM	BCl3 MFC set to  0.000000
10/2/2010	2:24:51 AM	PHl3 MFC set to  0.000000
10/2/2010	2:24:51 AM	SiCl4 MFC set to  0.000000
10/2/2010	2:24:51 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	2:24:51 AM	Tube furnace set to 0
10/2/2010	2:25:32 AM	Helium valve closed
10/2/2010	2:25:32 AM	H2 valve closed
10/2/2010	2:25:32 AM	BCl3 valve closed
10/2/2010	2:25:32 AM	PH3 valve closed
10/2/2010	2:25:32 AM	SiCl4 pre valve closed
10/2/2010	2:25:32 AM	SiCl4 post valve closed
10/2/2010	2:25:32 AM	Bubbler valve closed
10/2/2010	2:25:32 AM	Main Vac valve opened
10/2/2010	2:25:32 AM	Bypass valve opened
10/2/2010	2:25:32 AM	Helium MFC set to  0.000000
10/2/2010	2:25:32 AM	H2 MFC set to  0.000000
10/2/2010	2:25:32 AM	BCl3 MFC set to  0.000000
10/2/2010	2:25:32 AM	PHl3 MFC set to  0.000000
10/2/2010	2:25:32 AM	SiCl4 MFC set to  0.000000
10/2/2010	2:25:32 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	2:25:32 AM	Tube furnace set to 0
10/2/2010	2:25:33 AM	Run finished at 2:25 AM
10/2/2010	2:25:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	2:26:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/2/2010	2:26:05 AM	Recipe started at 2:26 AM
10/2/2010	2:26:05 AM	H2 valve closed
10/2/2010	2:26:05 AM	BCl3 valve closed
10/2/2010	2:26:05 AM	PH3 valve closed
10/2/2010	2:26:05 AM	SiCl4 pre valve closed
10/2/2010	2:26:05 AM	SiCl4 post valve closed
10/2/2010	2:26:05 AM	Main Vac valve closed
10/2/2010	2:26:05 AM	Bypass valve closed
10/2/2010	2:26:05 AM	Bubbler valve closed
10/2/2010	2:26:05 AM	Helium valve opened
10/2/2010	2:26:05 AM	Helium MFC set to  500.000000
10/2/2010	2:26:05 AM	H2 MFC set to  0.000000
10/2/2010	2:26:05 AM	BCl3 MFC set to  0.000000
10/2/2010	2:26:05 AM	PHl3 MFC set to  0.000000
10/2/2010	2:26:05 AM	SiCl4 MFC set to  0.000000
10/2/2010	2:26:05 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	2:26:06 AM	Tube furnace set to 0
10/2/2010	2:27:21 AM	Helium valve closed
10/2/2010	2:27:21 AM	H2 valve closed
10/2/2010	2:27:21 AM	BCl3 valve closed
10/2/2010	2:27:21 AM	PH3 valve closed
10/2/2010	2:27:21 AM	SiCl4 pre valve closed
10/2/2010	2:27:21 AM	SiCl4 post valve closed
10/2/2010	2:27:21 AM	Main Vac valve closed
10/2/2010	2:27:21 AM	Bypass valve closed
10/2/2010	2:27:21 AM	Bubbler valve closed
10/2/2010	2:27:21 AM	Helium MFC set to  0.000000
10/2/2010	2:27:21 AM	H2 MFC set to  0.000000
10/2/2010	2:27:21 AM	BCl3 MFC set to  0.000000
10/2/2010	2:27:21 AM	PHl3 MFC set to  0.000000
10/2/2010	2:27:21 AM	SiCl4 MFC set to  0.000000
10/2/2010	2:27:21 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	2:27:21 AM	Tube furnace set to 0
10/2/2010	2:27:21 AM	Run finished at 2:27 AM
10/2/2010	2:27:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/2/2010	2:34:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	2:34:49 AM	Recipe started at 2:34 AM
10/2/2010	2:34:49 AM	Helium valve closed
10/2/2010	2:34:49 AM	H2 valve closed
10/2/2010	2:34:49 AM	BCl3 valve closed
10/2/2010	2:34:49 AM	PH3 valve closed
10/2/2010	2:34:49 AM	SiCl4 pre valve closed
10/2/2010	2:34:49 AM	SiCl4 post valve closed
10/2/2010	2:34:49 AM	Main Vac valve closed
10/2/2010	2:34:49 AM	Bubbler valve closed
10/2/2010	2:34:49 AM	Bypass valve opened
10/2/2010	2:34:49 AM	Helium MFC set to  0.000000
10/2/2010	2:34:49 AM	H2 MFC set to  0.000000
10/2/2010	2:34:49 AM	BCl3 MFC set to  0.000000
10/2/2010	2:34:49 AM	PHl3 MFC set to  0.000000
10/2/2010	2:34:49 AM	SiCl4 MFC set to  0.000000
10/2/2010	2:34:49 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	2:34:50 AM	Tube furnace set to 0
10/2/2010	2:35:30 AM	Helium valve closed
10/2/2010	2:35:30 AM	H2 valve closed
10/2/2010	2:35:30 AM	BCl3 valve closed
10/2/2010	2:35:30 AM	PH3 valve closed
10/2/2010	2:35:30 AM	SiCl4 pre valve closed
10/2/2010	2:35:30 AM	SiCl4 post valve closed
10/2/2010	2:35:30 AM	Bubbler valve closed
10/2/2010	2:35:30 AM	Main Vac valve opened
10/2/2010	2:35:30 AM	Bypass valve opened
10/2/2010	2:35:30 AM	Helium MFC set to  0.000000
10/2/2010	2:35:30 AM	H2 MFC set to  0.000000
10/2/2010	2:35:30 AM	BCl3 MFC set to  0.000000
10/2/2010	2:35:30 AM	PHl3 MFC set to  0.000000
10/2/2010	2:35:30 AM	SiCl4 MFC set to  0.000000
10/2/2010	2:35:30 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	2:35:30 AM	Tube furnace set to 0
10/2/2010	2:35:30 AM	Run finished at 2:35 AM
10/2/2010	2:35:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	2:36:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	2:36:37 AM	Recipe started at 2:36 AM
10/2/2010	2:36:37 AM	Helium valve closed
10/2/2010	2:36:37 AM	H2 valve closed
10/2/2010	2:36:37 AM	BCl3 valve closed
10/2/2010	2:36:37 AM	PH3 valve closed
10/2/2010	2:36:37 AM	SiCl4 pre valve closed
10/2/2010	2:36:37 AM	SiCl4 post valve closed
10/2/2010	2:36:37 AM	Main Vac valve closed
10/2/2010	2:36:37 AM	Bubbler valve closed
10/2/2010	2:36:37 AM	Bypass valve opened
10/2/2010	2:36:37 AM	Helium MFC set to  0.000000
10/2/2010	2:36:37 AM	H2 MFC set to  0.000000
10/2/2010	2:36:37 AM	BCl3 MFC set to  0.000000
10/2/2010	2:36:37 AM	PHl3 MFC set to  0.000000
10/2/2010	2:36:37 AM	SiCl4 MFC set to  0.000000
10/2/2010	2:36:37 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	2:36:37 AM	Tube furnace set to 0
10/2/2010	2:36:38 AM	Helium valve closed
10/2/2010	2:36:38 AM	H2 valve closed
10/2/2010	2:36:38 AM	BCl3 valve closed
10/2/2010	2:36:38 AM	PH3 valve closed
10/2/2010	2:36:38 AM	SiCl4 pre valve closed
10/2/2010	2:36:38 AM	SiCl4 post valve closed
10/2/2010	2:36:38 AM	Bubbler valve closed
10/2/2010	2:36:38 AM	Main Vac valve opened
10/2/2010	2:36:38 AM	Bypass valve opened
10/2/2010	2:36:38 AM	Helium MFC set to  0.000000
10/2/2010	2:36:38 AM	H2 MFC set to  0.000000
10/2/2010	2:36:38 AM	BCl3 MFC set to  0.000000
10/2/2010	2:36:38 AM	PHl3 MFC set to  0.000000
10/2/2010	2:36:38 AM	SiCl4 MFC set to  0.000000
10/2/2010	2:36:38 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	2:36:38 AM	Tube furnace set to 0
10/2/2010	2:36:38 AM	Run finished at 2:36 AM
10/2/2010	2:36:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	2:36:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/2/2010	2:36:53 AM	Recipe started at 2:36 AM
10/2/2010	2:36:53 AM	Helium valve closed
10/2/2010	2:36:53 AM	H2 valve closed
10/2/2010	2:36:53 AM	BCl3 valve closed
10/2/2010	2:36:53 AM	PH3 valve closed
10/2/2010	2:36:53 AM	SiCl4 pre valve closed
10/2/2010	2:36:53 AM	SiCl4 post valve closed
10/2/2010	2:36:53 AM	Main Vac valve closed
10/2/2010	2:36:53 AM	Bubbler valve closed
10/2/2010	2:36:53 AM	Bypass valve opened
10/2/2010	2:36:53 AM	Helium MFC set to  0.000000
10/2/2010	2:36:53 AM	H2 MFC set to  0.000000
10/2/2010	2:36:53 AM	BCl3 MFC set to  0.000000
10/2/2010	2:36:53 AM	PHl3 MFC set to  0.000000
10/2/2010	2:36:53 AM	SiCl4 MFC set to  0.000000
10/2/2010	2:36:53 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	2:36:53 AM	Tube furnace set to 0
10/2/2010	2:36:53 AM	Helium valve closed
10/2/2010	2:36:53 AM	H2 valve closed
10/2/2010	2:36:53 AM	BCl3 valve closed
10/2/2010	2:36:53 AM	PH3 valve closed
10/2/2010	2:36:53 AM	SiCl4 pre valve closed
10/2/2010	2:36:53 AM	SiCl4 post valve closed
10/2/2010	2:36:53 AM	Bubbler valve closed
10/2/2010	2:36:53 AM	Main Vac valve opened
10/2/2010	2:36:53 AM	Bypass valve opened
10/2/2010	2:36:53 AM	Helium MFC set to  0.000000
10/2/2010	2:36:53 AM	H2 MFC set to  0.000000
10/2/2010	2:36:53 AM	BCl3 MFC set to  0.000000
10/2/2010	2:36:53 AM	PHl3 MFC set to  0.000000
10/2/2010	2:36:53 AM	SiCl4 MFC set to  0.000000
10/2/2010	2:36:53 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	2:36:54 AM	Tube furnace set to 0
10/2/2010	2:37:54 AM	H2 valve closed
10/2/2010	2:37:54 AM	BCl3 valve closed
10/2/2010	2:37:54 AM	PH3 valve closed
10/2/2010	2:37:54 AM	SiCl4 pre valve closed
10/2/2010	2:37:54 AM	SiCl4 post valve closed
10/2/2010	2:37:54 AM	Bubbler valve closed
10/2/2010	2:37:54 AM	Helium valve opened
10/2/2010	2:37:54 AM	Main Vac valve opened
10/2/2010	2:37:54 AM	Bypass valve opened
10/2/2010	2:37:54 AM	Helium MFC set to  100.000000
10/2/2010	2:37:54 AM	H2 MFC set to  0.000000
10/2/2010	2:37:54 AM	BCl3 MFC set to  0.000000
10/2/2010	2:37:54 AM	PHl3 MFC set to  0.000000
10/2/2010	2:37:54 AM	SiCl4 MFC set to  0.000000
10/2/2010	2:37:54 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	2:37:54 AM	Tube furnace set to 0
10/2/2010	2:38:54 AM	Helium valve closed
10/2/2010	2:38:54 AM	H2 valve closed
10/2/2010	2:38:54 AM	BCl3 valve closed
10/2/2010	2:38:54 AM	PH3 valve closed
10/2/2010	2:38:54 AM	SiCl4 pre valve closed
10/2/2010	2:38:54 AM	SiCl4 post valve closed
10/2/2010	2:38:54 AM	Bubbler valve closed
10/2/2010	2:38:54 AM	Main Vac valve opened
10/2/2010	2:38:54 AM	Bypass valve opened
10/2/2010	2:38:54 AM	Helium MFC set to  0.000000
10/2/2010	2:38:54 AM	H2 MFC set to  0.000000
10/2/2010	2:38:54 AM	BCl3 MFC set to  0.000000
10/2/2010	2:38:54 AM	PHl3 MFC set to  0.000000
10/2/2010	2:38:54 AM	SiCl4 MFC set to  0.000000
10/2/2010	2:38:54 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	2:38:54 AM	Tube furnace set to 0
10/2/2010	2:39:54 AM	H2 valve closed
10/2/2010	2:39:54 AM	BCl3 valve closed
10/2/2010	2:39:54 AM	PH3 valve closed
10/2/2010	2:39:54 AM	SiCl4 pre valve closed
10/2/2010	2:39:54 AM	SiCl4 post valve closed
10/2/2010	2:39:54 AM	Bubbler valve closed
10/2/2010	2:39:54 AM	Helium valve opened
10/2/2010	2:39:54 AM	Main Vac valve opened
10/2/2010	2:39:54 AM	Bypass valve opened
10/2/2010	2:39:54 AM	Helium MFC set to  100.000000
10/2/2010	2:39:54 AM	H2 MFC set to  0.000000
10/2/2010	2:39:54 AM	BCl3 MFC set to  0.000000
10/2/2010	2:39:54 AM	PHl3 MFC set to  0.000000
10/2/2010	2:39:54 AM	SiCl4 MFC set to  0.000000
10/2/2010	2:39:54 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	2:39:54 AM	Tube furnace set to 0
10/2/2010	2:40:54 AM	Helium valve closed
10/2/2010	2:40:54 AM	H2 valve closed
10/2/2010	2:40:54 AM	BCl3 valve closed
10/2/2010	2:40:54 AM	PH3 valve closed
10/2/2010	2:40:54 AM	SiCl4 pre valve closed
10/2/2010	2:40:54 AM	SiCl4 post valve closed
10/2/2010	2:40:54 AM	Bubbler valve closed
10/2/2010	2:40:54 AM	Main Vac valve opened
10/2/2010	2:40:54 AM	Bypass valve opened
10/2/2010	2:40:54 AM	Helium MFC set to  0.000000
10/2/2010	2:40:54 AM	H2 MFC set to  0.000000
10/2/2010	2:40:54 AM	BCl3 MFC set to  0.000000
10/2/2010	2:40:54 AM	PHl3 MFC set to  0.000000
10/2/2010	2:40:54 AM	SiCl4 MFC set to  0.000000
10/2/2010	2:40:54 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	2:40:54 AM	Tube furnace set to 0
10/2/2010	2:41:54 AM	H2 valve closed
10/2/2010	2:41:54 AM	BCl3 valve closed
10/2/2010	2:41:54 AM	PH3 valve closed
10/2/2010	2:41:54 AM	SiCl4 pre valve closed
10/2/2010	2:41:54 AM	SiCl4 post valve closed
10/2/2010	2:41:54 AM	Bubbler valve closed
10/2/2010	2:41:54 AM	Helium valve opened
10/2/2010	2:41:54 AM	Main Vac valve opened
10/2/2010	2:41:54 AM	Bypass valve opened
10/2/2010	2:41:54 AM	Helium MFC set to  100.000000
10/2/2010	2:41:54 AM	H2 MFC set to  0.000000
10/2/2010	2:41:54 AM	BCl3 MFC set to  0.000000
10/2/2010	2:41:54 AM	PHl3 MFC set to  0.000000
10/2/2010	2:41:54 AM	SiCl4 MFC set to  0.000000
10/2/2010	2:41:54 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	2:41:55 AM	Tube furnace set to 0
10/2/2010	2:42:55 AM	Helium valve closed
10/2/2010	2:42:55 AM	H2 valve closed
10/2/2010	2:42:55 AM	BCl3 valve closed
10/2/2010	2:42:55 AM	PH3 valve closed
10/2/2010	2:42:55 AM	SiCl4 pre valve closed
10/2/2010	2:42:55 AM	SiCl4 post valve closed
10/2/2010	2:42:55 AM	Bubbler valve closed
10/2/2010	2:42:55 AM	Main Vac valve opened
10/2/2010	2:42:55 AM	Bypass valve opened
10/2/2010	2:42:55 AM	Helium MFC set to  0.000000
10/2/2010	2:42:55 AM	H2 MFC set to  0.000000
10/2/2010	2:42:55 AM	BCl3 MFC set to  0.000000
10/2/2010	2:42:55 AM	PHl3 MFC set to  0.000000
10/2/2010	2:42:55 AM	SiCl4 MFC set to  0.000000
10/2/2010	2:42:55 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	2:42:55 AM	Tube furnace set to 0
10/2/2010	2:43:55 AM	H2 valve closed
10/2/2010	2:43:55 AM	BCl3 valve closed
10/2/2010	2:43:55 AM	PH3 valve closed
10/2/2010	2:43:55 AM	SiCl4 pre valve closed
10/2/2010	2:43:55 AM	SiCl4 post valve closed
10/2/2010	2:43:55 AM	Bubbler valve closed
10/2/2010	2:43:55 AM	Helium valve opened
10/2/2010	2:43:55 AM	Main Vac valve opened
10/2/2010	2:43:55 AM	Bypass valve opened
10/2/2010	2:43:55 AM	Helium MFC set to  100.000000
10/2/2010	2:43:55 AM	H2 MFC set to  0.000000
10/2/2010	2:43:55 AM	BCl3 MFC set to  0.000000
10/2/2010	2:43:55 AM	PHl3 MFC set to  0.000000
10/2/2010	2:43:55 AM	SiCl4 MFC set to  0.000000
10/2/2010	2:43:55 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	2:43:55 AM	Tube furnace set to 0
10/2/2010	2:44:55 AM	Helium valve closed
10/2/2010	2:44:55 AM	H2 valve closed
10/2/2010	2:44:55 AM	BCl3 valve closed
10/2/2010	2:44:55 AM	PH3 valve closed
10/2/2010	2:44:55 AM	SiCl4 pre valve closed
10/2/2010	2:44:55 AM	SiCl4 post valve closed
10/2/2010	2:44:55 AM	Bubbler valve closed
10/2/2010	2:44:55 AM	Main Vac valve opened
10/2/2010	2:44:55 AM	Bypass valve opened
10/2/2010	2:44:55 AM	Helium MFC set to  0.000000
10/2/2010	2:44:55 AM	H2 MFC set to  0.000000
10/2/2010	2:44:55 AM	BCl3 MFC set to  0.000000
10/2/2010	2:44:55 AM	PHl3 MFC set to  0.000000
10/2/2010	2:44:55 AM	SiCl4 MFC set to  0.000000
10/2/2010	2:44:55 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	2:44:55 AM	Tube furnace set to 0
10/2/2010	2:45:55 AM	H2 valve closed
10/2/2010	2:45:55 AM	BCl3 valve closed
10/2/2010	2:45:55 AM	PH3 valve closed
10/2/2010	2:45:55 AM	SiCl4 pre valve closed
10/2/2010	2:45:55 AM	SiCl4 post valve closed
10/2/2010	2:45:55 AM	Bubbler valve closed
10/2/2010	2:45:55 AM	Helium valve opened
10/2/2010	2:45:55 AM	Main Vac valve opened
10/2/2010	2:45:55 AM	Bypass valve opened
10/2/2010	2:45:55 AM	Helium MFC set to  100.000000
10/2/2010	2:45:55 AM	H2 MFC set to  0.000000
10/2/2010	2:45:55 AM	BCl3 MFC set to  0.000000
10/2/2010	2:45:55 AM	PHl3 MFC set to  0.000000
10/2/2010	2:45:55 AM	SiCl4 MFC set to  0.000000
10/2/2010	2:45:55 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	2:45:55 AM	Tube furnace set to 0
10/2/2010	2:46:55 AM	Helium valve closed
10/2/2010	2:46:55 AM	H2 valve closed
10/2/2010	2:46:55 AM	BCl3 valve closed
10/2/2010	2:46:55 AM	PH3 valve closed
10/2/2010	2:46:55 AM	SiCl4 pre valve closed
10/2/2010	2:46:55 AM	SiCl4 post valve closed
10/2/2010	2:46:55 AM	Bubbler valve closed
10/2/2010	2:46:55 AM	Main Vac valve opened
10/2/2010	2:46:55 AM	Bypass valve opened
10/2/2010	2:46:55 AM	Helium MFC set to  0.000000
10/2/2010	2:46:55 AM	H2 MFC set to  0.000000
10/2/2010	2:46:55 AM	BCl3 MFC set to  0.000000
10/2/2010	2:46:55 AM	PHl3 MFC set to  0.000000
10/2/2010	2:46:55 AM	SiCl4 MFC set to  0.000000
10/2/2010	2:46:55 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	2:46:56 AM	Tube furnace set to 0
10/2/2010	2:47:56 AM	H2 valve closed
10/2/2010	2:47:56 AM	BCl3 valve closed
10/2/2010	2:47:56 AM	PH3 valve closed
10/2/2010	2:47:56 AM	SiCl4 pre valve closed
10/2/2010	2:47:56 AM	SiCl4 post valve closed
10/2/2010	2:47:56 AM	Bubbler valve closed
10/2/2010	2:47:56 AM	Helium valve opened
10/2/2010	2:47:56 AM	Main Vac valve opened
10/2/2010	2:47:56 AM	Bypass valve opened
10/2/2010	2:47:56 AM	Helium MFC set to  100.000000
10/2/2010	2:47:56 AM	H2 MFC set to  0.000000
10/2/2010	2:47:56 AM	BCl3 MFC set to  0.000000
10/2/2010	2:47:56 AM	PHl3 MFC set to  0.000000
10/2/2010	2:47:56 AM	SiCl4 MFC set to  0.000000
10/2/2010	2:47:56 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	2:47:56 AM	Tube furnace set to 0
10/2/2010	2:48:56 AM	Helium valve closed
10/2/2010	2:48:56 AM	H2 valve closed
10/2/2010	2:48:56 AM	BCl3 valve closed
10/2/2010	2:48:56 AM	PH3 valve closed
10/2/2010	2:48:56 AM	SiCl4 pre valve closed
10/2/2010	2:48:56 AM	SiCl4 post valve closed
10/2/2010	2:48:56 AM	Bubbler valve closed
10/2/2010	2:48:56 AM	Main Vac valve opened
10/2/2010	2:48:56 AM	Bypass valve opened
10/2/2010	2:48:56 AM	Helium MFC set to  0.000000
10/2/2010	2:48:56 AM	H2 MFC set to  0.000000
10/2/2010	2:48:56 AM	BCl3 MFC set to  0.000000
10/2/2010	2:48:56 AM	PHl3 MFC set to  0.000000
10/2/2010	2:48:56 AM	SiCl4 MFC set to  0.000000
10/2/2010	2:48:56 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	2:48:56 AM	Tube furnace set to 0
10/2/2010	2:49:56 AM	H2 valve closed
10/2/2010	2:49:56 AM	BCl3 valve closed
10/2/2010	2:49:56 AM	PH3 valve closed
10/2/2010	2:49:56 AM	SiCl4 pre valve closed
10/2/2010	2:49:56 AM	SiCl4 post valve closed
10/2/2010	2:49:56 AM	Bubbler valve closed
10/2/2010	2:49:56 AM	Helium valve opened
10/2/2010	2:49:56 AM	Main Vac valve opened
10/2/2010	2:49:56 AM	Bypass valve opened
10/2/2010	2:49:56 AM	Helium MFC set to  100.000000
10/2/2010	2:49:56 AM	H2 MFC set to  0.000000
10/2/2010	2:49:56 AM	BCl3 MFC set to  0.000000
10/2/2010	2:49:56 AM	PHl3 MFC set to  0.000000
10/2/2010	2:49:56 AM	SiCl4 MFC set to  0.000000
10/2/2010	2:49:56 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	2:49:56 AM	Tube furnace set to 0
10/2/2010	2:50:56 AM	Helium valve closed
10/2/2010	2:50:56 AM	H2 valve closed
10/2/2010	2:50:56 AM	BCl3 valve closed
10/2/2010	2:50:56 AM	PH3 valve closed
10/2/2010	2:50:56 AM	SiCl4 pre valve closed
10/2/2010	2:50:56 AM	SiCl4 post valve closed
10/2/2010	2:50:56 AM	Bubbler valve closed
10/2/2010	2:50:56 AM	Main Vac valve opened
10/2/2010	2:50:56 AM	Bypass valve opened
10/2/2010	2:50:56 AM	Helium MFC set to  0.000000
10/2/2010	2:50:56 AM	H2 MFC set to  0.000000
10/2/2010	2:50:56 AM	BCl3 MFC set to  0.000000
10/2/2010	2:50:56 AM	PHl3 MFC set to  0.000000
10/2/2010	2:50:56 AM	SiCl4 MFC set to  0.000000
10/2/2010	2:50:56 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	2:50:56 AM	Tube furnace set to 0
10/2/2010	2:51:56 AM	H2 valve closed
10/2/2010	2:51:56 AM	BCl3 valve closed
10/2/2010	2:51:56 AM	PH3 valve closed
10/2/2010	2:51:56 AM	SiCl4 pre valve closed
10/2/2010	2:51:56 AM	SiCl4 post valve closed
10/2/2010	2:51:56 AM	Bubbler valve closed
10/2/2010	2:51:56 AM	Helium valve opened
10/2/2010	2:51:56 AM	Main Vac valve opened
10/2/2010	2:51:56 AM	Bypass valve opened
10/2/2010	2:51:56 AM	Helium MFC set to  100.000000
10/2/2010	2:51:56 AM	H2 MFC set to  0.000000
10/2/2010	2:51:56 AM	BCl3 MFC set to  0.000000
10/2/2010	2:51:56 AM	PHl3 MFC set to  0.000000
10/2/2010	2:51:56 AM	SiCl4 MFC set to  0.000000
10/2/2010	2:51:56 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	2:51:57 AM	Tube furnace set to 0
10/2/2010	2:52:57 AM	Helium valve closed
10/2/2010	2:52:57 AM	H2 valve closed
10/2/2010	2:52:57 AM	BCl3 valve closed
10/2/2010	2:52:57 AM	PH3 valve closed
10/2/2010	2:52:57 AM	SiCl4 pre valve closed
10/2/2010	2:52:57 AM	SiCl4 post valve closed
10/2/2010	2:52:57 AM	Bubbler valve closed
10/2/2010	2:52:57 AM	Main Vac valve opened
10/2/2010	2:52:57 AM	Bypass valve opened
10/2/2010	2:52:57 AM	Helium MFC set to  0.000000
10/2/2010	2:52:57 AM	H2 MFC set to  0.000000
10/2/2010	2:52:57 AM	BCl3 MFC set to  0.000000
10/2/2010	2:52:57 AM	PHl3 MFC set to  0.000000
10/2/2010	2:52:57 AM	SiCl4 MFC set to  0.000000
10/2/2010	2:52:57 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	2:52:57 AM	Tube furnace set to 0
10/2/2010	2:53:57 AM	H2 valve closed
10/2/2010	2:53:57 AM	BCl3 valve closed
10/2/2010	2:53:57 AM	PH3 valve closed
10/2/2010	2:53:57 AM	SiCl4 pre valve closed
10/2/2010	2:53:57 AM	SiCl4 post valve closed
10/2/2010	2:53:57 AM	Bubbler valve closed
10/2/2010	2:53:57 AM	Helium valve opened
10/2/2010	2:53:57 AM	Main Vac valve opened
10/2/2010	2:53:57 AM	Bypass valve opened
10/2/2010	2:53:57 AM	Helium MFC set to  100.000000
10/2/2010	2:53:57 AM	H2 MFC set to  0.000000
10/2/2010	2:53:57 AM	BCl3 MFC set to  0.000000
10/2/2010	2:53:57 AM	PHl3 MFC set to  0.000000
10/2/2010	2:53:57 AM	SiCl4 MFC set to  0.000000
10/2/2010	2:53:57 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	2:53:57 AM	Tube furnace set to 0
10/2/2010	2:54:57 AM	Helium valve closed
10/2/2010	2:54:57 AM	H2 valve closed
10/2/2010	2:54:57 AM	BCl3 valve closed
10/2/2010	2:54:57 AM	PH3 valve closed
10/2/2010	2:54:57 AM	SiCl4 pre valve closed
10/2/2010	2:54:57 AM	SiCl4 post valve closed
10/2/2010	2:54:57 AM	Bubbler valve closed
10/2/2010	2:54:57 AM	Main Vac valve opened
10/2/2010	2:54:57 AM	Bypass valve opened
10/2/2010	2:54:57 AM	Helium MFC set to  0.000000
10/2/2010	2:54:57 AM	H2 MFC set to  0.000000
10/2/2010	2:54:57 AM	BCl3 MFC set to  0.000000
10/2/2010	2:54:57 AM	PHl3 MFC set to  0.000000
10/2/2010	2:54:57 AM	SiCl4 MFC set to  0.000000
10/2/2010	2:54:57 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	2:54:57 AM	Tube furnace set to 0
10/2/2010	2:55:57 AM	H2 valve closed
10/2/2010	2:55:57 AM	BCl3 valve closed
10/2/2010	2:55:57 AM	PH3 valve closed
10/2/2010	2:55:57 AM	SiCl4 pre valve closed
10/2/2010	2:55:57 AM	SiCl4 post valve closed
10/2/2010	2:55:57 AM	Bubbler valve closed
10/2/2010	2:55:57 AM	Helium valve opened
10/2/2010	2:55:57 AM	Main Vac valve opened
10/2/2010	2:55:57 AM	Bypass valve opened
10/2/2010	2:55:57 AM	Helium MFC set to  100.000000
10/2/2010	2:55:57 AM	H2 MFC set to  0.000000
10/2/2010	2:55:57 AM	BCl3 MFC set to  0.000000
10/2/2010	2:55:57 AM	PHl3 MFC set to  0.000000
10/2/2010	2:55:57 AM	SiCl4 MFC set to  0.000000
10/2/2010	2:55:57 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	2:55:57 AM	Tube furnace set to 0
10/2/2010	2:56:57 AM	Helium valve closed
10/2/2010	2:56:57 AM	H2 valve closed
10/2/2010	2:56:57 AM	BCl3 valve closed
10/2/2010	2:56:57 AM	PH3 valve closed
10/2/2010	2:56:57 AM	SiCl4 pre valve closed
10/2/2010	2:56:57 AM	SiCl4 post valve closed
10/2/2010	2:56:57 AM	Bubbler valve closed
10/2/2010	2:56:57 AM	Main Vac valve opened
10/2/2010	2:56:57 AM	Bypass valve opened
10/2/2010	2:56:57 AM	Helium MFC set to  0.000000
10/2/2010	2:56:57 AM	H2 MFC set to  0.000000
10/2/2010	2:56:57 AM	BCl3 MFC set to  0.000000
10/2/2010	2:56:57 AM	PHl3 MFC set to  0.000000
10/2/2010	2:56:57 AM	SiCl4 MFC set to  0.000000
10/2/2010	2:56:57 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	2:56:58 AM	Tube furnace set to 0
10/2/2010	2:56:59 AM	Run finished at 2:56 AM
10/2/2010	2:56:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/2/2010	2:57:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	2:57:03 AM	Recipe started at 2:57 AM
10/2/2010	2:57:03 AM	Helium valve closed
10/2/2010	2:57:03 AM	H2 valve closed
10/2/2010	2:57:03 AM	BCl3 valve closed
10/2/2010	2:57:03 AM	PH3 valve closed
10/2/2010	2:57:03 AM	SiCl4 pre valve closed
10/2/2010	2:57:03 AM	SiCl4 post valve closed
10/2/2010	2:57:03 AM	Main Vac valve closed
10/2/2010	2:57:03 AM	Bubbler valve closed
10/2/2010	2:57:03 AM	Bypass valve opened
10/2/2010	2:57:03 AM	Helium MFC set to  0.000000
10/2/2010	2:57:03 AM	H2 MFC set to  0.000000
10/2/2010	2:57:03 AM	BCl3 MFC set to  0.000000
10/2/2010	2:57:03 AM	PHl3 MFC set to  0.000000
10/2/2010	2:57:03 AM	SiCl4 MFC set to  0.000000
10/2/2010	2:57:03 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	2:57:04 AM	Tube furnace set to 0
10/2/2010	2:57:04 AM	Helium valve closed
10/2/2010	2:57:04 AM	H2 valve closed
10/2/2010	2:57:04 AM	BCl3 valve closed
10/2/2010	2:57:04 AM	PH3 valve closed
10/2/2010	2:57:04 AM	SiCl4 pre valve closed
10/2/2010	2:57:04 AM	SiCl4 post valve closed
10/2/2010	2:57:04 AM	Bubbler valve closed
10/2/2010	2:57:04 AM	Main Vac valve opened
10/2/2010	2:57:04 AM	Bypass valve opened
10/2/2010	2:57:04 AM	Helium MFC set to  0.000000
10/2/2010	2:57:04 AM	H2 MFC set to  0.000000
10/2/2010	2:57:04 AM	BCl3 MFC set to  0.000000
10/2/2010	2:57:04 AM	PHl3 MFC set to  0.000000
10/2/2010	2:57:04 AM	SiCl4 MFC set to  0.000000
10/2/2010	2:57:04 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	2:57:04 AM	Tube furnace set to 0
10/2/2010	2:57:04 AM	Run finished at 2:57 AM
10/2/2010	2:57:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	2:57:32 AM	Helium MFC set to  100.000000
10/2/2010	2:57:33 AM	Helium valve opened
10/2/2010	3:04:38 AM	Helium valve closed
10/2/2010	3:04:39 AM	Helium MFC set to  100.000000
10/2/2010	3:04:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	3:04:41 AM	Recipe started at 3:04 AM
10/2/2010	3:04:41 AM	Helium valve closed
10/2/2010	3:04:41 AM	H2 valve closed
10/2/2010	3:04:41 AM	BCl3 valve closed
10/2/2010	3:04:41 AM	PH3 valve closed
10/2/2010	3:04:41 AM	SiCl4 pre valve closed
10/2/2010	3:04:41 AM	SiCl4 post valve closed
10/2/2010	3:04:41 AM	Main Vac valve closed
10/2/2010	3:04:41 AM	Bubbler valve closed
10/2/2010	3:04:41 AM	Bypass valve opened
10/2/2010	3:04:41 AM	Helium MFC set to  0.000000
10/2/2010	3:04:41 AM	H2 MFC set to  0.000000
10/2/2010	3:04:41 AM	BCl3 MFC set to  0.000000
10/2/2010	3:04:41 AM	PHl3 MFC set to  0.000000
10/2/2010	3:04:41 AM	SiCl4 MFC set to  0.000000
10/2/2010	3:04:41 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	3:04:41 AM	Tube furnace set to 0
10/2/2010	3:04:41 AM	Helium valve closed
10/2/2010	3:04:41 AM	H2 valve closed
10/2/2010	3:04:41 AM	BCl3 valve closed
10/2/2010	3:04:41 AM	PH3 valve closed
10/2/2010	3:04:41 AM	SiCl4 pre valve closed
10/2/2010	3:04:41 AM	SiCl4 post valve closed
10/2/2010	3:04:41 AM	Bubbler valve closed
10/2/2010	3:04:41 AM	Main Vac valve opened
10/2/2010	3:04:41 AM	Bypass valve opened
10/2/2010	3:04:41 AM	Helium MFC set to  0.000000
10/2/2010	3:04:41 AM	H2 MFC set to  0.000000
10/2/2010	3:04:41 AM	BCl3 MFC set to  0.000000
10/2/2010	3:04:41 AM	PHl3 MFC set to  0.000000
10/2/2010	3:04:41 AM	SiCl4 MFC set to  0.000000
10/2/2010	3:04:41 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	3:04:41 AM	Tube furnace set to 0
10/2/2010	3:04:41 AM	Run finished at 3:04 AM
10/2/2010	3:04:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	3:05:25 AM	Helium MFC set to  100.000000
10/2/2010	3:05:27 AM	Helium valve opened
10/2/2010	3:05:32 AM	Helium MFC set to  100.000000
10/2/2010	3:14:36 AM	Helium valve closed
10/2/2010	3:14:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	3:14:38 AM	Recipe started at 3:14 AM
10/2/2010	3:14:38 AM	Helium valve closed
10/2/2010	3:14:38 AM	H2 valve closed
10/2/2010	3:14:38 AM	BCl3 valve closed
10/2/2010	3:14:38 AM	PH3 valve closed
10/2/2010	3:14:38 AM	SiCl4 pre valve closed
10/2/2010	3:14:38 AM	SiCl4 post valve closed
10/2/2010	3:14:38 AM	Main Vac valve closed
10/2/2010	3:14:38 AM	Bubbler valve closed
10/2/2010	3:14:38 AM	Bypass valve opened
10/2/2010	3:14:38 AM	Helium MFC set to  0.000000
10/2/2010	3:14:38 AM	H2 MFC set to  0.000000
10/2/2010	3:14:38 AM	BCl3 MFC set to  0.000000
10/2/2010	3:14:38 AM	PHl3 MFC set to  0.000000
10/2/2010	3:14:38 AM	SiCl4 MFC set to  0.000000
10/2/2010	3:14:38 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	3:14:38 AM	Tube furnace set to 0
10/2/2010	3:14:38 AM	Helium valve closed
10/2/2010	3:14:38 AM	H2 valve closed
10/2/2010	3:14:38 AM	BCl3 valve closed
10/2/2010	3:14:38 AM	PH3 valve closed
10/2/2010	3:14:38 AM	SiCl4 pre valve closed
10/2/2010	3:14:38 AM	SiCl4 post valve closed
10/2/2010	3:14:38 AM	Bubbler valve closed
10/2/2010	3:14:38 AM	Main Vac valve opened
10/2/2010	3:14:38 AM	Bypass valve opened
10/2/2010	3:14:38 AM	Helium MFC set to  0.000000
10/2/2010	3:14:38 AM	H2 MFC set to  0.000000
10/2/2010	3:14:38 AM	BCl3 MFC set to  0.000000
10/2/2010	3:14:38 AM	PHl3 MFC set to  0.000000
10/2/2010	3:14:38 AM	SiCl4 MFC set to  0.000000
10/2/2010	3:14:38 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	3:14:38 AM	Tube furnace set to 0
10/2/2010	3:14:38 AM	Run finished at 3:14 AM
10/2/2010	3:14:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	3:17:20 AM	Helium MFC set to  100.000000
10/2/2010	3:17:21 AM	Helium valve opened
10/2/2010	3:18:45 AM	Helium valve closed
10/2/2010	3:18:46 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	3:18:47 AM	Recipe started at 3:18 AM
10/2/2010	3:18:47 AM	Helium valve closed
10/2/2010	3:18:47 AM	H2 valve closed
10/2/2010	3:18:47 AM	BCl3 valve closed
10/2/2010	3:18:47 AM	PH3 valve closed
10/2/2010	3:18:47 AM	SiCl4 pre valve closed
10/2/2010	3:18:47 AM	SiCl4 post valve closed
10/2/2010	3:18:47 AM	Main Vac valve closed
10/2/2010	3:18:47 AM	Bubbler valve closed
10/2/2010	3:18:47 AM	Bypass valve opened
10/2/2010	3:18:47 AM	Helium MFC set to  0.000000
10/2/2010	3:18:47 AM	H2 MFC set to  0.000000
10/2/2010	3:18:47 AM	BCl3 MFC set to  0.000000
10/2/2010	3:18:47 AM	PHl3 MFC set to  0.000000
10/2/2010	3:18:47 AM	SiCl4 MFC set to  0.000000
10/2/2010	3:18:47 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	3:18:47 AM	Tube furnace set to 0
10/2/2010	3:18:47 AM	Helium valve closed
10/2/2010	3:18:47 AM	H2 valve closed
10/2/2010	3:18:47 AM	BCl3 valve closed
10/2/2010	3:18:47 AM	PH3 valve closed
10/2/2010	3:18:47 AM	SiCl4 pre valve closed
10/2/2010	3:18:47 AM	SiCl4 post valve closed
10/2/2010	3:18:47 AM	Bubbler valve closed
10/2/2010	3:18:47 AM	Main Vac valve opened
10/2/2010	3:18:47 AM	Bypass valve opened
10/2/2010	3:18:47 AM	Helium MFC set to  0.000000
10/2/2010	3:18:47 AM	H2 MFC set to  0.000000
10/2/2010	3:18:47 AM	BCl3 MFC set to  0.000000
10/2/2010	3:18:47 AM	PHl3 MFC set to  0.000000
10/2/2010	3:18:47 AM	SiCl4 MFC set to  0.000000
10/2/2010	3:18:47 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	3:18:48 AM	Tube furnace set to 0
10/2/2010	3:18:48 AM	Run finished at 3:18 AM
10/2/2010	3:18:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	3:19:31 AM	Recipe started at 3:19 AM
10/2/2010	3:19:31 AM	Helium valve closed
10/2/2010	3:19:31 AM	BCl3 valve closed
10/2/2010	3:19:31 AM	PH3 valve closed
10/2/2010	3:19:31 AM	SiCl4 pre valve closed
10/2/2010	3:19:31 AM	SiCl4 post valve closed
10/2/2010	3:19:31 AM	Main Vac valve closed
10/2/2010	3:19:31 AM	Bypass valve closed
10/2/2010	3:19:31 AM	Bubbler valve closed
10/2/2010	3:19:31 AM	H2 valve opened
10/2/2010	3:19:31 AM	Helium MFC set to  0.000000
10/2/2010	3:19:31 AM	H2 MFC set to  500.000000
10/2/2010	3:19:31 AM	BCl3 MFC set to  0.000000
10/2/2010	3:19:31 AM	PHl3 MFC set to  0.000000
10/2/2010	3:19:32 AM	SiCl4 MFC set to  0.000000
10/2/2010	3:19:32 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	3:19:32 AM	Tube furnace set to 1000
10/2/2010	3:20:50 AM	Helium valve closed
10/2/2010	3:20:50 AM	BCl3 valve closed
10/2/2010	3:20:50 AM	PH3 valve closed
10/2/2010	3:20:50 AM	SiCl4 pre valve closed
10/2/2010	3:20:50 AM	SiCl4 post valve closed
10/2/2010	3:20:50 AM	Main Vac valve closed
10/2/2010	3:20:50 AM	Bypass valve closed
10/2/2010	3:20:50 AM	H2 valve opened
10/2/2010	3:20:50 AM	Bubbler valve opened
10/2/2010	3:20:50 AM	Helium MFC set to  0.000000
10/2/2010	3:20:50 AM	H2 MFC set to  500.000000
10/2/2010	3:20:50 AM	BCl3 MFC set to  0.000000
10/2/2010	3:20:50 AM	PHl3 MFC set to  0.000000
10/2/2010	3:20:50 AM	SiCl4 MFC set to  0.000000
10/2/2010	3:20:50 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	3:20:50 AM	Tube furnace set to 1000
10/2/2010	3:40:50 AM	Helium valve closed
10/2/2010	3:40:50 AM	PH3 valve closed
10/2/2010	3:40:50 AM	Main Vac valve closed
10/2/2010	3:40:50 AM	Bypass valve closed
10/2/2010	3:40:50 AM	H2 valve opened
10/2/2010	3:40:50 AM	BCl3 valve opened
10/2/2010	3:40:50 AM	SiCl4 pre valve opened
10/2/2010	3:40:50 AM	SiCl4 post valve opened
10/2/2010	3:40:50 AM	Bubbler valve opened
10/2/2010	3:40:50 AM	Helium MFC set to  0.000000
10/2/2010	3:40:50 AM	H2 MFC set to  500.000000
10/2/2010	3:40:50 AM	BCl3 MFC set to  12.000000
10/2/2010	3:40:50 AM	PHl3 MFC set to  0.000000
10/2/2010	3:40:50 AM	SiCl4 MFC set to  50.000000
10/2/2010	3:40:50 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	3:40:50 AM	Tube furnace set to 1000
10/2/2010	3:54:10 AM	Helium valve closed
10/2/2010	3:54:10 AM	BCl3 valve closed
10/2/2010	3:54:10 AM	PH3 valve closed
10/2/2010	3:54:10 AM	SiCl4 pre valve closed
10/2/2010	3:54:10 AM	SiCl4 post valve closed
10/2/2010	3:54:10 AM	Main Vac valve closed
10/2/2010	3:54:10 AM	Bypass valve closed
10/2/2010	3:54:10 AM	H2 valve opened
10/2/2010	3:54:10 AM	Bubbler valve opened
10/2/2010	3:54:10 AM	Helium MFC set to  0.000000
10/2/2010	3:54:10 AM	H2 MFC set to  500.000000
10/2/2010	3:54:10 AM	BCl3 MFC set to  0.000000
10/2/2010	3:54:10 AM	PHl3 MFC set to  0.000000
10/2/2010	3:54:10 AM	SiCl4 MFC set to  0.000000
10/2/2010	3:54:10 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	3:54:11 AM	Tube furnace set to 750
10/2/2010	4:14:11 AM	H2 valve closed
10/2/2010	4:14:11 AM	BCl3 valve closed
10/2/2010	4:14:11 AM	PH3 valve closed
10/2/2010	4:14:11 AM	SiCl4 pre valve closed
10/2/2010	4:14:11 AM	SiCl4 post valve closed
10/2/2010	4:14:11 AM	Main Vac valve closed
10/2/2010	4:14:11 AM	Bypass valve closed
10/2/2010	4:14:11 AM	Helium valve opened
10/2/2010	4:14:11 AM	Bubbler valve opened
10/2/2010	4:14:11 AM	Helium MFC set to  500.000000
10/2/2010	4:14:11 AM	H2 MFC set to  0.000000
10/2/2010	4:14:11 AM	BCl3 MFC set to  0.000000
10/2/2010	4:14:11 AM	PHl3 MFC set to  0.000000
10/2/2010	4:14:11 AM	SiCl4 MFC set to  0.000000
10/2/2010	4:14:11 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:14:11 AM	Tube furnace set to 0
10/2/2010	4:33:55 AM	Run aborted at 4:33 AM
10/2/2010	4:33:55 AM	Helium valve closed
10/2/2010	4:33:55 AM	H2 valve closed
10/2/2010	4:33:55 AM	BCl3 valve closed
10/2/2010	4:33:55 AM	PH3 valve closed
10/2/2010	4:33:55 AM	SiCl4 pre valve closed
10/2/2010	4:33:55 AM	SiCl4 post valve closed
10/2/2010	4:33:55 AM	Bypass valve closed
10/2/2010	4:33:55 AM	Main Vac valve closed
10/2/2010	4:33:55 AM	Bubbler valve closed
10/2/2010	4:33:55 AM	Helium MFC set to  0.000000
10/2/2010	4:33:55 AM	H2 MFC set to  0.000000
10/2/2010	4:33:55 AM	BCl3 MFC set to  0.000000
10/2/2010	4:33:55 AM	PHl3 MFC set to  0.000000
10/2/2010	4:33:55 AM	SiCl4 MFC set to  0.000000
10/2/2010	4:33:55 AM	Tube furnace set to 0
10/2/2010	4:33:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/2/2010	4:33:57 AM	Recipe started at 4:33 AM
10/2/2010	4:33:57 AM	H2 valve closed
10/2/2010	4:33:57 AM	BCl3 valve closed
10/2/2010	4:33:57 AM	PH3 valve closed
10/2/2010	4:33:57 AM	SiCl4 pre valve closed
10/2/2010	4:33:57 AM	SiCl4 post valve closed
10/2/2010	4:33:57 AM	Main Vac valve closed
10/2/2010	4:33:57 AM	Bypass valve closed
10/2/2010	4:33:57 AM	Bubbler valve closed
10/2/2010	4:33:57 AM	Helium valve opened
10/2/2010	4:33:57 AM	Helium MFC set to  500.000000
10/2/2010	4:33:57 AM	H2 MFC set to  0.000000
10/2/2010	4:33:57 AM	BCl3 MFC set to  0.000000
10/2/2010	4:33:57 AM	PHl3 MFC set to  0.000000
10/2/2010	4:33:57 AM	SiCl4 MFC set to  0.000000
10/2/2010	4:33:57 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:33:58 AM	Tube furnace set to 0
10/2/2010	4:33:58 AM	Helium valve closed
10/2/2010	4:33:58 AM	H2 valve closed
10/2/2010	4:33:58 AM	BCl3 valve closed
10/2/2010	4:33:58 AM	PH3 valve closed
10/2/2010	4:33:58 AM	SiCl4 pre valve closed
10/2/2010	4:33:58 AM	SiCl4 post valve closed
10/2/2010	4:33:58 AM	Main Vac valve closed
10/2/2010	4:33:58 AM	Bypass valve closed
10/2/2010	4:33:58 AM	Bubbler valve closed
10/2/2010	4:33:58 AM	Helium MFC set to  0.000000
10/2/2010	4:33:58 AM	H2 MFC set to  0.000000
10/2/2010	4:33:58 AM	BCl3 MFC set to  0.000000
10/2/2010	4:33:58 AM	PHl3 MFC set to  0.000000
10/2/2010	4:33:58 AM	SiCl4 MFC set to  0.000000
10/2/2010	4:33:58 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:33:58 AM	Tube furnace set to 0
10/2/2010	4:33:58 AM	Run finished at 4:33 AM
10/2/2010	4:33:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/2/2010	4:43:55 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	4:43:55 AM	Recipe started at 4:43 AM
10/2/2010	4:43:55 AM	Helium valve closed
10/2/2010	4:43:55 AM	H2 valve closed
10/2/2010	4:43:55 AM	BCl3 valve closed
10/2/2010	4:43:55 AM	PH3 valve closed
10/2/2010	4:43:55 AM	SiCl4 pre valve closed
10/2/2010	4:43:55 AM	SiCl4 post valve closed
10/2/2010	4:43:55 AM	Main Vac valve closed
10/2/2010	4:43:55 AM	Bubbler valve closed
10/2/2010	4:43:55 AM	Bypass valve opened
10/2/2010	4:43:55 AM	Helium MFC set to  0.000000
10/2/2010	4:43:55 AM	H2 MFC set to  0.000000
10/2/2010	4:43:55 AM	BCl3 MFC set to  0.000000
10/2/2010	4:43:55 AM	PHl3 MFC set to  0.000000
10/2/2010	4:43:55 AM	SiCl4 MFC set to  0.000000
10/2/2010	4:43:55 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:43:56 AM	Tube furnace set to 0
10/2/2010	4:44:37 AM	Helium valve closed
10/2/2010	4:44:37 AM	H2 valve closed
10/2/2010	4:44:37 AM	BCl3 valve closed
10/2/2010	4:44:37 AM	PH3 valve closed
10/2/2010	4:44:37 AM	SiCl4 pre valve closed
10/2/2010	4:44:37 AM	SiCl4 post valve closed
10/2/2010	4:44:37 AM	Bubbler valve closed
10/2/2010	4:44:37 AM	Main Vac valve opened
10/2/2010	4:44:37 AM	Bypass valve opened
10/2/2010	4:44:37 AM	Helium MFC set to  0.000000
10/2/2010	4:44:37 AM	H2 MFC set to  0.000000
10/2/2010	4:44:37 AM	BCl3 MFC set to  0.000000
10/2/2010	4:44:37 AM	PHl3 MFC set to  0.000000
10/2/2010	4:44:37 AM	SiCl4 MFC set to  0.000000
10/2/2010	4:44:37 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:44:37 AM	Tube furnace set to 0
10/2/2010	4:44:38 AM	Run finished at 4:44 AM
10/2/2010	4:44:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	4:45:12 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/2/2010	4:45:25 AM	Recipe started at 4:45 AM
10/2/2010	4:45:25 AM	Helium valve closed
10/2/2010	4:45:25 AM	H2 valve closed
10/2/2010	4:45:25 AM	BCl3 valve closed
10/2/2010	4:45:25 AM	PH3 valve closed
10/2/2010	4:45:25 AM	SiCl4 pre valve closed
10/2/2010	4:45:25 AM	SiCl4 post valve closed
10/2/2010	4:45:25 AM	Main Vac valve closed
10/2/2010	4:45:25 AM	Bubbler valve closed
10/2/2010	4:45:25 AM	Bypass valve opened
10/2/2010	4:45:25 AM	Helium MFC set to  0.000000
10/2/2010	4:45:25 AM	H2 MFC set to  0.000000
10/2/2010	4:45:25 AM	BCl3 MFC set to  0.000000
10/2/2010	4:45:25 AM	PHl3 MFC set to  0.000000
10/2/2010	4:45:25 AM	SiCl4 MFC set to  0.000000
10/2/2010	4:45:25 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:45:25 AM	Tube furnace set to 0
10/2/2010	4:45:25 AM	Helium valve closed
10/2/2010	4:45:25 AM	H2 valve closed
10/2/2010	4:45:25 AM	BCl3 valve closed
10/2/2010	4:45:25 AM	PH3 valve closed
10/2/2010	4:45:25 AM	SiCl4 pre valve closed
10/2/2010	4:45:25 AM	SiCl4 post valve closed
10/2/2010	4:45:25 AM	Bubbler valve closed
10/2/2010	4:45:25 AM	Main Vac valve opened
10/2/2010	4:45:25 AM	Bypass valve opened
10/2/2010	4:45:25 AM	Helium MFC set to  0.000000
10/2/2010	4:45:25 AM	H2 MFC set to  0.000000
10/2/2010	4:45:25 AM	BCl3 MFC set to  0.000000
10/2/2010	4:45:25 AM	PHl3 MFC set to  0.000000
10/2/2010	4:45:25 AM	SiCl4 MFC set to  0.000000
10/2/2010	4:45:25 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:45:26 AM	Tube furnace set to 0
10/2/2010	4:46:26 AM	H2 valve closed
10/2/2010	4:46:26 AM	BCl3 valve closed
10/2/2010	4:46:26 AM	PH3 valve closed
10/2/2010	4:46:26 AM	SiCl4 pre valve closed
10/2/2010	4:46:26 AM	SiCl4 post valve closed
10/2/2010	4:46:26 AM	Bubbler valve closed
10/2/2010	4:46:26 AM	Helium valve opened
10/2/2010	4:46:26 AM	Main Vac valve opened
10/2/2010	4:46:26 AM	Bypass valve opened
10/2/2010	4:46:26 AM	Helium MFC set to  100.000000
10/2/2010	4:46:26 AM	H2 MFC set to  0.000000
10/2/2010	4:46:26 AM	BCl3 MFC set to  0.000000
10/2/2010	4:46:26 AM	PHl3 MFC set to  0.000000
10/2/2010	4:46:26 AM	SiCl4 MFC set to  0.000000
10/2/2010	4:46:26 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:46:26 AM	Tube furnace set to 0
10/2/2010	4:47:26 AM	Helium valve closed
10/2/2010	4:47:26 AM	H2 valve closed
10/2/2010	4:47:26 AM	BCl3 valve closed
10/2/2010	4:47:26 AM	PH3 valve closed
10/2/2010	4:47:26 AM	SiCl4 pre valve closed
10/2/2010	4:47:26 AM	SiCl4 post valve closed
10/2/2010	4:47:26 AM	Bubbler valve closed
10/2/2010	4:47:26 AM	Main Vac valve opened
10/2/2010	4:47:26 AM	Bypass valve opened
10/2/2010	4:47:26 AM	Helium MFC set to  0.000000
10/2/2010	4:47:26 AM	H2 MFC set to  0.000000
10/2/2010	4:47:26 AM	BCl3 MFC set to  0.000000
10/2/2010	4:47:26 AM	PHl3 MFC set to  0.000000
10/2/2010	4:47:26 AM	SiCl4 MFC set to  0.000000
10/2/2010	4:47:26 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:47:26 AM	Tube furnace set to 0
10/2/2010	4:48:26 AM	H2 valve closed
10/2/2010	4:48:26 AM	BCl3 valve closed
10/2/2010	4:48:26 AM	PH3 valve closed
10/2/2010	4:48:26 AM	SiCl4 pre valve closed
10/2/2010	4:48:26 AM	SiCl4 post valve closed
10/2/2010	4:48:26 AM	Bubbler valve closed
10/2/2010	4:48:26 AM	Helium valve opened
10/2/2010	4:48:26 AM	Main Vac valve opened
10/2/2010	4:48:26 AM	Bypass valve opened
10/2/2010	4:48:26 AM	Helium MFC set to  100.000000
10/2/2010	4:48:26 AM	H2 MFC set to  0.000000
10/2/2010	4:48:26 AM	BCl3 MFC set to  0.000000
10/2/2010	4:48:26 AM	PHl3 MFC set to  0.000000
10/2/2010	4:48:26 AM	SiCl4 MFC set to  0.000000
10/2/2010	4:48:26 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:48:26 AM	Tube furnace set to 0
10/2/2010	4:49:26 AM	Helium valve closed
10/2/2010	4:49:26 AM	H2 valve closed
10/2/2010	4:49:26 AM	BCl3 valve closed
10/2/2010	4:49:26 AM	PH3 valve closed
10/2/2010	4:49:26 AM	SiCl4 pre valve closed
10/2/2010	4:49:26 AM	SiCl4 post valve closed
10/2/2010	4:49:26 AM	Bubbler valve closed
10/2/2010	4:49:26 AM	Main Vac valve opened
10/2/2010	4:49:26 AM	Bypass valve opened
10/2/2010	4:49:26 AM	Helium MFC set to  0.000000
10/2/2010	4:49:26 AM	H2 MFC set to  0.000000
10/2/2010	4:49:26 AM	BCl3 MFC set to  0.000000
10/2/2010	4:49:26 AM	PHl3 MFC set to  0.000000
10/2/2010	4:49:26 AM	SiCl4 MFC set to  0.000000
10/2/2010	4:49:26 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:49:26 AM	Tube furnace set to 0
10/2/2010	4:50:26 AM	H2 valve closed
10/2/2010	4:50:26 AM	BCl3 valve closed
10/2/2010	4:50:26 AM	PH3 valve closed
10/2/2010	4:50:26 AM	SiCl4 pre valve closed
10/2/2010	4:50:26 AM	SiCl4 post valve closed
10/2/2010	4:50:26 AM	Bubbler valve closed
10/2/2010	4:50:26 AM	Helium valve opened
10/2/2010	4:50:26 AM	Main Vac valve opened
10/2/2010	4:50:26 AM	Bypass valve opened
10/2/2010	4:50:26 AM	Helium MFC set to  100.000000
10/2/2010	4:50:26 AM	H2 MFC set to  0.000000
10/2/2010	4:50:26 AM	BCl3 MFC set to  0.000000
10/2/2010	4:50:26 AM	PHl3 MFC set to  0.000000
10/2/2010	4:50:26 AM	SiCl4 MFC set to  0.000000
10/2/2010	4:50:26 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:50:27 AM	Tube furnace set to 0
10/2/2010	4:51:27 AM	Helium valve closed
10/2/2010	4:51:27 AM	H2 valve closed
10/2/2010	4:51:27 AM	BCl3 valve closed
10/2/2010	4:51:27 AM	PH3 valve closed
10/2/2010	4:51:27 AM	SiCl4 pre valve closed
10/2/2010	4:51:27 AM	SiCl4 post valve closed
10/2/2010	4:51:27 AM	Bubbler valve closed
10/2/2010	4:51:27 AM	Main Vac valve opened
10/2/2010	4:51:27 AM	Bypass valve opened
10/2/2010	4:51:27 AM	Helium MFC set to  0.000000
10/2/2010	4:51:27 AM	H2 MFC set to  0.000000
10/2/2010	4:51:27 AM	BCl3 MFC set to  0.000000
10/2/2010	4:51:27 AM	PHl3 MFC set to  0.000000
10/2/2010	4:51:27 AM	SiCl4 MFC set to  0.000000
10/2/2010	4:51:27 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:51:27 AM	Tube furnace set to 0
10/2/2010	4:52:27 AM	H2 valve closed
10/2/2010	4:52:27 AM	BCl3 valve closed
10/2/2010	4:52:27 AM	PH3 valve closed
10/2/2010	4:52:27 AM	SiCl4 pre valve closed
10/2/2010	4:52:27 AM	SiCl4 post valve closed
10/2/2010	4:52:27 AM	Bubbler valve closed
10/2/2010	4:52:27 AM	Helium valve opened
10/2/2010	4:52:27 AM	Main Vac valve opened
10/2/2010	4:52:27 AM	Bypass valve opened
10/2/2010	4:52:27 AM	Helium MFC set to  100.000000
10/2/2010	4:52:27 AM	H2 MFC set to  0.000000
10/2/2010	4:52:27 AM	BCl3 MFC set to  0.000000
10/2/2010	4:52:27 AM	PHl3 MFC set to  0.000000
10/2/2010	4:52:27 AM	SiCl4 MFC set to  0.000000
10/2/2010	4:52:27 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:52:27 AM	Tube furnace set to 0
10/2/2010	4:53:27 AM	Helium valve closed
10/2/2010	4:53:27 AM	H2 valve closed
10/2/2010	4:53:27 AM	BCl3 valve closed
10/2/2010	4:53:27 AM	PH3 valve closed
10/2/2010	4:53:27 AM	SiCl4 pre valve closed
10/2/2010	4:53:27 AM	SiCl4 post valve closed
10/2/2010	4:53:27 AM	Bubbler valve closed
10/2/2010	4:53:27 AM	Main Vac valve opened
10/2/2010	4:53:27 AM	Bypass valve opened
10/2/2010	4:53:27 AM	Helium MFC set to  0.000000
10/2/2010	4:53:27 AM	H2 MFC set to  0.000000
10/2/2010	4:53:27 AM	BCl3 MFC set to  0.000000
10/2/2010	4:53:27 AM	PHl3 MFC set to  0.000000
10/2/2010	4:53:27 AM	SiCl4 MFC set to  0.000000
10/2/2010	4:53:27 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:53:27 AM	Tube furnace set to 0
10/2/2010	4:54:27 AM	H2 valve closed
10/2/2010	4:54:27 AM	BCl3 valve closed
10/2/2010	4:54:27 AM	PH3 valve closed
10/2/2010	4:54:27 AM	SiCl4 pre valve closed
10/2/2010	4:54:27 AM	SiCl4 post valve closed
10/2/2010	4:54:27 AM	Bubbler valve closed
10/2/2010	4:54:27 AM	Helium valve opened
10/2/2010	4:54:27 AM	Main Vac valve opened
10/2/2010	4:54:27 AM	Bypass valve opened
10/2/2010	4:54:27 AM	Helium MFC set to  100.000000
10/2/2010	4:54:27 AM	H2 MFC set to  0.000000
10/2/2010	4:54:27 AM	BCl3 MFC set to  0.000000
10/2/2010	4:54:27 AM	PHl3 MFC set to  0.000000
10/2/2010	4:54:27 AM	SiCl4 MFC set to  0.000000
10/2/2010	4:54:27 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:54:27 AM	Tube furnace set to 0
10/2/2010	4:55:27 AM	Helium valve closed
10/2/2010	4:55:27 AM	H2 valve closed
10/2/2010	4:55:27 AM	BCl3 valve closed
10/2/2010	4:55:27 AM	PH3 valve closed
10/2/2010	4:55:27 AM	SiCl4 pre valve closed
10/2/2010	4:55:27 AM	SiCl4 post valve closed
10/2/2010	4:55:27 AM	Bubbler valve closed
10/2/2010	4:55:27 AM	Main Vac valve opened
10/2/2010	4:55:27 AM	Bypass valve opened
10/2/2010	4:55:27 AM	Helium MFC set to  0.000000
10/2/2010	4:55:27 AM	H2 MFC set to  0.000000
10/2/2010	4:55:27 AM	BCl3 MFC set to  0.000000
10/2/2010	4:55:27 AM	PHl3 MFC set to  0.000000
10/2/2010	4:55:27 AM	SiCl4 MFC set to  0.000000
10/2/2010	4:55:27 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:55:28 AM	Tube furnace set to 0
10/2/2010	4:56:28 AM	H2 valve closed
10/2/2010	4:56:28 AM	BCl3 valve closed
10/2/2010	4:56:28 AM	PH3 valve closed
10/2/2010	4:56:28 AM	SiCl4 pre valve closed
10/2/2010	4:56:28 AM	SiCl4 post valve closed
10/2/2010	4:56:28 AM	Bubbler valve closed
10/2/2010	4:56:28 AM	Helium valve opened
10/2/2010	4:56:28 AM	Main Vac valve opened
10/2/2010	4:56:28 AM	Bypass valve opened
10/2/2010	4:56:28 AM	Helium MFC set to  100.000000
10/2/2010	4:56:28 AM	H2 MFC set to  0.000000
10/2/2010	4:56:28 AM	BCl3 MFC set to  0.000000
10/2/2010	4:56:28 AM	PHl3 MFC set to  0.000000
10/2/2010	4:56:28 AM	SiCl4 MFC set to  0.000000
10/2/2010	4:56:28 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:56:28 AM	Tube furnace set to 0
10/2/2010	4:57:28 AM	Helium valve closed
10/2/2010	4:57:28 AM	H2 valve closed
10/2/2010	4:57:28 AM	BCl3 valve closed
10/2/2010	4:57:28 AM	PH3 valve closed
10/2/2010	4:57:28 AM	SiCl4 pre valve closed
10/2/2010	4:57:28 AM	SiCl4 post valve closed
10/2/2010	4:57:28 AM	Bubbler valve closed
10/2/2010	4:57:28 AM	Main Vac valve opened
10/2/2010	4:57:28 AM	Bypass valve opened
10/2/2010	4:57:28 AM	Helium MFC set to  0.000000
10/2/2010	4:57:28 AM	H2 MFC set to  0.000000
10/2/2010	4:57:28 AM	BCl3 MFC set to  0.000000
10/2/2010	4:57:28 AM	PHl3 MFC set to  0.000000
10/2/2010	4:57:28 AM	SiCl4 MFC set to  0.000000
10/2/2010	4:57:28 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:57:28 AM	Tube furnace set to 0
10/2/2010	4:58:28 AM	H2 valve closed
10/2/2010	4:58:28 AM	BCl3 valve closed
10/2/2010	4:58:28 AM	PH3 valve closed
10/2/2010	4:58:28 AM	SiCl4 pre valve closed
10/2/2010	4:58:28 AM	SiCl4 post valve closed
10/2/2010	4:58:28 AM	Bubbler valve closed
10/2/2010	4:58:28 AM	Helium valve opened
10/2/2010	4:58:28 AM	Main Vac valve opened
10/2/2010	4:58:28 AM	Bypass valve opened
10/2/2010	4:58:28 AM	Helium MFC set to  100.000000
10/2/2010	4:58:28 AM	H2 MFC set to  0.000000
10/2/2010	4:58:28 AM	BCl3 MFC set to  0.000000
10/2/2010	4:58:28 AM	PHl3 MFC set to  0.000000
10/2/2010	4:58:28 AM	SiCl4 MFC set to  0.000000
10/2/2010	4:58:28 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:58:28 AM	Tube furnace set to 0
10/2/2010	4:59:28 AM	Helium valve closed
10/2/2010	4:59:28 AM	H2 valve closed
10/2/2010	4:59:28 AM	BCl3 valve closed
10/2/2010	4:59:28 AM	PH3 valve closed
10/2/2010	4:59:28 AM	SiCl4 pre valve closed
10/2/2010	4:59:28 AM	SiCl4 post valve closed
10/2/2010	4:59:28 AM	Bubbler valve closed
10/2/2010	4:59:28 AM	Main Vac valve opened
10/2/2010	4:59:28 AM	Bypass valve opened
10/2/2010	4:59:28 AM	Helium MFC set to  0.000000
10/2/2010	4:59:28 AM	H2 MFC set to  0.000000
10/2/2010	4:59:28 AM	BCl3 MFC set to  0.000000
10/2/2010	4:59:28 AM	PHl3 MFC set to  0.000000
10/2/2010	4:59:28 AM	SiCl4 MFC set to  0.000000
10/2/2010	4:59:28 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:59:28 AM	Tube furnace set to 0
10/2/2010	5:00:28 AM	H2 valve closed
10/2/2010	5:00:28 AM	BCl3 valve closed
10/2/2010	5:00:28 AM	PH3 valve closed
10/2/2010	5:00:28 AM	SiCl4 pre valve closed
10/2/2010	5:00:28 AM	SiCl4 post valve closed
10/2/2010	5:00:28 AM	Bubbler valve closed
10/2/2010	5:00:28 AM	Helium valve opened
10/2/2010	5:00:28 AM	Main Vac valve opened
10/2/2010	5:00:28 AM	Bypass valve opened
10/2/2010	5:00:28 AM	Helium MFC set to  100.000000
10/2/2010	5:00:28 AM	H2 MFC set to  0.000000
10/2/2010	5:00:28 AM	BCl3 MFC set to  0.000000
10/2/2010	5:00:28 AM	PHl3 MFC set to  0.000000
10/2/2010	5:00:28 AM	SiCl4 MFC set to  0.000000
10/2/2010	5:00:28 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	5:00:29 AM	Tube furnace set to 0
10/2/2010	5:01:29 AM	Helium valve closed
10/2/2010	5:01:29 AM	H2 valve closed
10/2/2010	5:01:29 AM	BCl3 valve closed
10/2/2010	5:01:29 AM	PH3 valve closed
10/2/2010	5:01:29 AM	SiCl4 pre valve closed
10/2/2010	5:01:29 AM	SiCl4 post valve closed
10/2/2010	5:01:29 AM	Bubbler valve closed
10/2/2010	5:01:29 AM	Main Vac valve opened
10/2/2010	5:01:29 AM	Bypass valve opened
10/2/2010	5:01:29 AM	Helium MFC set to  0.000000
10/2/2010	5:01:29 AM	H2 MFC set to  0.000000
10/2/2010	5:01:29 AM	BCl3 MFC set to  0.000000
10/2/2010	5:01:29 AM	PHl3 MFC set to  0.000000
10/2/2010	5:01:29 AM	SiCl4 MFC set to  0.000000
10/2/2010	5:01:29 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	5:01:29 AM	Tube furnace set to 0
10/2/2010	5:02:29 AM	H2 valve closed
10/2/2010	5:02:29 AM	BCl3 valve closed
10/2/2010	5:02:29 AM	PH3 valve closed
10/2/2010	5:02:29 AM	SiCl4 pre valve closed
10/2/2010	5:02:29 AM	SiCl4 post valve closed
10/2/2010	5:02:29 AM	Bubbler valve closed
10/2/2010	5:02:29 AM	Helium valve opened
10/2/2010	5:02:29 AM	Main Vac valve opened
10/2/2010	5:02:29 AM	Bypass valve opened
10/2/2010	5:02:29 AM	Helium MFC set to  100.000000
10/2/2010	5:02:29 AM	H2 MFC set to  0.000000
10/2/2010	5:02:29 AM	BCl3 MFC set to  0.000000
10/2/2010	5:02:29 AM	PHl3 MFC set to  0.000000
10/2/2010	5:02:29 AM	SiCl4 MFC set to  0.000000
10/2/2010	5:02:29 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	5:02:29 AM	Tube furnace set to 0
10/2/2010	5:03:29 AM	Helium valve closed
10/2/2010	5:03:29 AM	H2 valve closed
10/2/2010	5:03:29 AM	BCl3 valve closed
10/2/2010	5:03:29 AM	PH3 valve closed
10/2/2010	5:03:29 AM	SiCl4 pre valve closed
10/2/2010	5:03:29 AM	SiCl4 post valve closed
10/2/2010	5:03:29 AM	Bubbler valve closed
10/2/2010	5:03:29 AM	Main Vac valve opened
10/2/2010	5:03:29 AM	Bypass valve opened
10/2/2010	5:03:29 AM	Helium MFC set to  0.000000
10/2/2010	5:03:29 AM	H2 MFC set to  0.000000
10/2/2010	5:03:29 AM	BCl3 MFC set to  0.000000
10/2/2010	5:03:29 AM	PHl3 MFC set to  0.000000
10/2/2010	5:03:29 AM	SiCl4 MFC set to  0.000000
10/2/2010	5:03:29 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	5:03:29 AM	Tube furnace set to 0
10/2/2010	5:04:29 AM	H2 valve closed
10/2/2010	5:04:29 AM	BCl3 valve closed
10/2/2010	5:04:29 AM	PH3 valve closed
10/2/2010	5:04:29 AM	SiCl4 pre valve closed
10/2/2010	5:04:29 AM	SiCl4 post valve closed
10/2/2010	5:04:29 AM	Bubbler valve closed
10/2/2010	5:04:29 AM	Helium valve opened
10/2/2010	5:04:29 AM	Main Vac valve opened
10/2/2010	5:04:29 AM	Bypass valve opened
10/2/2010	5:04:29 AM	Helium MFC set to  100.000000
10/2/2010	5:04:29 AM	H2 MFC set to  0.000000
10/2/2010	5:04:29 AM	BCl3 MFC set to  0.000000
10/2/2010	5:04:29 AM	PHl3 MFC set to  0.000000
10/2/2010	5:04:29 AM	SiCl4 MFC set to  0.000000
10/2/2010	5:04:29 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	5:04:29 AM	Tube furnace set to 0
10/2/2010	5:05:30 AM	Helium valve closed
10/2/2010	5:05:30 AM	H2 valve closed
10/2/2010	5:05:30 AM	BCl3 valve closed
10/2/2010	5:05:30 AM	PH3 valve closed
10/2/2010	5:05:30 AM	SiCl4 pre valve closed
10/2/2010	5:05:30 AM	SiCl4 post valve closed
10/2/2010	5:05:30 AM	Bubbler valve closed
10/2/2010	5:05:30 AM	Main Vac valve opened
10/2/2010	5:05:30 AM	Bypass valve opened
10/2/2010	5:05:30 AM	Helium MFC set to  0.000000
10/2/2010	5:05:30 AM	H2 MFC set to  0.000000
10/2/2010	5:05:30 AM	BCl3 MFC set to  0.000000
10/2/2010	5:05:30 AM	PHl3 MFC set to  0.000000
10/2/2010	5:05:30 AM	SiCl4 MFC set to  0.000000
10/2/2010	5:05:30 AM	Bypass solenoid MFC set to  0.000000
10/2/2010	5:05:30 AM	Tube furnace set to 0
10/2/2010	5:05:31 AM	Run finished at 5:05 AM
10/2/2010	5:05:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/2/2010	2:47:00 PM	Recipe started at 2:46 PM
10/2/2010	2:47:00 PM	Helium valve closed
10/2/2010	2:47:00 PM	BCl3 valve closed
10/2/2010	2:47:00 PM	PH3 valve closed
10/2/2010	2:47:00 PM	SiCl4 pre valve closed
10/2/2010	2:47:00 PM	SiCl4 post valve closed
10/2/2010	2:47:00 PM	Main Vac valve closed
10/2/2010	2:47:00 PM	Bypass valve closed
10/2/2010	2:47:00 PM	Bubbler valve closed
10/2/2010	2:47:00 PM	H2 valve opened
10/2/2010	2:47:00 PM	Helium MFC set to  0.000000
10/2/2010	2:47:00 PM	H2 MFC set to  500.000000
10/2/2010	2:47:00 PM	BCl3 MFC set to  0.000000
10/2/2010	2:47:00 PM	PHl3 MFC set to  0.000000
10/2/2010	2:47:00 PM	SiCl4 MFC set to  0.000000
10/2/2010	2:47:00 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	2:47:00 PM	Tube furnace set to 1000
10/2/2010	2:48:22 PM	Helium valve closed
10/2/2010	2:48:22 PM	BCl3 valve closed
10/2/2010	2:48:22 PM	PH3 valve closed
10/2/2010	2:48:22 PM	SiCl4 pre valve closed
10/2/2010	2:48:22 PM	SiCl4 post valve closed
10/2/2010	2:48:22 PM	Main Vac valve closed
10/2/2010	2:48:22 PM	Bypass valve closed
10/2/2010	2:48:22 PM	H2 valve opened
10/2/2010	2:48:22 PM	Bubbler valve opened
10/2/2010	2:48:22 PM	Helium MFC set to  0.000000
10/2/2010	2:48:22 PM	H2 MFC set to  500.000000
10/2/2010	2:48:22 PM	BCl3 MFC set to  0.000000
10/2/2010	2:48:22 PM	PHl3 MFC set to  0.000000
10/2/2010	2:48:22 PM	SiCl4 MFC set to  0.000000
10/2/2010	2:48:22 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	2:48:22 PM	Tube furnace set to 1000
10/2/2010	3:08:22 PM	Helium valve closed
10/2/2010	3:08:22 PM	PH3 valve closed
10/2/2010	3:08:22 PM	Main Vac valve closed
10/2/2010	3:08:22 PM	Bypass valve closed
10/2/2010	3:08:22 PM	H2 valve opened
10/2/2010	3:08:22 PM	BCl3 valve opened
10/2/2010	3:08:22 PM	SiCl4 pre valve opened
10/2/2010	3:08:22 PM	SiCl4 post valve opened
10/2/2010	3:08:22 PM	Bubbler valve opened
10/2/2010	3:08:22 PM	Helium MFC set to  0.000000
10/2/2010	3:08:22 PM	H2 MFC set to  500.000000
10/2/2010	3:08:22 PM	BCl3 MFC set to  12.000000
10/2/2010	3:08:22 PM	PHl3 MFC set to  0.000000
10/2/2010	3:08:22 PM	SiCl4 MFC set to  50.000000
10/2/2010	3:08:22 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	3:08:22 PM	Tube furnace set to 1000
10/2/2010	3:21:42 PM	Helium valve closed
10/2/2010	3:21:42 PM	BCl3 valve closed
10/2/2010	3:21:42 PM	PH3 valve closed
10/2/2010	3:21:42 PM	SiCl4 pre valve closed
10/2/2010	3:21:42 PM	SiCl4 post valve closed
10/2/2010	3:21:42 PM	Main Vac valve closed
10/2/2010	3:21:42 PM	Bypass valve closed
10/2/2010	3:21:42 PM	H2 valve opened
10/2/2010	3:21:42 PM	Bubbler valve opened
10/2/2010	3:21:42 PM	Helium MFC set to  0.000000
10/2/2010	3:21:42 PM	H2 MFC set to  500.000000
10/2/2010	3:21:42 PM	BCl3 MFC set to  0.000000
10/2/2010	3:21:42 PM	PHl3 MFC set to  0.000000
10/2/2010	3:21:42 PM	SiCl4 MFC set to  0.000000
10/2/2010	3:21:42 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	3:21:42 PM	Tube furnace set to 750
10/2/2010	3:41:42 PM	H2 valve closed
10/2/2010	3:41:42 PM	BCl3 valve closed
10/2/2010	3:41:42 PM	PH3 valve closed
10/2/2010	3:41:42 PM	SiCl4 pre valve closed
10/2/2010	3:41:42 PM	SiCl4 post valve closed
10/2/2010	3:41:42 PM	Main Vac valve closed
10/2/2010	3:41:42 PM	Bypass valve closed
10/2/2010	3:41:42 PM	Helium valve opened
10/2/2010	3:41:42 PM	Bubbler valve opened
10/2/2010	3:41:42 PM	Helium MFC set to  500.000000
10/2/2010	3:41:42 PM	H2 MFC set to  0.000000
10/2/2010	3:41:42 PM	BCl3 MFC set to  0.000000
10/2/2010	3:41:42 PM	PHl3 MFC set to  0.000000
10/2/2010	3:41:42 PM	SiCl4 MFC set to  0.000000
10/2/2010	3:41:42 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	3:41:42 PM	Tube furnace set to 0
10/2/2010	3:45:33 PM	Run aborted at 3:45 PM
10/2/2010	3:45:33 PM	Helium valve closed
10/2/2010	3:45:33 PM	H2 valve closed
10/2/2010	3:45:33 PM	BCl3 valve closed
10/2/2010	3:45:33 PM	PH3 valve closed
10/2/2010	3:45:33 PM	SiCl4 pre valve closed
10/2/2010	3:45:33 PM	SiCl4 post valve closed
10/2/2010	3:45:33 PM	Bypass valve closed
10/2/2010	3:45:33 PM	Main Vac valve closed
10/2/2010	3:45:33 PM	Bubbler valve closed
10/2/2010	3:45:33 PM	Helium MFC set to  0.000000
10/2/2010	3:45:33 PM	H2 MFC set to  0.000000
10/2/2010	3:45:33 PM	BCl3 MFC set to  0.000000
10/2/2010	3:45:33 PM	PHl3 MFC set to  0.000000
10/2/2010	3:45:33 PM	SiCl4 MFC set to  0.000000
10/2/2010	3:45:33 PM	Tube furnace set to 0
10/2/2010	3:45:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/2/2010	3:45:35 PM	Recipe started at 3:45 PM
10/2/2010	3:45:35 PM	H2 valve closed
10/2/2010	3:45:35 PM	BCl3 valve closed
10/2/2010	3:45:35 PM	PH3 valve closed
10/2/2010	3:45:35 PM	SiCl4 pre valve closed
10/2/2010	3:45:35 PM	SiCl4 post valve closed
10/2/2010	3:45:35 PM	Main Vac valve closed
10/2/2010	3:45:35 PM	Bypass valve closed
10/2/2010	3:45:35 PM	Bubbler valve closed
10/2/2010	3:45:35 PM	Helium valve opened
10/2/2010	3:45:35 PM	Helium MFC set to  500.000000
10/2/2010	3:45:35 PM	H2 MFC set to  0.000000
10/2/2010	3:45:35 PM	BCl3 MFC set to  0.000000
10/2/2010	3:45:35 PM	PHl3 MFC set to  0.000000
10/2/2010	3:45:35 PM	SiCl4 MFC set to  0.000000
10/2/2010	3:45:35 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	3:45:35 PM	Tube furnace set to 0
10/2/2010	3:45:35 PM	Helium valve closed
10/2/2010	3:45:35 PM	H2 valve closed
10/2/2010	3:45:36 PM	BCl3 valve closed
10/2/2010	3:45:36 PM	PH3 valve closed
10/2/2010	3:45:36 PM	SiCl4 pre valve closed
10/2/2010	3:45:36 PM	SiCl4 post valve closed
10/2/2010	3:45:36 PM	Main Vac valve closed
10/2/2010	3:45:36 PM	Bypass valve closed
10/2/2010	3:45:36 PM	Bubbler valve closed
10/2/2010	3:45:36 PM	Helium MFC set to  0.000000
10/2/2010	3:45:36 PM	H2 MFC set to  0.000000
10/2/2010	3:45:36 PM	BCl3 MFC set to  0.000000
10/2/2010	3:45:36 PM	PHl3 MFC set to  0.000000
10/2/2010	3:45:36 PM	SiCl4 MFC set to  0.000000
10/2/2010	3:45:36 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	3:45:36 PM	Tube furnace set to 0
10/2/2010	3:45:36 PM	Run finished at 3:45 PM
10/2/2010	3:45:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/2/2010	4:02:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	4:02:09 PM	Recipe started at 4:02 PM
10/2/2010	4:02:09 PM	Helium valve closed
10/2/2010	4:02:09 PM	H2 valve closed
10/2/2010	4:02:09 PM	BCl3 valve closed
10/2/2010	4:02:09 PM	PH3 valve closed
10/2/2010	4:02:09 PM	SiCl4 pre valve closed
10/2/2010	4:02:09 PM	SiCl4 post valve closed
10/2/2010	4:02:09 PM	Main Vac valve closed
10/2/2010	4:02:09 PM	Bubbler valve closed
10/2/2010	4:02:09 PM	Bypass valve opened
10/2/2010	4:02:09 PM	Helium MFC set to  0.000000
10/2/2010	4:02:09 PM	H2 MFC set to  0.000000
10/2/2010	4:02:09 PM	BCl3 MFC set to  0.000000
10/2/2010	4:02:09 PM	PHl3 MFC set to  0.000000
10/2/2010	4:02:09 PM	SiCl4 MFC set to  0.000000
10/2/2010	4:02:09 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:02:09 PM	Tube furnace set to 0
10/2/2010	4:02:52 PM	Helium valve closed
10/2/2010	4:02:52 PM	H2 valve closed
10/2/2010	4:02:52 PM	BCl3 valve closed
10/2/2010	4:02:52 PM	PH3 valve closed
10/2/2010	4:02:52 PM	SiCl4 pre valve closed
10/2/2010	4:02:52 PM	SiCl4 post valve closed
10/2/2010	4:02:52 PM	Bubbler valve closed
10/2/2010	4:02:52 PM	Main Vac valve opened
10/2/2010	4:02:52 PM	Bypass valve opened
10/2/2010	4:02:52 PM	Helium MFC set to  0.000000
10/2/2010	4:02:52 PM	H2 MFC set to  0.000000
10/2/2010	4:02:52 PM	BCl3 MFC set to  0.000000
10/2/2010	4:02:52 PM	PHl3 MFC set to  0.000000
10/2/2010	4:02:52 PM	SiCl4 MFC set to  0.000000
10/2/2010	4:02:52 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:02:52 PM	Tube furnace set to 0
10/2/2010	4:02:52 PM	Run finished at 4:02 PM
10/2/2010	4:02:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	4:05:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/2/2010	4:06:12 PM	Recipe started at 4:06 PM
10/2/2010	4:06:12 PM	Helium valve closed
10/2/2010	4:06:12 PM	H2 valve closed
10/2/2010	4:06:12 PM	BCl3 valve closed
10/2/2010	4:06:12 PM	PH3 valve closed
10/2/2010	4:06:12 PM	SiCl4 pre valve closed
10/2/2010	4:06:12 PM	SiCl4 post valve closed
10/2/2010	4:06:12 PM	Main Vac valve closed
10/2/2010	4:06:12 PM	Bubbler valve closed
10/2/2010	4:06:12 PM	Bypass valve opened
10/2/2010	4:06:12 PM	Helium MFC set to  0.000000
10/2/2010	4:06:12 PM	H2 MFC set to  0.000000
10/2/2010	4:06:12 PM	BCl3 MFC set to  0.000000
10/2/2010	4:06:12 PM	PHl3 MFC set to  0.000000
10/2/2010	4:06:12 PM	SiCl4 MFC set to  0.000000
10/2/2010	4:06:12 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:06:12 PM	Tube furnace set to 0
10/2/2010	4:06:12 PM	Helium valve closed
10/2/2010	4:06:12 PM	H2 valve closed
10/2/2010	4:06:12 PM	BCl3 valve closed
10/2/2010	4:06:12 PM	PH3 valve closed
10/2/2010	4:06:12 PM	SiCl4 pre valve closed
10/2/2010	4:06:12 PM	SiCl4 post valve closed
10/2/2010	4:06:12 PM	Bubbler valve closed
10/2/2010	4:06:12 PM	Main Vac valve opened
10/2/2010	4:06:12 PM	Bypass valve opened
10/2/2010	4:06:12 PM	Helium MFC set to  0.000000
10/2/2010	4:06:12 PM	H2 MFC set to  0.000000
10/2/2010	4:06:12 PM	BCl3 MFC set to  0.000000
10/2/2010	4:06:12 PM	PHl3 MFC set to  0.000000
10/2/2010	4:06:12 PM	SiCl4 MFC set to  0.000000
10/2/2010	4:06:12 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:06:12 PM	Tube furnace set to 0
10/2/2010	4:07:12 PM	H2 valve closed
10/2/2010	4:07:12 PM	BCl3 valve closed
10/2/2010	4:07:12 PM	PH3 valve closed
10/2/2010	4:07:12 PM	SiCl4 pre valve closed
10/2/2010	4:07:12 PM	SiCl4 post valve closed
10/2/2010	4:07:12 PM	Bubbler valve closed
10/2/2010	4:07:12 PM	Helium valve opened
10/2/2010	4:07:12 PM	Main Vac valve opened
10/2/2010	4:07:12 PM	Bypass valve opened
10/2/2010	4:07:12 PM	Helium MFC set to  100.000000
10/2/2010	4:07:12 PM	H2 MFC set to  0.000000
10/2/2010	4:07:12 PM	BCl3 MFC set to  0.000000
10/2/2010	4:07:12 PM	PHl3 MFC set to  0.000000
10/2/2010	4:07:12 PM	SiCl4 MFC set to  0.000000
10/2/2010	4:07:12 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:07:13 PM	Tube furnace set to 0
10/2/2010	4:08:13 PM	Helium valve closed
10/2/2010	4:08:13 PM	H2 valve closed
10/2/2010	4:08:13 PM	BCl3 valve closed
10/2/2010	4:08:13 PM	PH3 valve closed
10/2/2010	4:08:13 PM	SiCl4 pre valve closed
10/2/2010	4:08:13 PM	SiCl4 post valve closed
10/2/2010	4:08:13 PM	Bubbler valve closed
10/2/2010	4:08:13 PM	Main Vac valve opened
10/2/2010	4:08:13 PM	Bypass valve opened
10/2/2010	4:08:13 PM	Helium MFC set to  0.000000
10/2/2010	4:08:13 PM	H2 MFC set to  0.000000
10/2/2010	4:08:13 PM	BCl3 MFC set to  0.000000
10/2/2010	4:08:13 PM	PHl3 MFC set to  0.000000
10/2/2010	4:08:13 PM	SiCl4 MFC set to  0.000000
10/2/2010	4:08:13 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:08:13 PM	Tube furnace set to 0
10/2/2010	4:09:13 PM	H2 valve closed
10/2/2010	4:09:13 PM	BCl3 valve closed
10/2/2010	4:09:13 PM	PH3 valve closed
10/2/2010	4:09:13 PM	SiCl4 pre valve closed
10/2/2010	4:09:13 PM	SiCl4 post valve closed
10/2/2010	4:09:13 PM	Bubbler valve closed
10/2/2010	4:09:13 PM	Helium valve opened
10/2/2010	4:09:13 PM	Main Vac valve opened
10/2/2010	4:09:13 PM	Bypass valve opened
10/2/2010	4:09:13 PM	Helium MFC set to  100.000000
10/2/2010	4:09:13 PM	H2 MFC set to  0.000000
10/2/2010	4:09:13 PM	BCl3 MFC set to  0.000000
10/2/2010	4:09:13 PM	PHl3 MFC set to  0.000000
10/2/2010	4:09:13 PM	SiCl4 MFC set to  0.000000
10/2/2010	4:09:13 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:09:13 PM	Tube furnace set to 0
10/2/2010	4:10:13 PM	Helium valve closed
10/2/2010	4:10:13 PM	H2 valve closed
10/2/2010	4:10:13 PM	BCl3 valve closed
10/2/2010	4:10:13 PM	PH3 valve closed
10/2/2010	4:10:13 PM	SiCl4 pre valve closed
10/2/2010	4:10:13 PM	SiCl4 post valve closed
10/2/2010	4:10:13 PM	Bubbler valve closed
10/2/2010	4:10:13 PM	Main Vac valve opened
10/2/2010	4:10:13 PM	Bypass valve opened
10/2/2010	4:10:13 PM	Helium MFC set to  0.000000
10/2/2010	4:10:13 PM	H2 MFC set to  0.000000
10/2/2010	4:10:13 PM	BCl3 MFC set to  0.000000
10/2/2010	4:10:13 PM	PHl3 MFC set to  0.000000
10/2/2010	4:10:13 PM	SiCl4 MFC set to  0.000000
10/2/2010	4:10:13 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:10:13 PM	Tube furnace set to 0
10/2/2010	4:11:13 PM	H2 valve closed
10/2/2010	4:11:13 PM	BCl3 valve closed
10/2/2010	4:11:13 PM	PH3 valve closed
10/2/2010	4:11:13 PM	SiCl4 pre valve closed
10/2/2010	4:11:13 PM	SiCl4 post valve closed
10/2/2010	4:11:13 PM	Bubbler valve closed
10/2/2010	4:11:13 PM	Helium valve opened
10/2/2010	4:11:13 PM	Main Vac valve opened
10/2/2010	4:11:13 PM	Bypass valve opened
10/2/2010	4:11:13 PM	Helium MFC set to  100.000000
10/2/2010	4:11:13 PM	H2 MFC set to  0.000000
10/2/2010	4:11:13 PM	BCl3 MFC set to  0.000000
10/2/2010	4:11:13 PM	PHl3 MFC set to  0.000000
10/2/2010	4:11:13 PM	SiCl4 MFC set to  0.000000
10/2/2010	4:11:13 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:11:13 PM	Tube furnace set to 0
10/2/2010	4:12:13 PM	Helium valve closed
10/2/2010	4:12:13 PM	H2 valve closed
10/2/2010	4:12:13 PM	BCl3 valve closed
10/2/2010	4:12:13 PM	PH3 valve closed
10/2/2010	4:12:13 PM	SiCl4 pre valve closed
10/2/2010	4:12:13 PM	SiCl4 post valve closed
10/2/2010	4:12:13 PM	Bubbler valve closed
10/2/2010	4:12:13 PM	Main Vac valve opened
10/2/2010	4:12:13 PM	Bypass valve opened
10/2/2010	4:12:13 PM	Helium MFC set to  0.000000
10/2/2010	4:12:13 PM	H2 MFC set to  0.000000
10/2/2010	4:12:13 PM	BCl3 MFC set to  0.000000
10/2/2010	4:12:13 PM	PHl3 MFC set to  0.000000
10/2/2010	4:12:13 PM	SiCl4 MFC set to  0.000000
10/2/2010	4:12:13 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:12:14 PM	Tube furnace set to 0
10/2/2010	4:13:14 PM	H2 valve closed
10/2/2010	4:13:14 PM	BCl3 valve closed
10/2/2010	4:13:14 PM	PH3 valve closed
10/2/2010	4:13:14 PM	SiCl4 pre valve closed
10/2/2010	4:13:14 PM	SiCl4 post valve closed
10/2/2010	4:13:14 PM	Bubbler valve closed
10/2/2010	4:13:14 PM	Helium valve opened
10/2/2010	4:13:14 PM	Main Vac valve opened
10/2/2010	4:13:14 PM	Bypass valve opened
10/2/2010	4:13:14 PM	Helium MFC set to  100.000000
10/2/2010	4:13:14 PM	H2 MFC set to  0.000000
10/2/2010	4:13:14 PM	BCl3 MFC set to  0.000000
10/2/2010	4:13:14 PM	PHl3 MFC set to  0.000000
10/2/2010	4:13:14 PM	SiCl4 MFC set to  0.000000
10/2/2010	4:13:14 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:13:14 PM	Tube furnace set to 0
10/2/2010	4:14:14 PM	Helium valve closed
10/2/2010	4:14:14 PM	H2 valve closed
10/2/2010	4:14:14 PM	BCl3 valve closed
10/2/2010	4:14:14 PM	PH3 valve closed
10/2/2010	4:14:14 PM	SiCl4 pre valve closed
10/2/2010	4:14:14 PM	SiCl4 post valve closed
10/2/2010	4:14:14 PM	Bubbler valve closed
10/2/2010	4:14:14 PM	Main Vac valve opened
10/2/2010	4:14:14 PM	Bypass valve opened
10/2/2010	4:14:14 PM	Helium MFC set to  0.000000
10/2/2010	4:14:14 PM	H2 MFC set to  0.000000
10/2/2010	4:14:14 PM	BCl3 MFC set to  0.000000
10/2/2010	4:14:14 PM	PHl3 MFC set to  0.000000
10/2/2010	4:14:14 PM	SiCl4 MFC set to  0.000000
10/2/2010	4:14:14 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:14:14 PM	Tube furnace set to 0
10/2/2010	4:15:14 PM	H2 valve closed
10/2/2010	4:15:14 PM	BCl3 valve closed
10/2/2010	4:15:14 PM	PH3 valve closed
10/2/2010	4:15:14 PM	SiCl4 pre valve closed
10/2/2010	4:15:14 PM	SiCl4 post valve closed
10/2/2010	4:15:14 PM	Bubbler valve closed
10/2/2010	4:15:14 PM	Helium valve opened
10/2/2010	4:15:14 PM	Main Vac valve opened
10/2/2010	4:15:14 PM	Bypass valve opened
10/2/2010	4:15:14 PM	Helium MFC set to  100.000000
10/2/2010	4:15:14 PM	H2 MFC set to  0.000000
10/2/2010	4:15:14 PM	BCl3 MFC set to  0.000000
10/2/2010	4:15:14 PM	PHl3 MFC set to  0.000000
10/2/2010	4:15:14 PM	SiCl4 MFC set to  0.000000
10/2/2010	4:15:14 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:15:14 PM	Tube furnace set to 0
10/2/2010	4:16:14 PM	Helium valve closed
10/2/2010	4:16:14 PM	H2 valve closed
10/2/2010	4:16:14 PM	BCl3 valve closed
10/2/2010	4:16:14 PM	PH3 valve closed
10/2/2010	4:16:14 PM	SiCl4 pre valve closed
10/2/2010	4:16:14 PM	SiCl4 post valve closed
10/2/2010	4:16:14 PM	Bubbler valve closed
10/2/2010	4:16:14 PM	Main Vac valve opened
10/2/2010	4:16:14 PM	Bypass valve opened
10/2/2010	4:16:14 PM	Helium MFC set to  0.000000
10/2/2010	4:16:14 PM	H2 MFC set to  0.000000
10/2/2010	4:16:14 PM	BCl3 MFC set to  0.000000
10/2/2010	4:16:14 PM	PHl3 MFC set to  0.000000
10/2/2010	4:16:14 PM	SiCl4 MFC set to  0.000000
10/2/2010	4:16:14 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:16:14 PM	Tube furnace set to 0
10/2/2010	4:17:14 PM	H2 valve closed
10/2/2010	4:17:14 PM	BCl3 valve closed
10/2/2010	4:17:14 PM	PH3 valve closed
10/2/2010	4:17:14 PM	SiCl4 pre valve closed
10/2/2010	4:17:14 PM	SiCl4 post valve closed
10/2/2010	4:17:14 PM	Bubbler valve closed
10/2/2010	4:17:14 PM	Helium valve opened
10/2/2010	4:17:14 PM	Main Vac valve opened
10/2/2010	4:17:14 PM	Bypass valve opened
10/2/2010	4:17:14 PM	Helium MFC set to  100.000000
10/2/2010	4:17:14 PM	H2 MFC set to  0.000000
10/2/2010	4:17:14 PM	BCl3 MFC set to  0.000000
10/2/2010	4:17:14 PM	PHl3 MFC set to  0.000000
10/2/2010	4:17:14 PM	SiCl4 MFC set to  0.000000
10/2/2010	4:17:14 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:17:15 PM	Tube furnace set to 0
10/2/2010	4:18:15 PM	Helium valve closed
10/2/2010	4:18:15 PM	H2 valve closed
10/2/2010	4:18:15 PM	BCl3 valve closed
10/2/2010	4:18:15 PM	PH3 valve closed
10/2/2010	4:18:15 PM	SiCl4 pre valve closed
10/2/2010	4:18:15 PM	SiCl4 post valve closed
10/2/2010	4:18:15 PM	Bubbler valve closed
10/2/2010	4:18:15 PM	Main Vac valve opened
10/2/2010	4:18:15 PM	Bypass valve opened
10/2/2010	4:18:15 PM	Helium MFC set to  0.000000
10/2/2010	4:18:15 PM	H2 MFC set to  0.000000
10/2/2010	4:18:15 PM	BCl3 MFC set to  0.000000
10/2/2010	4:18:15 PM	PHl3 MFC set to  0.000000
10/2/2010	4:18:15 PM	SiCl4 MFC set to  0.000000
10/2/2010	4:18:15 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:18:15 PM	Tube furnace set to 0
10/2/2010	4:19:15 PM	H2 valve closed
10/2/2010	4:19:15 PM	BCl3 valve closed
10/2/2010	4:19:15 PM	PH3 valve closed
10/2/2010	4:19:15 PM	SiCl4 pre valve closed
10/2/2010	4:19:15 PM	SiCl4 post valve closed
10/2/2010	4:19:15 PM	Bubbler valve closed
10/2/2010	4:19:15 PM	Helium valve opened
10/2/2010	4:19:15 PM	Main Vac valve opened
10/2/2010	4:19:15 PM	Bypass valve opened
10/2/2010	4:19:15 PM	Helium MFC set to  100.000000
10/2/2010	4:19:15 PM	H2 MFC set to  0.000000
10/2/2010	4:19:15 PM	BCl3 MFC set to  0.000000
10/2/2010	4:19:15 PM	PHl3 MFC set to  0.000000
10/2/2010	4:19:15 PM	SiCl4 MFC set to  0.000000
10/2/2010	4:19:15 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:19:15 PM	Tube furnace set to 0
10/2/2010	4:20:15 PM	Helium valve closed
10/2/2010	4:20:15 PM	H2 valve closed
10/2/2010	4:20:15 PM	BCl3 valve closed
10/2/2010	4:20:15 PM	PH3 valve closed
10/2/2010	4:20:15 PM	SiCl4 pre valve closed
10/2/2010	4:20:15 PM	SiCl4 post valve closed
10/2/2010	4:20:15 PM	Bubbler valve closed
10/2/2010	4:20:15 PM	Main Vac valve opened
10/2/2010	4:20:15 PM	Bypass valve opened
10/2/2010	4:20:15 PM	Helium MFC set to  0.000000
10/2/2010	4:20:15 PM	H2 MFC set to  0.000000
10/2/2010	4:20:15 PM	BCl3 MFC set to  0.000000
10/2/2010	4:20:15 PM	PHl3 MFC set to  0.000000
10/2/2010	4:20:15 PM	SiCl4 MFC set to  0.000000
10/2/2010	4:20:15 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:20:15 PM	Tube furnace set to 0
10/2/2010	4:21:15 PM	H2 valve closed
10/2/2010	4:21:15 PM	BCl3 valve closed
10/2/2010	4:21:15 PM	PH3 valve closed
10/2/2010	4:21:15 PM	SiCl4 pre valve closed
10/2/2010	4:21:15 PM	SiCl4 post valve closed
10/2/2010	4:21:15 PM	Bubbler valve closed
10/2/2010	4:21:15 PM	Helium valve opened
10/2/2010	4:21:15 PM	Main Vac valve opened
10/2/2010	4:21:15 PM	Bypass valve opened
10/2/2010	4:21:15 PM	Helium MFC set to  100.000000
10/2/2010	4:21:15 PM	H2 MFC set to  0.000000
10/2/2010	4:21:15 PM	BCl3 MFC set to  0.000000
10/2/2010	4:21:15 PM	PHl3 MFC set to  0.000000
10/2/2010	4:21:15 PM	SiCl4 MFC set to  0.000000
10/2/2010	4:21:15 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:21:15 PM	Tube furnace set to 0
10/2/2010	4:22:15 PM	Helium valve closed
10/2/2010	4:22:15 PM	H2 valve closed
10/2/2010	4:22:15 PM	BCl3 valve closed
10/2/2010	4:22:15 PM	PH3 valve closed
10/2/2010	4:22:15 PM	SiCl4 pre valve closed
10/2/2010	4:22:15 PM	SiCl4 post valve closed
10/2/2010	4:22:15 PM	Bubbler valve closed
10/2/2010	4:22:15 PM	Main Vac valve opened
10/2/2010	4:22:15 PM	Bypass valve opened
10/2/2010	4:22:15 PM	Helium MFC set to  0.000000
10/2/2010	4:22:15 PM	H2 MFC set to  0.000000
10/2/2010	4:22:15 PM	BCl3 MFC set to  0.000000
10/2/2010	4:22:15 PM	PHl3 MFC set to  0.000000
10/2/2010	4:22:15 PM	SiCl4 MFC set to  0.000000
10/2/2010	4:22:15 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:22:16 PM	Tube furnace set to 0
10/2/2010	4:23:16 PM	H2 valve closed
10/2/2010	4:23:16 PM	BCl3 valve closed
10/2/2010	4:23:16 PM	PH3 valve closed
10/2/2010	4:23:16 PM	SiCl4 pre valve closed
10/2/2010	4:23:16 PM	SiCl4 post valve closed
10/2/2010	4:23:16 PM	Bubbler valve closed
10/2/2010	4:23:16 PM	Helium valve opened
10/2/2010	4:23:16 PM	Main Vac valve opened
10/2/2010	4:23:16 PM	Bypass valve opened
10/2/2010	4:23:16 PM	Helium MFC set to  100.000000
10/2/2010	4:23:16 PM	H2 MFC set to  0.000000
10/2/2010	4:23:16 PM	BCl3 MFC set to  0.000000
10/2/2010	4:23:16 PM	PHl3 MFC set to  0.000000
10/2/2010	4:23:16 PM	SiCl4 MFC set to  0.000000
10/2/2010	4:23:16 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:23:16 PM	Tube furnace set to 0
10/2/2010	4:24:16 PM	Helium valve closed
10/2/2010	4:24:16 PM	H2 valve closed
10/2/2010	4:24:16 PM	BCl3 valve closed
10/2/2010	4:24:16 PM	PH3 valve closed
10/2/2010	4:24:16 PM	SiCl4 pre valve closed
10/2/2010	4:24:16 PM	SiCl4 post valve closed
10/2/2010	4:24:16 PM	Bubbler valve closed
10/2/2010	4:24:16 PM	Main Vac valve opened
10/2/2010	4:24:16 PM	Bypass valve opened
10/2/2010	4:24:16 PM	Helium MFC set to  0.000000
10/2/2010	4:24:16 PM	H2 MFC set to  0.000000
10/2/2010	4:24:16 PM	BCl3 MFC set to  0.000000
10/2/2010	4:24:16 PM	PHl3 MFC set to  0.000000
10/2/2010	4:24:16 PM	SiCl4 MFC set to  0.000000
10/2/2010	4:24:16 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:24:16 PM	Tube furnace set to 0
10/2/2010	4:25:16 PM	H2 valve closed
10/2/2010	4:25:16 PM	BCl3 valve closed
10/2/2010	4:25:16 PM	PH3 valve closed
10/2/2010	4:25:16 PM	SiCl4 pre valve closed
10/2/2010	4:25:16 PM	SiCl4 post valve closed
10/2/2010	4:25:16 PM	Bubbler valve closed
10/2/2010	4:25:16 PM	Helium valve opened
10/2/2010	4:25:16 PM	Main Vac valve opened
10/2/2010	4:25:16 PM	Bypass valve opened
10/2/2010	4:25:16 PM	Helium MFC set to  100.000000
10/2/2010	4:25:16 PM	H2 MFC set to  0.000000
10/2/2010	4:25:16 PM	BCl3 MFC set to  0.000000
10/2/2010	4:25:16 PM	PHl3 MFC set to  0.000000
10/2/2010	4:25:16 PM	SiCl4 MFC set to  0.000000
10/2/2010	4:25:16 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:25:16 PM	Tube furnace set to 0
10/2/2010	4:26:16 PM	Helium valve closed
10/2/2010	4:26:16 PM	H2 valve closed
10/2/2010	4:26:16 PM	BCl3 valve closed
10/2/2010	4:26:16 PM	PH3 valve closed
10/2/2010	4:26:16 PM	SiCl4 pre valve closed
10/2/2010	4:26:16 PM	SiCl4 post valve closed
10/2/2010	4:26:16 PM	Bubbler valve closed
10/2/2010	4:26:16 PM	Main Vac valve opened
10/2/2010	4:26:16 PM	Bypass valve opened
10/2/2010	4:26:16 PM	Helium MFC set to  0.000000
10/2/2010	4:26:16 PM	H2 MFC set to  0.000000
10/2/2010	4:26:16 PM	BCl3 MFC set to  0.000000
10/2/2010	4:26:16 PM	PHl3 MFC set to  0.000000
10/2/2010	4:26:16 PM	SiCl4 MFC set to  0.000000
10/2/2010	4:26:16 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:26:16 PM	Tube furnace set to 0
10/2/2010	4:26:17 PM	Run finished at 4:26 PM
10/2/2010	4:26:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/2/2010	4:27:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	4:27:42 PM	Recipe started at 4:27 PM
10/2/2010	4:27:42 PM	Helium valve closed
10/2/2010	4:27:42 PM	H2 valve closed
10/2/2010	4:27:42 PM	BCl3 valve closed
10/2/2010	4:27:42 PM	PH3 valve closed
10/2/2010	4:27:42 PM	SiCl4 pre valve closed
10/2/2010	4:27:42 PM	SiCl4 post valve closed
10/2/2010	4:27:42 PM	Main Vac valve closed
10/2/2010	4:27:42 PM	Bubbler valve closed
10/2/2010	4:27:42 PM	Bypass valve opened
10/2/2010	4:27:42 PM	Helium MFC set to  0.000000
10/2/2010	4:27:42 PM	H2 MFC set to  0.000000
10/2/2010	4:27:42 PM	BCl3 MFC set to  0.000000
10/2/2010	4:27:42 PM	PHl3 MFC set to  0.000000
10/2/2010	4:27:42 PM	SiCl4 MFC set to  0.000000
10/2/2010	4:27:42 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:27:42 PM	Tube furnace set to 0
10/2/2010	4:27:43 PM	Helium valve closed
10/2/2010	4:27:43 PM	H2 valve closed
10/2/2010	4:27:43 PM	BCl3 valve closed
10/2/2010	4:27:43 PM	PH3 valve closed
10/2/2010	4:27:43 PM	SiCl4 pre valve closed
10/2/2010	4:27:43 PM	SiCl4 post valve closed
10/2/2010	4:27:43 PM	Bubbler valve closed
10/2/2010	4:27:43 PM	Main Vac valve opened
10/2/2010	4:27:43 PM	Bypass valve opened
10/2/2010	4:27:43 PM	Helium MFC set to  0.000000
10/2/2010	4:27:43 PM	H2 MFC set to  0.000000
10/2/2010	4:27:43 PM	BCl3 MFC set to  0.000000
10/2/2010	4:27:43 PM	PHl3 MFC set to  0.000000
10/2/2010	4:27:43 PM	SiCl4 MFC set to  0.000000
10/2/2010	4:27:43 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:27:43 PM	Tube furnace set to 0
10/2/2010	4:27:43 PM	Run finished at 4:27 PM
10/2/2010	4:27:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	4:27:54 PM	Helium MFC set to  100.000000
10/2/2010	4:27:56 PM	Helium valve opened
10/2/2010	4:32:28 PM	Helium valve closed
10/2/2010	4:32:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	4:32:30 PM	Recipe started at 4:32 PM
10/2/2010	4:32:30 PM	Helium valve closed
10/2/2010	4:32:30 PM	H2 valve closed
10/2/2010	4:32:30 PM	BCl3 valve closed
10/2/2010	4:32:30 PM	PH3 valve closed
10/2/2010	4:32:30 PM	SiCl4 pre valve closed
10/2/2010	4:32:30 PM	SiCl4 post valve closed
10/2/2010	4:32:30 PM	Main Vac valve closed
10/2/2010	4:32:30 PM	Bubbler valve closed
10/2/2010	4:32:30 PM	Bypass valve opened
10/2/2010	4:32:30 PM	Helium MFC set to  0.000000
10/2/2010	4:32:30 PM	H2 MFC set to  0.000000
10/2/2010	4:32:30 PM	BCl3 MFC set to  0.000000
10/2/2010	4:32:30 PM	PHl3 MFC set to  0.000000
10/2/2010	4:32:30 PM	SiCl4 MFC set to  0.000000
10/2/2010	4:32:30 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:32:30 PM	Tube furnace set to 0
10/2/2010	4:32:30 PM	Helium valve closed
10/2/2010	4:32:30 PM	H2 valve closed
10/2/2010	4:32:30 PM	BCl3 valve closed
10/2/2010	4:32:30 PM	PH3 valve closed
10/2/2010	4:32:30 PM	SiCl4 pre valve closed
10/2/2010	4:32:30 PM	SiCl4 post valve closed
10/2/2010	4:32:30 PM	Bubbler valve closed
10/2/2010	4:32:30 PM	Main Vac valve opened
10/2/2010	4:32:30 PM	Bypass valve opened
10/2/2010	4:32:30 PM	Helium MFC set to  0.000000
10/2/2010	4:32:30 PM	H2 MFC set to  0.000000
10/2/2010	4:32:30 PM	BCl3 MFC set to  0.000000
10/2/2010	4:32:30 PM	PHl3 MFC set to  0.000000
10/2/2010	4:32:30 PM	SiCl4 MFC set to  0.000000
10/2/2010	4:32:30 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:32:30 PM	Tube furnace set to 0
10/2/2010	4:32:31 PM	Run finished at 4:32 PM
10/2/2010	4:32:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	4:33:12 PM	Helium MFC set to  100.000000
10/2/2010	4:33:14 PM	Helium valve opened
10/2/2010	4:57:51 PM	Helium valve closed
10/2/2010	4:57:55 PM	Helium MFC set to  0.000000
10/2/2010	4:57:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	4:57:57 PM	Recipe started at 4:57 PM
10/2/2010	4:57:57 PM	Helium valve closed
10/2/2010	4:57:57 PM	H2 valve closed
10/2/2010	4:57:57 PM	BCl3 valve closed
10/2/2010	4:57:57 PM	PH3 valve closed
10/2/2010	4:57:57 PM	SiCl4 pre valve closed
10/2/2010	4:57:57 PM	SiCl4 post valve closed
10/2/2010	4:57:57 PM	Main Vac valve closed
10/2/2010	4:57:57 PM	Bubbler valve closed
10/2/2010	4:57:57 PM	Bypass valve opened
10/2/2010	4:57:57 PM	Helium MFC set to  0.000000
10/2/2010	4:57:57 PM	H2 MFC set to  0.000000
10/2/2010	4:57:57 PM	BCl3 MFC set to  0.000000
10/2/2010	4:57:57 PM	PHl3 MFC set to  0.000000
10/2/2010	4:57:57 PM	SiCl4 MFC set to  0.000000
10/2/2010	4:57:57 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:57:57 PM	Tube furnace set to 0
10/2/2010	4:57:58 PM	Helium valve closed
10/2/2010	4:57:58 PM	H2 valve closed
10/2/2010	4:57:58 PM	BCl3 valve closed
10/2/2010	4:57:58 PM	PH3 valve closed
10/2/2010	4:57:58 PM	SiCl4 pre valve closed
10/2/2010	4:57:58 PM	SiCl4 post valve closed
10/2/2010	4:57:58 PM	Bubbler valve closed
10/2/2010	4:57:58 PM	Main Vac valve opened
10/2/2010	4:57:58 PM	Bypass valve opened
10/2/2010	4:57:58 PM	Helium MFC set to  0.000000
10/2/2010	4:57:58 PM	H2 MFC set to  0.000000
10/2/2010	4:57:58 PM	BCl3 MFC set to  0.000000
10/2/2010	4:57:58 PM	PHl3 MFC set to  0.000000
10/2/2010	4:57:58 PM	SiCl4 MFC set to  0.000000
10/2/2010	4:57:58 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:57:58 PM	Tube furnace set to 0
10/2/2010	4:57:58 PM	Run finished at 4:57 PM
10/2/2010	4:57:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	4:58:41 PM	Recipe started at 4:58 PM
10/2/2010	4:58:41 PM	Helium valve closed
10/2/2010	4:58:41 PM	BCl3 valve closed
10/2/2010	4:58:41 PM	PH3 valve closed
10/2/2010	4:58:41 PM	SiCl4 pre valve closed
10/2/2010	4:58:41 PM	SiCl4 post valve closed
10/2/2010	4:58:41 PM	Main Vac valve closed
10/2/2010	4:58:41 PM	Bypass valve closed
10/2/2010	4:58:41 PM	Bubbler valve closed
10/2/2010	4:58:41 PM	H2 valve opened
10/2/2010	4:58:41 PM	Helium MFC set to  0.000000
10/2/2010	4:58:41 PM	H2 MFC set to  500.000000
10/2/2010	4:58:41 PM	BCl3 MFC set to  0.000000
10/2/2010	4:58:41 PM	PHl3 MFC set to  0.000000
10/2/2010	4:58:41 PM	SiCl4 MFC set to  0.000000
10/2/2010	4:58:41 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:58:41 PM	Tube furnace set to 1000
10/2/2010	4:59:58 PM	Helium valve closed
10/2/2010	4:59:58 PM	BCl3 valve closed
10/2/2010	4:59:58 PM	PH3 valve closed
10/2/2010	4:59:58 PM	SiCl4 pre valve closed
10/2/2010	4:59:58 PM	SiCl4 post valve closed
10/2/2010	4:59:58 PM	Main Vac valve closed
10/2/2010	4:59:58 PM	Bypass valve closed
10/2/2010	4:59:58 PM	H2 valve opened
10/2/2010	4:59:58 PM	Bubbler valve opened
10/2/2010	4:59:58 PM	Helium MFC set to  0.000000
10/2/2010	4:59:58 PM	H2 MFC set to  500.000000
10/2/2010	4:59:58 PM	BCl3 MFC set to  0.000000
10/2/2010	4:59:58 PM	PHl3 MFC set to  0.000000
10/2/2010	4:59:58 PM	SiCl4 MFC set to  0.000000
10/2/2010	4:59:58 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	4:59:59 PM	Tube furnace set to 1000
10/2/2010	5:19:59 PM	Helium valve closed
10/2/2010	5:19:59 PM	PH3 valve closed
10/2/2010	5:19:59 PM	Main Vac valve closed
10/2/2010	5:19:59 PM	Bypass valve closed
10/2/2010	5:19:59 PM	H2 valve opened
10/2/2010	5:19:59 PM	BCl3 valve opened
10/2/2010	5:19:59 PM	SiCl4 pre valve opened
10/2/2010	5:19:59 PM	SiCl4 post valve opened
10/2/2010	5:19:59 PM	Bubbler valve opened
10/2/2010	5:19:59 PM	Helium MFC set to  0.000000
10/2/2010	5:19:59 PM	H2 MFC set to  500.000000
10/2/2010	5:19:59 PM	BCl3 MFC set to  12.000000
10/2/2010	5:19:59 PM	PHl3 MFC set to  0.000000
10/2/2010	5:19:59 PM	SiCl4 MFC set to  50.000000
10/2/2010	5:19:59 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	5:19:59 PM	Tube furnace set to 1000
10/2/2010	5:33:19 PM	Helium valve closed
10/2/2010	5:33:19 PM	BCl3 valve closed
10/2/2010	5:33:19 PM	PH3 valve closed
10/2/2010	5:33:19 PM	SiCl4 pre valve closed
10/2/2010	5:33:19 PM	SiCl4 post valve closed
10/2/2010	5:33:19 PM	Main Vac valve closed
10/2/2010	5:33:19 PM	Bypass valve closed
10/2/2010	5:33:19 PM	H2 valve opened
10/2/2010	5:33:19 PM	Bubbler valve opened
10/2/2010	5:33:19 PM	Helium MFC set to  0.000000
10/2/2010	5:33:19 PM	H2 MFC set to  500.000000
10/2/2010	5:33:19 PM	BCl3 MFC set to  0.000000
10/2/2010	5:33:19 PM	PHl3 MFC set to  0.000000
10/2/2010	5:33:19 PM	SiCl4 MFC set to  0.000000
10/2/2010	5:33:19 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	5:33:19 PM	Tube furnace set to 750
10/2/2010	5:53:19 PM	H2 valve closed
10/2/2010	5:53:19 PM	BCl3 valve closed
10/2/2010	5:53:19 PM	PH3 valve closed
10/2/2010	5:53:19 PM	SiCl4 pre valve closed
10/2/2010	5:53:19 PM	SiCl4 post valve closed
10/2/2010	5:53:19 PM	Main Vac valve closed
10/2/2010	5:53:19 PM	Bypass valve closed
10/2/2010	5:53:19 PM	Helium valve opened
10/2/2010	5:53:19 PM	Bubbler valve opened
10/2/2010	5:53:19 PM	Helium MFC set to  500.000000
10/2/2010	5:53:19 PM	H2 MFC set to  0.000000
10/2/2010	5:53:19 PM	BCl3 MFC set to  0.000000
10/2/2010	5:53:19 PM	PHl3 MFC set to  0.000000
10/2/2010	5:53:19 PM	SiCl4 MFC set to  0.000000
10/2/2010	5:53:19 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	5:53:19 PM	Tube furnace set to 0
10/2/2010	6:13:19 PM	Helium valve closed
10/2/2010	6:13:19 PM	H2 valve closed
10/2/2010	6:13:19 PM	BCl3 valve closed
10/2/2010	6:13:19 PM	PH3 valve closed
10/2/2010	6:13:19 PM	SiCl4 pre valve closed
10/2/2010	6:13:19 PM	SiCl4 post valve closed
10/2/2010	6:13:19 PM	Main Vac valve closed
10/2/2010	6:13:19 PM	Bypass valve closed
10/2/2010	6:13:19 PM	Bubbler valve closed
10/2/2010	6:13:19 PM	Helium MFC set to  0.000000
10/2/2010	6:13:19 PM	H2 MFC set to  0.000000
10/2/2010	6:13:19 PM	BCl3 MFC set to  0.000000
10/2/2010	6:13:19 PM	PHl3 MFC set to  0.000000
10/2/2010	6:13:19 PM	SiCl4 MFC set to  0.000000
10/2/2010	6:13:19 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	6:13:19 PM	Tube furnace set to 0
10/2/2010	6:13:20 PM	Run finished at 6:13 PM
10/2/2010	6:14:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/2/2010	6:14:31 PM	Recipe started at 6:14 PM
10/2/2010	6:14:31 PM	H2 valve closed
10/2/2010	6:14:31 PM	BCl3 valve closed
10/2/2010	6:14:31 PM	PH3 valve closed
10/2/2010	6:14:31 PM	SiCl4 pre valve closed
10/2/2010	6:14:31 PM	SiCl4 post valve closed
10/2/2010	6:14:31 PM	Main Vac valve closed
10/2/2010	6:14:31 PM	Bypass valve closed
10/2/2010	6:14:31 PM	Bubbler valve closed
10/2/2010	6:14:31 PM	Helium valve opened
10/2/2010	6:14:31 PM	Helium MFC set to  500.000000
10/2/2010	6:14:31 PM	H2 MFC set to  0.000000
10/2/2010	6:14:31 PM	BCl3 MFC set to  0.000000
10/2/2010	6:14:31 PM	PHl3 MFC set to  0.000000
10/2/2010	6:14:31 PM	SiCl4 MFC set to  0.000000
10/2/2010	6:14:31 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	6:14:31 PM	Tube furnace set to 0
10/2/2010	6:14:32 PM	Helium valve closed
10/2/2010	6:14:32 PM	H2 valve closed
10/2/2010	6:14:32 PM	BCl3 valve closed
10/2/2010	6:14:32 PM	PH3 valve closed
10/2/2010	6:14:32 PM	SiCl4 pre valve closed
10/2/2010	6:14:32 PM	SiCl4 post valve closed
10/2/2010	6:14:32 PM	Main Vac valve closed
10/2/2010	6:14:32 PM	Bypass valve closed
10/2/2010	6:14:32 PM	Bubbler valve closed
10/2/2010	6:14:32 PM	Helium MFC set to  0.000000
10/2/2010	6:14:32 PM	H2 MFC set to  0.000000
10/2/2010	6:14:32 PM	BCl3 MFC set to  0.000000
10/2/2010	6:14:32 PM	PHl3 MFC set to  0.000000
10/2/2010	6:14:32 PM	SiCl4 MFC set to  0.000000
10/2/2010	6:14:32 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	6:14:32 PM	Tube furnace set to 0
10/2/2010	6:14:32 PM	Run finished at 6:14 PM
10/2/2010	6:14:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/2/2010	6:26:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	6:26:57 PM	Recipe started at 6:26 PM
10/2/2010	6:26:57 PM	Helium valve closed
10/2/2010	6:26:57 PM	H2 valve closed
10/2/2010	6:26:57 PM	BCl3 valve closed
10/2/2010	6:26:57 PM	PH3 valve closed
10/2/2010	6:26:57 PM	SiCl4 pre valve closed
10/2/2010	6:26:57 PM	SiCl4 post valve closed
10/2/2010	6:26:57 PM	Main Vac valve closed
10/2/2010	6:26:57 PM	Bubbler valve closed
10/2/2010	6:26:57 PM	Bypass valve opened
10/2/2010	6:26:57 PM	Helium MFC set to  0.000000
10/2/2010	6:26:57 PM	H2 MFC set to  0.000000
10/2/2010	6:26:57 PM	BCl3 MFC set to  0.000000
10/2/2010	6:26:57 PM	PHl3 MFC set to  0.000000
10/2/2010	6:26:57 PM	SiCl4 MFC set to  0.000000
10/2/2010	6:26:57 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	6:26:57 PM	Tube furnace set to 0
10/2/2010	6:27:39 PM	Helium valve closed
10/2/2010	6:27:39 PM	H2 valve closed
10/2/2010	6:27:39 PM	BCl3 valve closed
10/2/2010	6:27:39 PM	PH3 valve closed
10/2/2010	6:27:39 PM	SiCl4 pre valve closed
10/2/2010	6:27:39 PM	SiCl4 post valve closed
10/2/2010	6:27:39 PM	Bubbler valve closed
10/2/2010	6:27:39 PM	Main Vac valve opened
10/2/2010	6:27:39 PM	Bypass valve opened
10/2/2010	6:27:39 PM	Helium MFC set to  0.000000
10/2/2010	6:27:39 PM	H2 MFC set to  0.000000
10/2/2010	6:27:39 PM	BCl3 MFC set to  0.000000
10/2/2010	6:27:39 PM	PHl3 MFC set to  0.000000
10/2/2010	6:27:39 PM	SiCl4 MFC set to  0.000000
10/2/2010	6:27:39 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	6:27:39 PM	Tube furnace set to 0
10/2/2010	6:27:39 PM	Run finished at 6:27 PM
10/2/2010	6:27:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	6:29:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/2/2010	6:30:09 PM	Recipe started at 6:30 PM
10/2/2010	6:30:09 PM	Helium valve closed
10/2/2010	6:30:09 PM	H2 valve closed
10/2/2010	6:30:09 PM	BCl3 valve closed
10/2/2010	6:30:09 PM	PH3 valve closed
10/2/2010	6:30:09 PM	SiCl4 pre valve closed
10/2/2010	6:30:09 PM	SiCl4 post valve closed
10/2/2010	6:30:09 PM	Main Vac valve closed
10/2/2010	6:30:09 PM	Bubbler valve closed
10/2/2010	6:30:09 PM	Bypass valve opened
10/2/2010	6:30:09 PM	Helium MFC set to  0.000000
10/2/2010	6:30:09 PM	H2 MFC set to  0.000000
10/2/2010	6:30:09 PM	BCl3 MFC set to  0.000000
10/2/2010	6:30:09 PM	PHl3 MFC set to  0.000000
10/2/2010	6:30:09 PM	SiCl4 MFC set to  0.000000
10/2/2010	6:30:09 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	6:30:09 PM	Tube furnace set to 0
10/2/2010	6:30:10 PM	Helium valve closed
10/2/2010	6:30:10 PM	H2 valve closed
10/2/2010	6:30:10 PM	BCl3 valve closed
10/2/2010	6:30:10 PM	PH3 valve closed
10/2/2010	6:30:10 PM	SiCl4 pre valve closed
10/2/2010	6:30:10 PM	SiCl4 post valve closed
10/2/2010	6:30:10 PM	Bubbler valve closed
10/2/2010	6:30:10 PM	Main Vac valve opened
10/2/2010	6:30:10 PM	Bypass valve opened
10/2/2010	6:30:10 PM	Helium MFC set to  0.000000
10/2/2010	6:30:10 PM	H2 MFC set to  0.000000
10/2/2010	6:30:10 PM	BCl3 MFC set to  0.000000
10/2/2010	6:30:10 PM	PHl3 MFC set to  0.000000
10/2/2010	6:30:10 PM	SiCl4 MFC set to  0.000000
10/2/2010	6:30:10 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	6:30:10 PM	Tube furnace set to 0
10/2/2010	6:31:10 PM	H2 valve closed
10/2/2010	6:31:10 PM	BCl3 valve closed
10/2/2010	6:31:10 PM	PH3 valve closed
10/2/2010	6:31:10 PM	SiCl4 pre valve closed
10/2/2010	6:31:10 PM	SiCl4 post valve closed
10/2/2010	6:31:10 PM	Bubbler valve closed
10/2/2010	6:31:10 PM	Helium valve opened
10/2/2010	6:31:10 PM	Main Vac valve opened
10/2/2010	6:31:10 PM	Bypass valve opened
10/2/2010	6:31:10 PM	Helium MFC set to  100.000000
10/2/2010	6:31:10 PM	H2 MFC set to  0.000000
10/2/2010	6:31:10 PM	BCl3 MFC set to  0.000000
10/2/2010	6:31:10 PM	PHl3 MFC set to  0.000000
10/2/2010	6:31:10 PM	SiCl4 MFC set to  0.000000
10/2/2010	6:31:10 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	6:31:10 PM	Tube furnace set to 0
10/2/2010	6:32:10 PM	Helium valve closed
10/2/2010	6:32:10 PM	H2 valve closed
10/2/2010	6:32:10 PM	BCl3 valve closed
10/2/2010	6:32:10 PM	PH3 valve closed
10/2/2010	6:32:10 PM	SiCl4 pre valve closed
10/2/2010	6:32:10 PM	SiCl4 post valve closed
10/2/2010	6:32:10 PM	Bubbler valve closed
10/2/2010	6:32:10 PM	Main Vac valve opened
10/2/2010	6:32:10 PM	Bypass valve opened
10/2/2010	6:32:10 PM	Helium MFC set to  0.000000
10/2/2010	6:32:10 PM	H2 MFC set to  0.000000
10/2/2010	6:32:10 PM	BCl3 MFC set to  0.000000
10/2/2010	6:32:10 PM	PHl3 MFC set to  0.000000
10/2/2010	6:32:10 PM	SiCl4 MFC set to  0.000000
10/2/2010	6:32:10 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	6:32:10 PM	Tube furnace set to 0
10/2/2010	6:33:10 PM	H2 valve closed
10/2/2010	6:33:10 PM	BCl3 valve closed
10/2/2010	6:33:10 PM	PH3 valve closed
10/2/2010	6:33:10 PM	SiCl4 pre valve closed
10/2/2010	6:33:10 PM	SiCl4 post valve closed
10/2/2010	6:33:10 PM	Bubbler valve closed
10/2/2010	6:33:10 PM	Helium valve opened
10/2/2010	6:33:10 PM	Main Vac valve opened
10/2/2010	6:33:10 PM	Bypass valve opened
10/2/2010	6:33:10 PM	Helium MFC set to  100.000000
10/2/2010	6:33:10 PM	H2 MFC set to  0.000000
10/2/2010	6:33:10 PM	BCl3 MFC set to  0.000000
10/2/2010	6:33:10 PM	PHl3 MFC set to  0.000000
10/2/2010	6:33:10 PM	SiCl4 MFC set to  0.000000
10/2/2010	6:33:10 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	6:33:10 PM	Tube furnace set to 0
10/2/2010	6:34:10 PM	Helium valve closed
10/2/2010	6:34:10 PM	H2 valve closed
10/2/2010	6:34:11 PM	BCl3 valve closed
10/2/2010	6:34:11 PM	PH3 valve closed
10/2/2010	6:34:11 PM	SiCl4 pre valve closed
10/2/2010	6:34:11 PM	SiCl4 post valve closed
10/2/2010	6:34:11 PM	Bubbler valve closed
10/2/2010	6:34:11 PM	Main Vac valve opened
10/2/2010	6:34:11 PM	Bypass valve opened
10/2/2010	6:34:11 PM	Helium MFC set to  0.000000
10/2/2010	6:34:11 PM	H2 MFC set to  0.000000
10/2/2010	6:34:11 PM	BCl3 MFC set to  0.000000
10/2/2010	6:34:11 PM	PHl3 MFC set to  0.000000
10/2/2010	6:34:11 PM	SiCl4 MFC set to  0.000000
10/2/2010	6:34:11 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	6:34:11 PM	Tube furnace set to 0
10/2/2010	6:35:11 PM	H2 valve closed
10/2/2010	6:35:11 PM	BCl3 valve closed
10/2/2010	6:35:11 PM	PH3 valve closed
10/2/2010	6:35:11 PM	SiCl4 pre valve closed
10/2/2010	6:35:11 PM	SiCl4 post valve closed
10/2/2010	6:35:11 PM	Bubbler valve closed
10/2/2010	6:35:11 PM	Helium valve opened
10/2/2010	6:35:11 PM	Main Vac valve opened
10/2/2010	6:35:11 PM	Bypass valve opened
10/2/2010	6:35:11 PM	Helium MFC set to  100.000000
10/2/2010	6:35:11 PM	H2 MFC set to  0.000000
10/2/2010	6:35:11 PM	BCl3 MFC set to  0.000000
10/2/2010	6:35:11 PM	PHl3 MFC set to  0.000000
10/2/2010	6:35:11 PM	SiCl4 MFC set to  0.000000
10/2/2010	6:35:11 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	6:35:11 PM	Tube furnace set to 0
10/2/2010	6:36:11 PM	Helium valve closed
10/2/2010	6:36:11 PM	H2 valve closed
10/2/2010	6:36:11 PM	BCl3 valve closed
10/2/2010	6:36:11 PM	PH3 valve closed
10/2/2010	6:36:11 PM	SiCl4 pre valve closed
10/2/2010	6:36:11 PM	SiCl4 post valve closed
10/2/2010	6:36:11 PM	Bubbler valve closed
10/2/2010	6:36:11 PM	Main Vac valve opened
10/2/2010	6:36:11 PM	Bypass valve opened
10/2/2010	6:36:11 PM	Helium MFC set to  0.000000
10/2/2010	6:36:11 PM	H2 MFC set to  0.000000
10/2/2010	6:36:11 PM	BCl3 MFC set to  0.000000
10/2/2010	6:36:11 PM	PHl3 MFC set to  0.000000
10/2/2010	6:36:11 PM	SiCl4 MFC set to  0.000000
10/2/2010	6:36:11 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	6:36:11 PM	Tube furnace set to 0
10/2/2010	6:37:11 PM	H2 valve closed
10/2/2010	6:37:11 PM	BCl3 valve closed
10/2/2010	6:37:11 PM	PH3 valve closed
10/2/2010	6:37:11 PM	SiCl4 pre valve closed
10/2/2010	6:37:11 PM	SiCl4 post valve closed
10/2/2010	6:37:11 PM	Bubbler valve closed
10/2/2010	6:37:11 PM	Helium valve opened
10/2/2010	6:37:11 PM	Main Vac valve opened
10/2/2010	6:37:11 PM	Bypass valve opened
10/2/2010	6:37:11 PM	Helium MFC set to  100.000000
10/2/2010	6:37:11 PM	H2 MFC set to  0.000000
10/2/2010	6:37:11 PM	BCl3 MFC set to  0.000000
10/2/2010	6:37:11 PM	PHl3 MFC set to  0.000000
10/2/2010	6:37:11 PM	SiCl4 MFC set to  0.000000
10/2/2010	6:37:11 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	6:37:11 PM	Tube furnace set to 0
10/2/2010	6:38:11 PM	Helium valve closed
10/2/2010	6:38:11 PM	H2 valve closed
10/2/2010	6:38:11 PM	BCl3 valve closed
10/2/2010	6:38:11 PM	PH3 valve closed
10/2/2010	6:38:11 PM	SiCl4 pre valve closed
10/2/2010	6:38:11 PM	SiCl4 post valve closed
10/2/2010	6:38:11 PM	Bubbler valve closed
10/2/2010	6:38:11 PM	Main Vac valve opened
10/2/2010	6:38:11 PM	Bypass valve opened
10/2/2010	6:38:11 PM	Helium MFC set to  0.000000
10/2/2010	6:38:11 PM	H2 MFC set to  0.000000
10/2/2010	6:38:11 PM	BCl3 MFC set to  0.000000
10/2/2010	6:38:11 PM	PHl3 MFC set to  0.000000
10/2/2010	6:38:11 PM	SiCl4 MFC set to  0.000000
10/2/2010	6:38:11 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	6:38:11 PM	Tube furnace set to 0
10/2/2010	6:39:12 PM	H2 valve closed
10/2/2010	6:39:12 PM	BCl3 valve closed
10/2/2010	6:39:12 PM	PH3 valve closed
10/2/2010	6:39:12 PM	SiCl4 pre valve closed
10/2/2010	6:39:12 PM	SiCl4 post valve closed
10/2/2010	6:39:12 PM	Bubbler valve closed
10/2/2010	6:39:12 PM	Helium valve opened
10/2/2010	6:39:12 PM	Main Vac valve opened
10/2/2010	6:39:12 PM	Bypass valve opened
10/2/2010	6:39:12 PM	Helium MFC set to  100.000000
10/2/2010	6:39:12 PM	H2 MFC set to  0.000000
10/2/2010	6:39:12 PM	BCl3 MFC set to  0.000000
10/2/2010	6:39:12 PM	PHl3 MFC set to  0.000000
10/2/2010	6:39:12 PM	SiCl4 MFC set to  0.000000
10/2/2010	6:39:12 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	6:39:12 PM	Tube furnace set to 0
10/2/2010	6:40:12 PM	Helium valve closed
10/2/2010	6:40:12 PM	H2 valve closed
10/2/2010	6:40:12 PM	BCl3 valve closed
10/2/2010	6:40:12 PM	PH3 valve closed
10/2/2010	6:40:12 PM	SiCl4 pre valve closed
10/2/2010	6:40:12 PM	SiCl4 post valve closed
10/2/2010	6:40:12 PM	Bubbler valve closed
10/2/2010	6:40:12 PM	Main Vac valve opened
10/2/2010	6:40:12 PM	Bypass valve opened
10/2/2010	6:40:12 PM	Helium MFC set to  0.000000
10/2/2010	6:40:12 PM	H2 MFC set to  0.000000
10/2/2010	6:40:12 PM	BCl3 MFC set to  0.000000
10/2/2010	6:40:12 PM	PHl3 MFC set to  0.000000
10/2/2010	6:40:12 PM	SiCl4 MFC set to  0.000000
10/2/2010	6:40:12 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	6:40:12 PM	Tube furnace set to 0
10/2/2010	6:41:12 PM	H2 valve closed
10/2/2010	6:41:12 PM	BCl3 valve closed
10/2/2010	6:41:12 PM	PH3 valve closed
10/2/2010	6:41:12 PM	SiCl4 pre valve closed
10/2/2010	6:41:12 PM	SiCl4 post valve closed
10/2/2010	6:41:12 PM	Bubbler valve closed
10/2/2010	6:41:12 PM	Helium valve opened
10/2/2010	6:41:12 PM	Main Vac valve opened
10/2/2010	6:41:12 PM	Bypass valve opened
10/2/2010	6:41:12 PM	Helium MFC set to  100.000000
10/2/2010	6:41:12 PM	H2 MFC set to  0.000000
10/2/2010	6:41:12 PM	BCl3 MFC set to  0.000000
10/2/2010	6:41:12 PM	PHl3 MFC set to  0.000000
10/2/2010	6:41:12 PM	SiCl4 MFC set to  0.000000
10/2/2010	6:41:12 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	6:41:12 PM	Tube furnace set to 0
10/2/2010	6:42:12 PM	Helium valve closed
10/2/2010	6:42:12 PM	H2 valve closed
10/2/2010	6:42:12 PM	BCl3 valve closed
10/2/2010	6:42:12 PM	PH3 valve closed
10/2/2010	6:42:12 PM	SiCl4 pre valve closed
10/2/2010	6:42:12 PM	SiCl4 post valve closed
10/2/2010	6:42:12 PM	Bubbler valve closed
10/2/2010	6:42:12 PM	Main Vac valve opened
10/2/2010	6:42:12 PM	Bypass valve opened
10/2/2010	6:42:12 PM	Helium MFC set to  0.000000
10/2/2010	6:42:12 PM	H2 MFC set to  0.000000
10/2/2010	6:42:12 PM	BCl3 MFC set to  0.000000
10/2/2010	6:42:12 PM	PHl3 MFC set to  0.000000
10/2/2010	6:42:12 PM	SiCl4 MFC set to  0.000000
10/2/2010	6:42:12 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	6:42:12 PM	Tube furnace set to 0
10/2/2010	6:43:12 PM	H2 valve closed
10/2/2010	6:43:12 PM	BCl3 valve closed
10/2/2010	6:43:12 PM	PH3 valve closed
10/2/2010	6:43:12 PM	SiCl4 pre valve closed
10/2/2010	6:43:12 PM	SiCl4 post valve closed
10/2/2010	6:43:12 PM	Bubbler valve closed
10/2/2010	6:43:12 PM	Helium valve opened
10/2/2010	6:43:12 PM	Main Vac valve opened
10/2/2010	6:43:12 PM	Bypass valve opened
10/2/2010	6:43:12 PM	Helium MFC set to  100.000000
10/2/2010	6:43:12 PM	H2 MFC set to  0.000000
10/2/2010	6:43:12 PM	BCl3 MFC set to  0.000000
10/2/2010	6:43:12 PM	PHl3 MFC set to  0.000000
10/2/2010	6:43:12 PM	SiCl4 MFC set to  0.000000
10/2/2010	6:43:12 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	6:43:13 PM	Tube furnace set to 0
10/2/2010	6:44:13 PM	Helium valve closed
10/2/2010	6:44:13 PM	H2 valve closed
10/2/2010	6:44:13 PM	BCl3 valve closed
10/2/2010	6:44:13 PM	PH3 valve closed
10/2/2010	6:44:13 PM	SiCl4 pre valve closed
10/2/2010	6:44:13 PM	SiCl4 post valve closed
10/2/2010	6:44:13 PM	Bubbler valve closed
10/2/2010	6:44:13 PM	Main Vac valve opened
10/2/2010	6:44:13 PM	Bypass valve opened
10/2/2010	6:44:13 PM	Helium MFC set to  0.000000
10/2/2010	6:44:13 PM	H2 MFC set to  0.000000
10/2/2010	6:44:13 PM	BCl3 MFC set to  0.000000
10/2/2010	6:44:13 PM	PHl3 MFC set to  0.000000
10/2/2010	6:44:13 PM	SiCl4 MFC set to  0.000000
10/2/2010	6:44:13 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	6:44:13 PM	Tube furnace set to 0
10/2/2010	6:45:13 PM	H2 valve closed
10/2/2010	6:45:13 PM	BCl3 valve closed
10/2/2010	6:45:13 PM	PH3 valve closed
10/2/2010	6:45:13 PM	SiCl4 pre valve closed
10/2/2010	6:45:13 PM	SiCl4 post valve closed
10/2/2010	6:45:13 PM	Bubbler valve closed
10/2/2010	6:45:13 PM	Helium valve opened
10/2/2010	6:45:13 PM	Main Vac valve opened
10/2/2010	6:45:13 PM	Bypass valve opened
10/2/2010	6:45:13 PM	Helium MFC set to  100.000000
10/2/2010	6:45:13 PM	H2 MFC set to  0.000000
10/2/2010	6:45:13 PM	BCl3 MFC set to  0.000000
10/2/2010	6:45:13 PM	PHl3 MFC set to  0.000000
10/2/2010	6:45:13 PM	SiCl4 MFC set to  0.000000
10/2/2010	6:45:13 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	6:45:13 PM	Tube furnace set to 0
10/2/2010	6:46:13 PM	Helium valve closed
10/2/2010	6:46:13 PM	H2 valve closed
10/2/2010	6:46:13 PM	BCl3 valve closed
10/2/2010	6:46:13 PM	PH3 valve closed
10/2/2010	6:46:13 PM	SiCl4 pre valve closed
10/2/2010	6:46:13 PM	SiCl4 post valve closed
10/2/2010	6:46:13 PM	Bubbler valve closed
10/2/2010	6:46:13 PM	Main Vac valve opened
10/2/2010	6:46:13 PM	Bypass valve opened
10/2/2010	6:46:13 PM	Helium MFC set to  0.000000
10/2/2010	6:46:13 PM	H2 MFC set to  0.000000
10/2/2010	6:46:13 PM	BCl3 MFC set to  0.000000
10/2/2010	6:46:13 PM	PHl3 MFC set to  0.000000
10/2/2010	6:46:13 PM	SiCl4 MFC set to  0.000000
10/2/2010	6:46:13 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	6:46:13 PM	Tube furnace set to 0
10/2/2010	6:47:13 PM	H2 valve closed
10/2/2010	6:47:13 PM	BCl3 valve closed
10/2/2010	6:47:13 PM	PH3 valve closed
10/2/2010	6:47:13 PM	SiCl4 pre valve closed
10/2/2010	6:47:13 PM	SiCl4 post valve closed
10/2/2010	6:47:13 PM	Bubbler valve closed
10/2/2010	6:47:13 PM	Helium valve opened
10/2/2010	6:47:13 PM	Main Vac valve opened
10/2/2010	6:47:13 PM	Bypass valve opened
10/2/2010	6:47:13 PM	Helium MFC set to  100.000000
10/2/2010	6:47:13 PM	H2 MFC set to  0.000000
10/2/2010	6:47:13 PM	BCl3 MFC set to  0.000000
10/2/2010	6:47:13 PM	PHl3 MFC set to  0.000000
10/2/2010	6:47:13 PM	SiCl4 MFC set to  0.000000
10/2/2010	6:47:13 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	6:47:13 PM	Tube furnace set to 0
10/2/2010	6:48:13 PM	Helium valve closed
10/2/2010	6:48:13 PM	H2 valve closed
10/2/2010	6:48:13 PM	BCl3 valve closed
10/2/2010	6:48:13 PM	PH3 valve closed
10/2/2010	6:48:13 PM	SiCl4 pre valve closed
10/2/2010	6:48:13 PM	SiCl4 post valve closed
10/2/2010	6:48:13 PM	Bubbler valve closed
10/2/2010	6:48:13 PM	Main Vac valve opened
10/2/2010	6:48:13 PM	Bypass valve opened
10/2/2010	6:48:13 PM	Helium MFC set to  0.000000
10/2/2010	6:48:13 PM	H2 MFC set to  0.000000
10/2/2010	6:48:13 PM	BCl3 MFC set to  0.000000
10/2/2010	6:48:13 PM	PHl3 MFC set to  0.000000
10/2/2010	6:48:13 PM	SiCl4 MFC set to  0.000000
10/2/2010	6:48:13 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	6:48:14 PM	Tube furnace set to 0
10/2/2010	6:49:14 PM	H2 valve closed
10/2/2010	6:49:14 PM	BCl3 valve closed
10/2/2010	6:49:14 PM	PH3 valve closed
10/2/2010	6:49:14 PM	SiCl4 pre valve closed
10/2/2010	6:49:14 PM	SiCl4 post valve closed
10/2/2010	6:49:14 PM	Bubbler valve closed
10/2/2010	6:49:14 PM	Helium valve opened
10/2/2010	6:49:14 PM	Main Vac valve opened
10/2/2010	6:49:14 PM	Bypass valve opened
10/2/2010	6:49:14 PM	Helium MFC set to  100.000000
10/2/2010	6:49:14 PM	H2 MFC set to  0.000000
10/2/2010	6:49:14 PM	BCl3 MFC set to  0.000000
10/2/2010	6:49:14 PM	PHl3 MFC set to  0.000000
10/2/2010	6:49:14 PM	SiCl4 MFC set to  0.000000
10/2/2010	6:49:14 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	6:49:14 PM	Tube furnace set to 0
10/2/2010	6:50:14 PM	Helium valve closed
10/2/2010	6:50:14 PM	H2 valve closed
10/2/2010	6:50:14 PM	BCl3 valve closed
10/2/2010	6:50:14 PM	PH3 valve closed
10/2/2010	6:50:14 PM	SiCl4 pre valve closed
10/2/2010	6:50:14 PM	SiCl4 post valve closed
10/2/2010	6:50:14 PM	Bubbler valve closed
10/2/2010	6:50:14 PM	Main Vac valve opened
10/2/2010	6:50:14 PM	Bypass valve opened
10/2/2010	6:50:14 PM	Helium MFC set to  0.000000
10/2/2010	6:50:14 PM	H2 MFC set to  0.000000
10/2/2010	6:50:14 PM	BCl3 MFC set to  0.000000
10/2/2010	6:50:14 PM	PHl3 MFC set to  0.000000
10/2/2010	6:50:14 PM	SiCl4 MFC set to  0.000000
10/2/2010	6:50:14 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	6:50:14 PM	Tube furnace set to 0
10/2/2010	6:50:15 PM	Run finished at 6:50 PM
10/2/2010	6:50:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/2/2010	7:30:01 PM	Helium MFC set to  100.000000
10/2/2010	7:30:02 PM	Helium valve opened
10/2/2010	7:41:36 PM	Helium valve closed
10/2/2010	7:41:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	7:41:38 PM	Recipe started at 7:41 PM
10/2/2010	7:41:38 PM	Helium valve closed
10/2/2010	7:41:38 PM	H2 valve closed
10/2/2010	7:41:38 PM	BCl3 valve closed
10/2/2010	7:41:38 PM	PH3 valve closed
10/2/2010	7:41:38 PM	SiCl4 pre valve closed
10/2/2010	7:41:38 PM	SiCl4 post valve closed
10/2/2010	7:41:38 PM	Main Vac valve closed
10/2/2010	7:41:38 PM	Bubbler valve closed
10/2/2010	7:41:38 PM	Bypass valve opened
10/2/2010	7:41:38 PM	Helium MFC set to  0.000000
10/2/2010	7:41:38 PM	H2 MFC set to  0.000000
10/2/2010	7:41:38 PM	BCl3 MFC set to  0.000000
10/2/2010	7:41:38 PM	PHl3 MFC set to  0.000000
10/2/2010	7:41:38 PM	SiCl4 MFC set to  0.000000
10/2/2010	7:41:38 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	7:41:38 PM	Tube furnace set to 0
10/2/2010	7:41:39 PM	Helium valve closed
10/2/2010	7:41:39 PM	H2 valve closed
10/2/2010	7:41:39 PM	BCl3 valve closed
10/2/2010	7:41:39 PM	PH3 valve closed
10/2/2010	7:41:39 PM	SiCl4 pre valve closed
10/2/2010	7:41:39 PM	SiCl4 post valve closed
10/2/2010	7:41:39 PM	Bubbler valve closed
10/2/2010	7:41:39 PM	Main Vac valve opened
10/2/2010	7:41:39 PM	Bypass valve opened
10/2/2010	7:41:39 PM	Helium MFC set to  0.000000
10/2/2010	7:41:39 PM	H2 MFC set to  0.000000
10/2/2010	7:41:39 PM	BCl3 MFC set to  0.000000
10/2/2010	7:41:39 PM	PHl3 MFC set to  0.000000
10/2/2010	7:41:39 PM	SiCl4 MFC set to  0.000000
10/2/2010	7:41:39 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	7:41:39 PM	Tube furnace set to 0
10/2/2010	7:41:39 PM	Run finished at 7:41 PM
10/2/2010	7:41:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	7:42:25 PM	Recipe started at 7:42 PM
10/2/2010	7:42:25 PM	Helium valve closed
10/2/2010	7:42:25 PM	BCl3 valve closed
10/2/2010	7:42:25 PM	PH3 valve closed
10/2/2010	7:42:25 PM	SiCl4 pre valve closed
10/2/2010	7:42:25 PM	SiCl4 post valve closed
10/2/2010	7:42:25 PM	Main Vac valve closed
10/2/2010	7:42:25 PM	Bypass valve closed
10/2/2010	7:42:25 PM	Bubbler valve closed
10/2/2010	7:42:25 PM	H2 valve opened
10/2/2010	7:42:25 PM	Helium MFC set to  0.000000
10/2/2010	7:42:25 PM	H2 MFC set to  500.000000
10/2/2010	7:42:25 PM	BCl3 MFC set to  0.000000
10/2/2010	7:42:25 PM	PHl3 MFC set to  0.000000
10/2/2010	7:42:25 PM	SiCl4 MFC set to  0.000000
10/2/2010	7:42:25 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	7:42:26 PM	Tube furnace set to 1000
10/2/2010	7:43:43 PM	Helium valve closed
10/2/2010	7:43:43 PM	BCl3 valve closed
10/2/2010	7:43:43 PM	PH3 valve closed
10/2/2010	7:43:43 PM	SiCl4 pre valve closed
10/2/2010	7:43:43 PM	SiCl4 post valve closed
10/2/2010	7:43:43 PM	Main Vac valve closed
10/2/2010	7:43:43 PM	Bypass valve closed
10/2/2010	7:43:43 PM	H2 valve opened
10/2/2010	7:43:43 PM	Bubbler valve opened
10/2/2010	7:43:43 PM	Helium MFC set to  0.000000
10/2/2010	7:43:43 PM	H2 MFC set to  500.000000
10/2/2010	7:43:43 PM	BCl3 MFC set to  0.000000
10/2/2010	7:43:43 PM	PHl3 MFC set to  0.000000
10/2/2010	7:43:43 PM	SiCl4 MFC set to  0.000000
10/2/2010	7:43:43 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	7:43:43 PM	Tube furnace set to 1000
10/2/2010	8:03:43 PM	Helium valve closed
10/2/2010	8:03:43 PM	PH3 valve closed
10/2/2010	8:03:43 PM	Main Vac valve closed
10/2/2010	8:03:43 PM	Bypass valve closed
10/2/2010	8:03:43 PM	H2 valve opened
10/2/2010	8:03:43 PM	BCl3 valve opened
10/2/2010	8:03:43 PM	SiCl4 pre valve opened
10/2/2010	8:03:43 PM	SiCl4 post valve opened
10/2/2010	8:03:43 PM	Bubbler valve opened
10/2/2010	8:03:43 PM	Helium MFC set to  0.000000
10/2/2010	8:03:43 PM	H2 MFC set to  500.000000
10/2/2010	8:03:43 PM	BCl3 MFC set to  10.000000
10/2/2010	8:03:43 PM	PHl3 MFC set to  0.000000
10/2/2010	8:03:43 PM	SiCl4 MFC set to  50.000000
10/2/2010	8:03:43 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	8:03:43 PM	Tube furnace set to 1000
10/2/2010	8:15:43 PM	Helium valve closed
10/2/2010	8:15:43 PM	BCl3 valve closed
10/2/2010	8:15:43 PM	PH3 valve closed
10/2/2010	8:15:43 PM	SiCl4 pre valve closed
10/2/2010	8:15:43 PM	SiCl4 post valve closed
10/2/2010	8:15:43 PM	Main Vac valve closed
10/2/2010	8:15:43 PM	Bypass valve closed
10/2/2010	8:15:43 PM	H2 valve opened
10/2/2010	8:15:43 PM	Bubbler valve opened
10/2/2010	8:15:43 PM	Helium MFC set to  0.000000
10/2/2010	8:15:43 PM	H2 MFC set to  500.000000
10/2/2010	8:15:43 PM	BCl3 MFC set to  0.000000
10/2/2010	8:15:43 PM	PHl3 MFC set to  0.000000
10/2/2010	8:15:43 PM	SiCl4 MFC set to  0.000000
10/2/2010	8:15:43 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	8:15:44 PM	Tube furnace set to 750
10/2/2010	8:35:44 PM	H2 valve closed
10/2/2010	8:35:44 PM	BCl3 valve closed
10/2/2010	8:35:44 PM	PH3 valve closed
10/2/2010	8:35:44 PM	SiCl4 pre valve closed
10/2/2010	8:35:44 PM	SiCl4 post valve closed
10/2/2010	8:35:44 PM	Main Vac valve closed
10/2/2010	8:35:44 PM	Bypass valve closed
10/2/2010	8:35:44 PM	Helium valve opened
10/2/2010	8:35:44 PM	Bubbler valve opened
10/2/2010	8:35:44 PM	Helium MFC set to  500.000000
10/2/2010	8:35:44 PM	H2 MFC set to  0.000000
10/2/2010	8:35:44 PM	BCl3 MFC set to  0.000000
10/2/2010	8:35:44 PM	PHl3 MFC set to  0.000000
10/2/2010	8:35:44 PM	SiCl4 MFC set to  0.000000
10/2/2010	8:35:44 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	8:35:44 PM	Tube furnace set to 0
10/2/2010	8:47:21 PM	Run aborted at 8:47 PM
10/2/2010	8:47:21 PM	Helium valve closed
10/2/2010	8:47:21 PM	H2 valve closed
10/2/2010	8:47:21 PM	BCl3 valve closed
10/2/2010	8:47:21 PM	PH3 valve closed
10/2/2010	8:47:21 PM	SiCl4 pre valve closed
10/2/2010	8:47:21 PM	SiCl4 post valve closed
10/2/2010	8:47:21 PM	Bypass valve closed
10/2/2010	8:47:21 PM	Main Vac valve closed
10/2/2010	8:47:21 PM	Bubbler valve closed
10/2/2010	8:47:21 PM	Helium MFC set to  0.000000
10/2/2010	8:47:21 PM	H2 MFC set to  0.000000
10/2/2010	8:47:21 PM	BCl3 MFC set to  0.000000
10/2/2010	8:47:21 PM	PHl3 MFC set to  0.000000
10/2/2010	8:47:21 PM	SiCl4 MFC set to  0.000000
10/2/2010	8:47:21 PM	Tube furnace set to 0
10/2/2010	8:47:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/2/2010	8:47:43 PM	Recipe started at 8:47 PM
10/2/2010	8:47:43 PM	H2 valve closed
10/2/2010	8:47:43 PM	BCl3 valve closed
10/2/2010	8:47:43 PM	PH3 valve closed
10/2/2010	8:47:43 PM	SiCl4 pre valve closed
10/2/2010	8:47:43 PM	SiCl4 post valve closed
10/2/2010	8:47:43 PM	Main Vac valve closed
10/2/2010	8:47:43 PM	Bypass valve closed
10/2/2010	8:47:43 PM	Bubbler valve closed
10/2/2010	8:47:43 PM	Helium valve opened
10/2/2010	8:47:43 PM	Helium MFC set to  500.000000
10/2/2010	8:47:43 PM	H2 MFC set to  0.000000
10/2/2010	8:47:43 PM	BCl3 MFC set to  0.000000
10/2/2010	8:47:43 PM	PHl3 MFC set to  0.000000
10/2/2010	8:47:43 PM	SiCl4 MFC set to  0.000000
10/2/2010	8:47:43 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	8:47:43 PM	Tube furnace set to 0
10/2/2010	8:47:49 PM	Run aborted at 8:47 PM
10/2/2010	8:47:49 PM	Helium valve closed
10/2/2010	8:47:49 PM	H2 valve closed
10/2/2010	8:47:49 PM	BCl3 valve closed
10/2/2010	8:47:49 PM	PH3 valve closed
10/2/2010	8:47:49 PM	SiCl4 pre valve closed
10/2/2010	8:47:49 PM	SiCl4 post valve closed
10/2/2010	8:47:49 PM	Bypass valve closed
10/2/2010	8:47:49 PM	Main Vac valve closed
10/2/2010	8:47:49 PM	Bubbler valve closed
10/2/2010	8:47:49 PM	Helium MFC set to  0.000000
10/2/2010	8:47:49 PM	H2 MFC set to  0.000000
10/2/2010	8:47:49 PM	BCl3 MFC set to  0.000000
10/2/2010	8:47:49 PM	PHl3 MFC set to  0.000000
10/2/2010	8:47:49 PM	SiCl4 MFC set to  0.000000
10/2/2010	8:47:49 PM	Tube furnace set to 0
10/2/2010	8:47:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/2/2010	9:00:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	9:00:20 PM	Recipe started at 9:00 PM
10/2/2010	9:00:20 PM	Helium valve closed
10/2/2010	9:00:20 PM	H2 valve closed
10/2/2010	9:00:20 PM	BCl3 valve closed
10/2/2010	9:00:20 PM	PH3 valve closed
10/2/2010	9:00:20 PM	SiCl4 pre valve closed
10/2/2010	9:00:20 PM	SiCl4 post valve closed
10/2/2010	9:00:20 PM	Main Vac valve closed
10/2/2010	9:00:20 PM	Bubbler valve closed
10/2/2010	9:00:20 PM	Bypass valve opened
10/2/2010	9:00:20 PM	Helium MFC set to  0.000000
10/2/2010	9:00:20 PM	H2 MFC set to  0.000000
10/2/2010	9:00:20 PM	BCl3 MFC set to  0.000000
10/2/2010	9:00:20 PM	PHl3 MFC set to  0.000000
10/2/2010	9:00:20 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:00:20 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	9:00:21 PM	Tube furnace set to 0
10/2/2010	9:03:48 PM	Run aborted at 9:03 PM
10/2/2010	9:03:48 PM	Helium valve closed
10/2/2010	9:03:48 PM	H2 valve closed
10/2/2010	9:03:48 PM	BCl3 valve closed
10/2/2010	9:03:48 PM	PH3 valve closed
10/2/2010	9:03:48 PM	SiCl4 pre valve closed
10/2/2010	9:03:48 PM	SiCl4 post valve closed
10/2/2010	9:03:48 PM	Bypass valve closed
10/2/2010	9:03:48 PM	Main Vac valve closed
10/2/2010	9:03:48 PM	Bubbler valve closed
10/2/2010	9:03:48 PM	Helium MFC set to  0.000000
10/2/2010	9:03:48 PM	H2 MFC set to  0.000000
10/2/2010	9:03:48 PM	BCl3 MFC set to  0.000000
10/2/2010	9:03:48 PM	PHl3 MFC set to  0.000000
10/2/2010	9:03:48 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:03:48 PM	Tube furnace set to 0
10/2/2010	9:03:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	9:04:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	9:04:51 PM	Recipe started at 9:04 PM
10/2/2010	9:04:51 PM	Helium valve closed
10/2/2010	9:04:51 PM	H2 valve closed
10/2/2010	9:04:51 PM	BCl3 valve closed
10/2/2010	9:04:51 PM	PH3 valve closed
10/2/2010	9:04:51 PM	SiCl4 pre valve closed
10/2/2010	9:04:51 PM	SiCl4 post valve closed
10/2/2010	9:04:51 PM	Main Vac valve closed
10/2/2010	9:04:51 PM	Bubbler valve closed
10/2/2010	9:04:51 PM	Bypass valve opened
10/2/2010	9:04:51 PM	Helium MFC set to  0.000000
10/2/2010	9:04:51 PM	H2 MFC set to  0.000000
10/2/2010	9:04:51 PM	BCl3 MFC set to  0.000000
10/2/2010	9:04:51 PM	PHl3 MFC set to  0.000000
10/2/2010	9:04:51 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:04:51 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	9:04:51 PM	Tube furnace set to 0
10/2/2010	9:05:31 PM	Run aborted at 9:05 PM
10/2/2010	9:05:31 PM	Helium valve closed
10/2/2010	9:05:31 PM	H2 valve closed
10/2/2010	9:05:31 PM	BCl3 valve closed
10/2/2010	9:05:31 PM	PH3 valve closed
10/2/2010	9:05:31 PM	SiCl4 pre valve closed
10/2/2010	9:05:31 PM	SiCl4 post valve closed
10/2/2010	9:05:31 PM	Bypass valve closed
10/2/2010	9:05:31 PM	Main Vac valve closed
10/2/2010	9:05:31 PM	Bubbler valve closed
10/2/2010	9:05:31 PM	Helium MFC set to  0.000000
10/2/2010	9:05:31 PM	H2 MFC set to  0.000000
10/2/2010	9:05:31 PM	BCl3 MFC set to  0.000000
10/2/2010	9:05:31 PM	PHl3 MFC set to  0.000000
10/2/2010	9:05:31 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:05:31 PM	Tube furnace set to 0
10/2/2010	9:05:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	9:05:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/2/2010	9:05:50 PM	Recipe started at 9:05 PM
10/2/2010	9:05:50 PM	H2 valve closed
10/2/2010	9:05:50 PM	BCl3 valve closed
10/2/2010	9:05:50 PM	PH3 valve closed
10/2/2010	9:05:50 PM	SiCl4 pre valve closed
10/2/2010	9:05:50 PM	SiCl4 post valve closed
10/2/2010	9:05:50 PM	Main Vac valve closed
10/2/2010	9:05:50 PM	Bypass valve closed
10/2/2010	9:05:50 PM	Bubbler valve closed
10/2/2010	9:05:50 PM	Helium valve opened
10/2/2010	9:05:50 PM	Helium MFC set to  500.000000
10/2/2010	9:05:50 PM	H2 MFC set to  0.000000
10/2/2010	9:05:50 PM	BCl3 MFC set to  0.000000
10/2/2010	9:05:50 PM	PHl3 MFC set to  0.000000
10/2/2010	9:05:50 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:05:50 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	9:05:50 PM	Tube furnace set to 0
10/2/2010	9:05:51 PM	Helium valve closed
10/2/2010	9:05:51 PM	H2 valve closed
10/2/2010	9:05:51 PM	BCl3 valve closed
10/2/2010	9:05:51 PM	PH3 valve closed
10/2/2010	9:05:51 PM	SiCl4 pre valve closed
10/2/2010	9:05:51 PM	SiCl4 post valve closed
10/2/2010	9:05:51 PM	Main Vac valve closed
10/2/2010	9:05:51 PM	Bypass valve closed
10/2/2010	9:05:51 PM	Bubbler valve closed
10/2/2010	9:05:51 PM	Helium MFC set to  0.000000
10/2/2010	9:05:51 PM	H2 MFC set to  0.000000
10/2/2010	9:05:51 PM	BCl3 MFC set to  0.000000
10/2/2010	9:05:51 PM	PHl3 MFC set to  0.000000
10/2/2010	9:05:51 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:05:51 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	9:05:51 PM	Tube furnace set to 0
10/2/2010	9:05:51 PM	Run finished at 9:05 PM
10/2/2010	9:05:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/2/2010	9:15:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	9:15:55 PM	Recipe started at 9:15 PM
10/2/2010	9:15:55 PM	Helium valve closed
10/2/2010	9:15:55 PM	H2 valve closed
10/2/2010	9:15:55 PM	BCl3 valve closed
10/2/2010	9:15:55 PM	PH3 valve closed
10/2/2010	9:15:55 PM	SiCl4 pre valve closed
10/2/2010	9:15:55 PM	SiCl4 post valve closed
10/2/2010	9:15:55 PM	Main Vac valve closed
10/2/2010	9:15:55 PM	Bubbler valve closed
10/2/2010	9:15:55 PM	Bypass valve opened
10/2/2010	9:15:55 PM	Helium MFC set to  0.000000
10/2/2010	9:15:55 PM	H2 MFC set to  0.000000
10/2/2010	9:15:55 PM	BCl3 MFC set to  0.000000
10/2/2010	9:15:55 PM	PHl3 MFC set to  0.000000
10/2/2010	9:15:55 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:15:55 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	9:15:55 PM	Tube furnace set to 0
10/2/2010	9:16:57 PM	Run aborted at 9:16 PM
10/2/2010	9:16:57 PM	Helium valve closed
10/2/2010	9:16:57 PM	H2 valve closed
10/2/2010	9:16:57 PM	BCl3 valve closed
10/2/2010	9:16:57 PM	PH3 valve closed
10/2/2010	9:16:57 PM	SiCl4 pre valve closed
10/2/2010	9:16:57 PM	SiCl4 post valve closed
10/2/2010	9:16:57 PM	Bypass valve closed
10/2/2010	9:16:57 PM	Main Vac valve closed
10/2/2010	9:16:57 PM	Bubbler valve closed
10/2/2010	9:16:57 PM	Helium MFC set to  0.000000
10/2/2010	9:16:57 PM	H2 MFC set to  0.000000
10/2/2010	9:16:57 PM	BCl3 MFC set to  0.000000
10/2/2010	9:16:57 PM	PHl3 MFC set to  0.000000
10/2/2010	9:16:57 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:16:57 PM	Tube furnace set to 0
10/2/2010	9:16:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	9:16:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	9:17:00 PM	Recipe started at 9:16 PM
10/2/2010	9:17:00 PM	Helium valve closed
10/2/2010	9:17:00 PM	H2 valve closed
10/2/2010	9:17:00 PM	BCl3 valve closed
10/2/2010	9:17:00 PM	PH3 valve closed
10/2/2010	9:17:00 PM	SiCl4 pre valve closed
10/2/2010	9:17:00 PM	SiCl4 post valve closed
10/2/2010	9:17:00 PM	Main Vac valve closed
10/2/2010	9:17:00 PM	Bubbler valve closed
10/2/2010	9:17:00 PM	Bypass valve opened
10/2/2010	9:17:00 PM	Helium MFC set to  0.000000
10/2/2010	9:17:00 PM	H2 MFC set to  0.000000
10/2/2010	9:17:00 PM	BCl3 MFC set to  0.000000
10/2/2010	9:17:00 PM	PHl3 MFC set to  0.000000
10/2/2010	9:17:00 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:17:00 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	9:17:00 PM	Tube furnace set to 0
10/2/2010	9:17:15 PM	Helium valve closed
10/2/2010	9:17:15 PM	H2 valve closed
10/2/2010	9:17:15 PM	BCl3 valve closed
10/2/2010	9:17:15 PM	PH3 valve closed
10/2/2010	9:17:15 PM	SiCl4 pre valve closed
10/2/2010	9:17:15 PM	SiCl4 post valve closed
10/2/2010	9:17:15 PM	Bubbler valve closed
10/2/2010	9:17:15 PM	Main Vac valve opened
10/2/2010	9:17:15 PM	Bypass valve opened
10/2/2010	9:17:15 PM	Helium MFC set to  0.000000
10/2/2010	9:17:15 PM	H2 MFC set to  0.000000
10/2/2010	9:17:15 PM	BCl3 MFC set to  0.000000
10/2/2010	9:17:15 PM	PHl3 MFC set to  0.000000
10/2/2010	9:17:15 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:17:15 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	9:17:15 PM	Tube furnace set to 0
10/2/2010	9:17:16 PM	Run finished at 9:17 PM
10/2/2010	9:17:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	9:17:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/2/2010	9:17:29 PM	Recipe started at 9:17 PM
10/2/2010	9:17:29 PM	H2 valve closed
10/2/2010	9:17:29 PM	BCl3 valve closed
10/2/2010	9:17:29 PM	PH3 valve closed
10/2/2010	9:17:29 PM	SiCl4 pre valve closed
10/2/2010	9:17:29 PM	SiCl4 post valve closed
10/2/2010	9:17:29 PM	Main Vac valve closed
10/2/2010	9:17:29 PM	Bypass valve closed
10/2/2010	9:17:29 PM	Bubbler valve closed
10/2/2010	9:17:29 PM	Helium valve opened
10/2/2010	9:17:29 PM	Helium MFC set to  500.000000
10/2/2010	9:17:29 PM	H2 MFC set to  0.000000
10/2/2010	9:17:29 PM	BCl3 MFC set to  0.000000
10/2/2010	9:17:29 PM	PHl3 MFC set to  0.000000
10/2/2010	9:17:29 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:17:29 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	9:17:29 PM	Tube furnace set to 0
10/2/2010	9:17:40 PM	Helium valve closed
10/2/2010	9:17:40 PM	H2 valve closed
10/2/2010	9:17:40 PM	BCl3 valve closed
10/2/2010	9:17:40 PM	PH3 valve closed
10/2/2010	9:17:40 PM	SiCl4 pre valve closed
10/2/2010	9:17:40 PM	SiCl4 post valve closed
10/2/2010	9:17:40 PM	Main Vac valve closed
10/2/2010	9:17:40 PM	Bypass valve closed
10/2/2010	9:17:40 PM	Bubbler valve closed
10/2/2010	9:17:40 PM	Helium MFC set to  0.000000
10/2/2010	9:17:40 PM	H2 MFC set to  0.000000
10/2/2010	9:17:40 PM	BCl3 MFC set to  0.000000
10/2/2010	9:17:40 PM	PHl3 MFC set to  0.000000
10/2/2010	9:17:40 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:17:40 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	9:17:40 PM	Tube furnace set to 0
10/2/2010	9:17:40 PM	Run finished at 9:17 PM
10/2/2010	9:17:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/2/2010	9:17:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	9:17:43 PM	Recipe started at 9:17 PM
10/2/2010	9:17:43 PM	Helium valve closed
10/2/2010	9:17:43 PM	H2 valve closed
10/2/2010	9:17:43 PM	BCl3 valve closed
10/2/2010	9:17:43 PM	PH3 valve closed
10/2/2010	9:17:43 PM	SiCl4 pre valve closed
10/2/2010	9:17:43 PM	SiCl4 post valve closed
10/2/2010	9:17:43 PM	Main Vac valve closed
10/2/2010	9:17:43 PM	Bubbler valve closed
10/2/2010	9:17:43 PM	Bypass valve opened
10/2/2010	9:17:43 PM	Helium MFC set to  0.000000
10/2/2010	9:17:43 PM	H2 MFC set to  0.000000
10/2/2010	9:17:43 PM	BCl3 MFC set to  0.000000
10/2/2010	9:17:43 PM	PHl3 MFC set to  0.000000
10/2/2010	9:17:43 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:17:43 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	9:17:43 PM	Tube furnace set to 0
10/2/2010	9:18:08 PM	Helium valve closed
10/2/2010	9:18:08 PM	H2 valve closed
10/2/2010	9:18:08 PM	BCl3 valve closed
10/2/2010	9:18:08 PM	PH3 valve closed
10/2/2010	9:18:08 PM	SiCl4 pre valve closed
10/2/2010	9:18:08 PM	SiCl4 post valve closed
10/2/2010	9:18:08 PM	Bubbler valve closed
10/2/2010	9:18:08 PM	Main Vac valve opened
10/2/2010	9:18:08 PM	Bypass valve opened
10/2/2010	9:18:08 PM	Helium MFC set to  0.000000
10/2/2010	9:18:08 PM	H2 MFC set to  0.000000
10/2/2010	9:18:08 PM	BCl3 MFC set to  0.000000
10/2/2010	9:18:08 PM	PHl3 MFC set to  0.000000
10/2/2010	9:18:08 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:18:08 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	9:18:08 PM	Tube furnace set to 0
10/2/2010	9:18:09 PM	Run finished at 9:18 PM
10/2/2010	9:18:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	9:18:15 PM	Main Vac valve closed
10/2/2010	9:18:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/2/2010	9:18:25 PM	Recipe started at 9:18 PM
10/2/2010	9:18:25 PM	H2 valve closed
10/2/2010	9:18:25 PM	BCl3 valve closed
10/2/2010	9:18:25 PM	PH3 valve closed
10/2/2010	9:18:25 PM	SiCl4 pre valve closed
10/2/2010	9:18:25 PM	SiCl4 post valve closed
10/2/2010	9:18:25 PM	Main Vac valve closed
10/2/2010	9:18:25 PM	Bypass valve closed
10/2/2010	9:18:25 PM	Bubbler valve closed
10/2/2010	9:18:25 PM	Helium valve opened
10/2/2010	9:18:25 PM	Helium MFC set to  500.000000
10/2/2010	9:18:25 PM	H2 MFC set to  0.000000
10/2/2010	9:18:25 PM	BCl3 MFC set to  0.000000
10/2/2010	9:18:25 PM	PHl3 MFC set to  0.000000
10/2/2010	9:18:25 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:18:25 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	9:18:25 PM	Tube furnace set to 0
10/2/2010	9:18:30 PM	Helium valve closed
10/2/2010	9:18:30 PM	H2 valve closed
10/2/2010	9:18:30 PM	BCl3 valve closed
10/2/2010	9:18:30 PM	PH3 valve closed
10/2/2010	9:18:30 PM	SiCl4 pre valve closed
10/2/2010	9:18:30 PM	SiCl4 post valve closed
10/2/2010	9:18:30 PM	Main Vac valve closed
10/2/2010	9:18:30 PM	Bypass valve closed
10/2/2010	9:18:30 PM	Bubbler valve closed
10/2/2010	9:18:30 PM	Helium MFC set to  0.000000
10/2/2010	9:18:30 PM	H2 MFC set to  0.000000
10/2/2010	9:18:30 PM	BCl3 MFC set to  0.000000
10/2/2010	9:18:30 PM	PHl3 MFC set to  0.000000
10/2/2010	9:18:30 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:18:30 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	9:18:30 PM	Tube furnace set to 0
10/2/2010	9:18:30 PM	Run finished at 9:18 PM
10/2/2010	9:18:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/2/2010	9:20:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	9:20:56 PM	Recipe started at 9:20 PM
10/2/2010	9:20:56 PM	Helium valve closed
10/2/2010	9:20:56 PM	H2 valve closed
10/2/2010	9:20:56 PM	BCl3 valve closed
10/2/2010	9:20:56 PM	PH3 valve closed
10/2/2010	9:20:57 PM	SiCl4 pre valve closed
10/2/2010	9:20:57 PM	SiCl4 post valve closed
10/2/2010	9:20:57 PM	Main Vac valve closed
10/2/2010	9:20:57 PM	Bubbler valve closed
10/2/2010	9:20:57 PM	Bypass valve opened
10/2/2010	9:20:57 PM	Helium MFC set to  0.000000
10/2/2010	9:20:57 PM	H2 MFC set to  0.000000
10/2/2010	9:20:57 PM	BCl3 MFC set to  0.000000
10/2/2010	9:20:57 PM	PHl3 MFC set to  0.000000
10/2/2010	9:20:57 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:20:57 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	9:20:57 PM	Tube furnace set to 0
10/2/2010	9:21:18 PM	Run aborted at 9:21 PM
10/2/2010	9:21:18 PM	Helium valve closed
10/2/2010	9:21:18 PM	H2 valve closed
10/2/2010	9:21:18 PM	BCl3 valve closed
10/2/2010	9:21:18 PM	PH3 valve closed
10/2/2010	9:21:18 PM	SiCl4 pre valve closed
10/2/2010	9:21:18 PM	SiCl4 post valve closed
10/2/2010	9:21:18 PM	Bypass valve closed
10/2/2010	9:21:18 PM	Main Vac valve closed
10/2/2010	9:21:18 PM	Bubbler valve closed
10/2/2010	9:21:18 PM	Helium MFC set to  0.000000
10/2/2010	9:21:18 PM	H2 MFC set to  0.000000
10/2/2010	9:21:18 PM	BCl3 MFC set to  0.000000
10/2/2010	9:21:18 PM	PHl3 MFC set to  0.000000
10/2/2010	9:21:18 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:21:18 PM	Tube furnace set to 0
10/2/2010	9:21:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	9:21:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/2/2010	9:21:19 PM	Recipe started at 9:21 PM
10/2/2010	9:21:19 PM	H2 valve closed
10/2/2010	9:21:19 PM	BCl3 valve closed
10/2/2010	9:21:19 PM	PH3 valve closed
10/2/2010	9:21:19 PM	SiCl4 pre valve closed
10/2/2010	9:21:19 PM	SiCl4 post valve closed
10/2/2010	9:21:19 PM	Main Vac valve closed
10/2/2010	9:21:19 PM	Bypass valve closed
10/2/2010	9:21:19 PM	Bubbler valve closed
10/2/2010	9:21:19 PM	Helium valve opened
10/2/2010	9:21:19 PM	Helium MFC set to  500.000000
10/2/2010	9:21:19 PM	H2 MFC set to  0.000000
10/2/2010	9:21:19 PM	BCl3 MFC set to  0.000000
10/2/2010	9:21:19 PM	PHl3 MFC set to  0.000000
10/2/2010	9:21:19 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:21:19 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	9:21:19 PM	Tube furnace set to 0
10/2/2010	9:21:21 PM	Helium valve closed
10/2/2010	9:21:21 PM	H2 valve closed
10/2/2010	9:21:21 PM	BCl3 valve closed
10/2/2010	9:21:21 PM	PH3 valve closed
10/2/2010	9:21:21 PM	SiCl4 pre valve closed
10/2/2010	9:21:22 PM	SiCl4 post valve closed
10/2/2010	9:21:22 PM	Main Vac valve closed
10/2/2010	9:21:22 PM	Bypass valve closed
10/2/2010	9:21:22 PM	Bubbler valve closed
10/2/2010	9:21:22 PM	Helium MFC set to  0.000000
10/2/2010	9:21:22 PM	H2 MFC set to  0.000000
10/2/2010	9:21:22 PM	BCl3 MFC set to  0.000000
10/2/2010	9:21:22 PM	PHl3 MFC set to  0.000000
10/2/2010	9:21:22 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:21:22 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	9:21:22 PM	Tube furnace set to 0
10/2/2010	9:21:22 PM	Run finished at 9:21 PM
10/2/2010	9:21:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/2/2010	9:28:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	9:28:09 PM	Recipe started at 9:28 PM
10/2/2010	9:28:09 PM	Helium valve closed
10/2/2010	9:28:09 PM	H2 valve closed
10/2/2010	9:28:09 PM	BCl3 valve closed
10/2/2010	9:28:09 PM	PH3 valve closed
10/2/2010	9:28:09 PM	SiCl4 pre valve closed
10/2/2010	9:28:09 PM	SiCl4 post valve closed
10/2/2010	9:28:09 PM	Main Vac valve closed
10/2/2010	9:28:09 PM	Bubbler valve closed
10/2/2010	9:28:09 PM	Bypass valve opened
10/2/2010	9:28:09 PM	Helium MFC set to  0.000000
10/2/2010	9:28:09 PM	H2 MFC set to  0.000000
10/2/2010	9:28:09 PM	BCl3 MFC set to  0.000000
10/2/2010	9:28:09 PM	PHl3 MFC set to  0.000000
10/2/2010	9:28:09 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:28:09 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	9:28:09 PM	Tube furnace set to 0
10/2/2010	9:29:13 PM	Helium valve closed
10/2/2010	9:29:13 PM	H2 valve closed
10/2/2010	9:29:13 PM	BCl3 valve closed
10/2/2010	9:29:13 PM	PH3 valve closed
10/2/2010	9:29:13 PM	SiCl4 pre valve closed
10/2/2010	9:29:13 PM	SiCl4 post valve closed
10/2/2010	9:29:13 PM	Bubbler valve closed
10/2/2010	9:29:13 PM	Main Vac valve opened
10/2/2010	9:29:13 PM	Bypass valve opened
10/2/2010	9:29:13 PM	Helium MFC set to  0.000000
10/2/2010	9:29:13 PM	H2 MFC set to  0.000000
10/2/2010	9:29:13 PM	BCl3 MFC set to  0.000000
10/2/2010	9:29:13 PM	PHl3 MFC set to  0.000000
10/2/2010	9:29:13 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:29:13 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	9:29:13 PM	Tube furnace set to 0
10/2/2010	9:29:13 PM	Run finished at 9:29 PM
10/2/2010	9:29:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	9:29:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/2/2010	9:29:41 PM	Recipe started at 9:29 PM
10/2/2010	9:29:41 PM	Helium valve closed
10/2/2010	9:29:41 PM	H2 valve closed
10/2/2010	9:29:41 PM	BCl3 valve closed
10/2/2010	9:29:41 PM	PH3 valve closed
10/2/2010	9:29:41 PM	SiCl4 pre valve closed
10/2/2010	9:29:41 PM	SiCl4 post valve closed
10/2/2010	9:29:41 PM	Main Vac valve closed
10/2/2010	9:29:41 PM	Bubbler valve closed
10/2/2010	9:29:41 PM	Bypass valve opened
10/2/2010	9:29:41 PM	Helium MFC set to  0.000000
10/2/2010	9:29:41 PM	H2 MFC set to  0.000000
10/2/2010	9:29:41 PM	BCl3 MFC set to  0.000000
10/2/2010	9:29:41 PM	PHl3 MFC set to  0.000000
10/2/2010	9:29:41 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:29:41 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	9:29:42 PM	Tube furnace set to 0
10/2/2010	9:29:42 PM	Helium valve closed
10/2/2010	9:29:42 PM	H2 valve closed
10/2/2010	9:29:42 PM	BCl3 valve closed
10/2/2010	9:29:42 PM	PH3 valve closed
10/2/2010	9:29:42 PM	SiCl4 pre valve closed
10/2/2010	9:29:42 PM	SiCl4 post valve closed
10/2/2010	9:29:42 PM	Bubbler valve closed
10/2/2010	9:29:42 PM	Main Vac valve opened
10/2/2010	9:29:42 PM	Bypass valve opened
10/2/2010	9:29:42 PM	Helium MFC set to  0.000000
10/2/2010	9:29:42 PM	H2 MFC set to  0.000000
10/2/2010	9:29:42 PM	BCl3 MFC set to  0.000000
10/2/2010	9:29:42 PM	PHl3 MFC set to  0.000000
10/2/2010	9:29:42 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:29:42 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	9:29:42 PM	Tube furnace set to 0
10/2/2010	9:30:42 PM	H2 valve closed
10/2/2010	9:30:42 PM	BCl3 valve closed
10/2/2010	9:30:42 PM	PH3 valve closed
10/2/2010	9:30:42 PM	SiCl4 pre valve closed
10/2/2010	9:30:42 PM	SiCl4 post valve closed
10/2/2010	9:30:42 PM	Bubbler valve closed
10/2/2010	9:30:42 PM	Helium valve opened
10/2/2010	9:30:42 PM	Main Vac valve opened
10/2/2010	9:30:42 PM	Bypass valve opened
10/2/2010	9:30:42 PM	Helium MFC set to  100.000000
10/2/2010	9:30:42 PM	H2 MFC set to  0.000000
10/2/2010	9:30:42 PM	BCl3 MFC set to  0.000000
10/2/2010	9:30:42 PM	PHl3 MFC set to  0.000000
10/2/2010	9:30:42 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:30:42 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	9:30:42 PM	Tube furnace set to 0
10/2/2010	9:31:42 PM	Helium valve closed
10/2/2010	9:31:42 PM	H2 valve closed
10/2/2010	9:31:42 PM	BCl3 valve closed
10/2/2010	9:31:42 PM	PH3 valve closed
10/2/2010	9:31:42 PM	SiCl4 pre valve closed
10/2/2010	9:31:42 PM	SiCl4 post valve closed
10/2/2010	9:31:42 PM	Bubbler valve closed
10/2/2010	9:31:42 PM	Main Vac valve opened
10/2/2010	9:31:42 PM	Bypass valve opened
10/2/2010	9:31:42 PM	Helium MFC set to  0.000000
10/2/2010	9:31:42 PM	H2 MFC set to  0.000000
10/2/2010	9:31:42 PM	BCl3 MFC set to  0.000000
10/2/2010	9:31:42 PM	PHl3 MFC set to  0.000000
10/2/2010	9:31:42 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:31:42 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	9:31:42 PM	Tube furnace set to 0
10/2/2010	9:32:42 PM	H2 valve closed
10/2/2010	9:32:42 PM	BCl3 valve closed
10/2/2010	9:32:42 PM	PH3 valve closed
10/2/2010	9:32:42 PM	SiCl4 pre valve closed
10/2/2010	9:32:42 PM	SiCl4 post valve closed
10/2/2010	9:32:42 PM	Bubbler valve closed
10/2/2010	9:32:42 PM	Helium valve opened
10/2/2010	9:32:42 PM	Main Vac valve opened
10/2/2010	9:32:42 PM	Bypass valve opened
10/2/2010	9:32:42 PM	Helium MFC set to  100.000000
10/2/2010	9:32:42 PM	H2 MFC set to  0.000000
10/2/2010	9:32:42 PM	BCl3 MFC set to  0.000000
10/2/2010	9:32:42 PM	PHl3 MFC set to  0.000000
10/2/2010	9:32:42 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:32:42 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	9:32:43 PM	Tube furnace set to 0
10/2/2010	9:33:43 PM	Helium valve closed
10/2/2010	9:33:43 PM	H2 valve closed
10/2/2010	9:33:43 PM	BCl3 valve closed
10/2/2010	9:33:43 PM	PH3 valve closed
10/2/2010	9:33:43 PM	SiCl4 pre valve closed
10/2/2010	9:33:43 PM	SiCl4 post valve closed
10/2/2010	9:33:43 PM	Bubbler valve closed
10/2/2010	9:33:43 PM	Main Vac valve opened
10/2/2010	9:33:43 PM	Bypass valve opened
10/2/2010	9:33:43 PM	Helium MFC set to  0.000000
10/2/2010	9:33:43 PM	H2 MFC set to  0.000000
10/2/2010	9:33:43 PM	BCl3 MFC set to  0.000000
10/2/2010	9:33:43 PM	PHl3 MFC set to  0.000000
10/2/2010	9:33:43 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:33:43 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	9:33:43 PM	Tube furnace set to 0
10/2/2010	9:34:43 PM	H2 valve closed
10/2/2010	9:34:43 PM	BCl3 valve closed
10/2/2010	9:34:43 PM	PH3 valve closed
10/2/2010	9:34:43 PM	SiCl4 pre valve closed
10/2/2010	9:34:43 PM	SiCl4 post valve closed
10/2/2010	9:34:43 PM	Bubbler valve closed
10/2/2010	9:34:43 PM	Helium valve opened
10/2/2010	9:34:43 PM	Main Vac valve opened
10/2/2010	9:34:43 PM	Bypass valve opened
10/2/2010	9:34:43 PM	Helium MFC set to  100.000000
10/2/2010	9:34:43 PM	H2 MFC set to  0.000000
10/2/2010	9:34:43 PM	BCl3 MFC set to  0.000000
10/2/2010	9:34:43 PM	PHl3 MFC set to  0.000000
10/2/2010	9:34:43 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:34:43 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	9:34:43 PM	Tube furnace set to 0
10/2/2010	9:35:43 PM	Helium valve closed
10/2/2010	9:35:43 PM	H2 valve closed
10/2/2010	9:35:43 PM	BCl3 valve closed
10/2/2010	9:35:43 PM	PH3 valve closed
10/2/2010	9:35:43 PM	SiCl4 pre valve closed
10/2/2010	9:35:43 PM	SiCl4 post valve closed
10/2/2010	9:35:43 PM	Bubbler valve closed
10/2/2010	9:35:43 PM	Main Vac valve opened
10/2/2010	9:35:43 PM	Bypass valve opened
10/2/2010	9:35:43 PM	Helium MFC set to  0.000000
10/2/2010	9:35:43 PM	H2 MFC set to  0.000000
10/2/2010	9:35:43 PM	BCl3 MFC set to  0.000000
10/2/2010	9:35:43 PM	PHl3 MFC set to  0.000000
10/2/2010	9:35:43 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:35:43 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	9:35:43 PM	Tube furnace set to 0
10/2/2010	9:36:43 PM	H2 valve closed
10/2/2010	9:36:43 PM	BCl3 valve closed
10/2/2010	9:36:43 PM	PH3 valve closed
10/2/2010	9:36:43 PM	SiCl4 pre valve closed
10/2/2010	9:36:43 PM	SiCl4 post valve closed
10/2/2010	9:36:43 PM	Bubbler valve closed
10/2/2010	9:36:43 PM	Helium valve opened
10/2/2010	9:36:43 PM	Main Vac valve opened
10/2/2010	9:36:43 PM	Bypass valve opened
10/2/2010	9:36:43 PM	Helium MFC set to  100.000000
10/2/2010	9:36:43 PM	H2 MFC set to  0.000000
10/2/2010	9:36:43 PM	BCl3 MFC set to  0.000000
10/2/2010	9:36:43 PM	PHl3 MFC set to  0.000000
10/2/2010	9:36:43 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:36:43 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	9:36:43 PM	Tube furnace set to 0
10/2/2010	9:37:43 PM	Helium valve closed
10/2/2010	9:37:43 PM	H2 valve closed
10/2/2010	9:37:43 PM	BCl3 valve closed
10/2/2010	9:37:43 PM	PH3 valve closed
10/2/2010	9:37:43 PM	SiCl4 pre valve closed
10/2/2010	9:37:43 PM	SiCl4 post valve closed
10/2/2010	9:37:43 PM	Bubbler valve closed
10/2/2010	9:37:43 PM	Main Vac valve opened
10/2/2010	9:37:43 PM	Bypass valve opened
10/2/2010	9:37:43 PM	Helium MFC set to  0.000000
10/2/2010	9:37:43 PM	H2 MFC set to  0.000000
10/2/2010	9:37:43 PM	BCl3 MFC set to  0.000000
10/2/2010	9:37:43 PM	PHl3 MFC set to  0.000000
10/2/2010	9:37:43 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:37:43 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	9:37:44 PM	Tube furnace set to 0
10/2/2010	9:38:44 PM	H2 valve closed
10/2/2010	9:38:44 PM	BCl3 valve closed
10/2/2010	9:38:44 PM	PH3 valve closed
10/2/2010	9:38:44 PM	SiCl4 pre valve closed
10/2/2010	9:38:44 PM	SiCl4 post valve closed
10/2/2010	9:38:44 PM	Bubbler valve closed
10/2/2010	9:38:44 PM	Helium valve opened
10/2/2010	9:38:44 PM	Main Vac valve opened
10/2/2010	9:38:44 PM	Bypass valve opened
10/2/2010	9:38:44 PM	Helium MFC set to  100.000000
10/2/2010	9:38:44 PM	H2 MFC set to  0.000000
10/2/2010	9:38:44 PM	BCl3 MFC set to  0.000000
10/2/2010	9:38:44 PM	PHl3 MFC set to  0.000000
10/2/2010	9:38:44 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:38:44 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	9:38:44 PM	Tube furnace set to 0
10/2/2010	9:39:44 PM	Helium valve closed
10/2/2010	9:39:44 PM	H2 valve closed
10/2/2010	9:39:44 PM	BCl3 valve closed
10/2/2010	9:39:44 PM	PH3 valve closed
10/2/2010	9:39:44 PM	SiCl4 pre valve closed
10/2/2010	9:39:44 PM	SiCl4 post valve closed
10/2/2010	9:39:44 PM	Bubbler valve closed
10/2/2010	9:39:44 PM	Main Vac valve opened
10/2/2010	9:39:44 PM	Bypass valve opened
10/2/2010	9:39:44 PM	Helium MFC set to  0.000000
10/2/2010	9:39:44 PM	H2 MFC set to  0.000000
10/2/2010	9:39:44 PM	BCl3 MFC set to  0.000000
10/2/2010	9:39:44 PM	PHl3 MFC set to  0.000000
10/2/2010	9:39:44 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:39:44 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	9:39:44 PM	Tube furnace set to 0
10/2/2010	9:40:44 PM	H2 valve closed
10/2/2010	9:40:44 PM	BCl3 valve closed
10/2/2010	9:40:44 PM	PH3 valve closed
10/2/2010	9:40:44 PM	SiCl4 pre valve closed
10/2/2010	9:40:44 PM	SiCl4 post valve closed
10/2/2010	9:40:44 PM	Bubbler valve closed
10/2/2010	9:40:44 PM	Helium valve opened
10/2/2010	9:40:44 PM	Main Vac valve opened
10/2/2010	9:40:44 PM	Bypass valve opened
10/2/2010	9:40:44 PM	Helium MFC set to  100.000000
10/2/2010	9:40:44 PM	H2 MFC set to  0.000000
10/2/2010	9:40:44 PM	BCl3 MFC set to  0.000000
10/2/2010	9:40:44 PM	PHl3 MFC set to  0.000000
10/2/2010	9:40:44 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:40:44 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	9:40:44 PM	Tube furnace set to 0
10/2/2010	9:41:44 PM	Helium valve closed
10/2/2010	9:41:44 PM	H2 valve closed
10/2/2010	9:41:44 PM	BCl3 valve closed
10/2/2010	9:41:44 PM	PH3 valve closed
10/2/2010	9:41:44 PM	SiCl4 pre valve closed
10/2/2010	9:41:44 PM	SiCl4 post valve closed
10/2/2010	9:41:44 PM	Bubbler valve closed
10/2/2010	9:41:44 PM	Main Vac valve opened
10/2/2010	9:41:44 PM	Bypass valve opened
10/2/2010	9:41:44 PM	Helium MFC set to  0.000000
10/2/2010	9:41:44 PM	H2 MFC set to  0.000000
10/2/2010	9:41:44 PM	BCl3 MFC set to  0.000000
10/2/2010	9:41:44 PM	PHl3 MFC set to  0.000000
10/2/2010	9:41:44 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:41:44 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	9:41:44 PM	Tube furnace set to 0
10/2/2010	9:42:44 PM	H2 valve closed
10/2/2010	9:42:45 PM	BCl3 valve closed
10/2/2010	9:42:45 PM	PH3 valve closed
10/2/2010	9:42:45 PM	SiCl4 pre valve closed
10/2/2010	9:42:45 PM	SiCl4 post valve closed
10/2/2010	9:42:45 PM	Bubbler valve closed
10/2/2010	9:42:45 PM	Helium valve opened
10/2/2010	9:42:45 PM	Main Vac valve opened
10/2/2010	9:42:45 PM	Bypass valve opened
10/2/2010	9:42:45 PM	Helium MFC set to  100.000000
10/2/2010	9:42:45 PM	H2 MFC set to  0.000000
10/2/2010	9:42:45 PM	BCl3 MFC set to  0.000000
10/2/2010	9:42:45 PM	PHl3 MFC set to  0.000000
10/2/2010	9:42:45 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:42:45 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	9:42:45 PM	Tube furnace set to 0
10/2/2010	9:43:45 PM	Helium valve closed
10/2/2010	9:43:45 PM	H2 valve closed
10/2/2010	9:43:45 PM	BCl3 valve closed
10/2/2010	9:43:45 PM	PH3 valve closed
10/2/2010	9:43:45 PM	SiCl4 pre valve closed
10/2/2010	9:43:45 PM	SiCl4 post valve closed
10/2/2010	9:43:45 PM	Bubbler valve closed
10/2/2010	9:43:45 PM	Main Vac valve opened
10/2/2010	9:43:45 PM	Bypass valve opened
10/2/2010	9:43:45 PM	Helium MFC set to  0.000000
10/2/2010	9:43:45 PM	H2 MFC set to  0.000000
10/2/2010	9:43:45 PM	BCl3 MFC set to  0.000000
10/2/2010	9:43:45 PM	PHl3 MFC set to  0.000000
10/2/2010	9:43:45 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:43:45 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	9:43:45 PM	Tube furnace set to 0
10/2/2010	9:44:45 PM	H2 valve closed
10/2/2010	9:44:45 PM	BCl3 valve closed
10/2/2010	9:44:45 PM	PH3 valve closed
10/2/2010	9:44:45 PM	SiCl4 pre valve closed
10/2/2010	9:44:45 PM	SiCl4 post valve closed
10/2/2010	9:44:45 PM	Bubbler valve closed
10/2/2010	9:44:45 PM	Helium valve opened
10/2/2010	9:44:45 PM	Main Vac valve opened
10/2/2010	9:44:45 PM	Bypass valve opened
10/2/2010	9:44:45 PM	Helium MFC set to  100.000000
10/2/2010	9:44:45 PM	H2 MFC set to  0.000000
10/2/2010	9:44:45 PM	BCl3 MFC set to  0.000000
10/2/2010	9:44:45 PM	PHl3 MFC set to  0.000000
10/2/2010	9:44:45 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:44:45 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	9:44:45 PM	Tube furnace set to 0
10/2/2010	9:45:45 PM	Helium valve closed
10/2/2010	9:45:45 PM	H2 valve closed
10/2/2010	9:45:45 PM	BCl3 valve closed
10/2/2010	9:45:45 PM	PH3 valve closed
10/2/2010	9:45:45 PM	SiCl4 pre valve closed
10/2/2010	9:45:45 PM	SiCl4 post valve closed
10/2/2010	9:45:45 PM	Bubbler valve closed
10/2/2010	9:45:45 PM	Main Vac valve opened
10/2/2010	9:45:45 PM	Bypass valve opened
10/2/2010	9:45:45 PM	Helium MFC set to  0.000000
10/2/2010	9:45:45 PM	H2 MFC set to  0.000000
10/2/2010	9:45:45 PM	BCl3 MFC set to  0.000000
10/2/2010	9:45:45 PM	PHl3 MFC set to  0.000000
10/2/2010	9:45:45 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:45:45 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	9:45:45 PM	Tube furnace set to 0
10/2/2010	9:46:45 PM	H2 valve closed
10/2/2010	9:46:45 PM	BCl3 valve closed
10/2/2010	9:46:45 PM	PH3 valve closed
10/2/2010	9:46:45 PM	SiCl4 pre valve closed
10/2/2010	9:46:45 PM	SiCl4 post valve closed
10/2/2010	9:46:45 PM	Bubbler valve closed
10/2/2010	9:46:45 PM	Helium valve opened
10/2/2010	9:46:45 PM	Main Vac valve opened
10/2/2010	9:46:45 PM	Bypass valve opened
10/2/2010	9:46:45 PM	Helium MFC set to  100.000000
10/2/2010	9:46:45 PM	H2 MFC set to  0.000000
10/2/2010	9:46:45 PM	BCl3 MFC set to  0.000000
10/2/2010	9:46:45 PM	PHl3 MFC set to  0.000000
10/2/2010	9:46:45 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:46:45 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	9:46:46 PM	Tube furnace set to 0
10/2/2010	9:47:46 PM	Helium valve closed
10/2/2010	9:47:46 PM	H2 valve closed
10/2/2010	9:47:46 PM	BCl3 valve closed
10/2/2010	9:47:46 PM	PH3 valve closed
10/2/2010	9:47:46 PM	SiCl4 pre valve closed
10/2/2010	9:47:46 PM	SiCl4 post valve closed
10/2/2010	9:47:46 PM	Bubbler valve closed
10/2/2010	9:47:46 PM	Main Vac valve opened
10/2/2010	9:47:46 PM	Bypass valve opened
10/2/2010	9:47:46 PM	Helium MFC set to  0.000000
10/2/2010	9:47:46 PM	H2 MFC set to  0.000000
10/2/2010	9:47:46 PM	BCl3 MFC set to  0.000000
10/2/2010	9:47:46 PM	PHl3 MFC set to  0.000000
10/2/2010	9:47:46 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:47:46 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	9:47:46 PM	Tube furnace set to 0
10/2/2010	9:48:46 PM	H2 valve closed
10/2/2010	9:48:46 PM	BCl3 valve closed
10/2/2010	9:48:46 PM	PH3 valve closed
10/2/2010	9:48:46 PM	SiCl4 pre valve closed
10/2/2010	9:48:46 PM	SiCl4 post valve closed
10/2/2010	9:48:46 PM	Bubbler valve closed
10/2/2010	9:48:46 PM	Helium valve opened
10/2/2010	9:48:46 PM	Main Vac valve opened
10/2/2010	9:48:46 PM	Bypass valve opened
10/2/2010	9:48:46 PM	Helium MFC set to  100.000000
10/2/2010	9:48:46 PM	H2 MFC set to  0.000000
10/2/2010	9:48:46 PM	BCl3 MFC set to  0.000000
10/2/2010	9:48:46 PM	PHl3 MFC set to  0.000000
10/2/2010	9:48:46 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:48:46 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	9:48:46 PM	Tube furnace set to 0
10/2/2010	9:49:46 PM	Helium valve closed
10/2/2010	9:49:46 PM	H2 valve closed
10/2/2010	9:49:46 PM	BCl3 valve closed
10/2/2010	9:49:46 PM	PH3 valve closed
10/2/2010	9:49:46 PM	SiCl4 pre valve closed
10/2/2010	9:49:46 PM	SiCl4 post valve closed
10/2/2010	9:49:46 PM	Bubbler valve closed
10/2/2010	9:49:46 PM	Main Vac valve opened
10/2/2010	9:49:46 PM	Bypass valve opened
10/2/2010	9:49:46 PM	Helium MFC set to  0.000000
10/2/2010	9:49:46 PM	H2 MFC set to  0.000000
10/2/2010	9:49:46 PM	BCl3 MFC set to  0.000000
10/2/2010	9:49:46 PM	PHl3 MFC set to  0.000000
10/2/2010	9:49:46 PM	SiCl4 MFC set to  0.000000
10/2/2010	9:49:46 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	9:49:46 PM	Tube furnace set to 0
10/2/2010	9:49:47 PM	Run finished at 9:49 PM
10/2/2010	9:49:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/2/2010	10:20:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/2/2010	10:20:37 PM	Recipe started at 10:20 PM
10/2/2010	10:20:37 PM	H2 valve closed
10/2/2010	10:20:37 PM	BCl3 valve closed
10/2/2010	10:20:37 PM	PH3 valve closed
10/2/2010	10:20:37 PM	SiCl4 pre valve closed
10/2/2010	10:20:37 PM	SiCl4 post valve closed
10/2/2010	10:20:37 PM	Main Vac valve closed
10/2/2010	10:20:37 PM	Bypass valve closed
10/2/2010	10:20:37 PM	Bubbler valve closed
10/2/2010	10:20:37 PM	Helium valve opened
10/2/2010	10:20:37 PM	Helium MFC set to  500.000000
10/2/2010	10:20:37 PM	H2 MFC set to  0.000000
10/2/2010	10:20:37 PM	BCl3 MFC set to  0.000000
10/2/2010	10:20:37 PM	PHl3 MFC set to  0.000000
10/2/2010	10:20:37 PM	SiCl4 MFC set to  0.000000
10/2/2010	10:20:37 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	10:20:38 PM	Tube furnace set to 0
10/2/2010	10:20:56 PM	Helium valve closed
10/2/2010	10:20:56 PM	H2 valve closed
10/2/2010	10:20:56 PM	BCl3 valve closed
10/2/2010	10:20:56 PM	PH3 valve closed
10/2/2010	10:20:56 PM	SiCl4 pre valve closed
10/2/2010	10:20:56 PM	SiCl4 post valve closed
10/2/2010	10:20:56 PM	Main Vac valve closed
10/2/2010	10:20:56 PM	Bypass valve closed
10/2/2010	10:20:56 PM	Bubbler valve closed
10/2/2010	10:20:56 PM	Helium MFC set to  0.000000
10/2/2010	10:20:56 PM	H2 MFC set to  0.000000
10/2/2010	10:20:56 PM	BCl3 MFC set to  0.000000
10/2/2010	10:20:56 PM	PHl3 MFC set to  0.000000
10/2/2010	10:20:56 PM	SiCl4 MFC set to  0.000000
10/2/2010	10:20:56 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	10:20:57 PM	Tube furnace set to 0
10/2/2010	10:20:57 PM	Run finished at 10:20 PM
10/2/2010	10:20:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/2/2010	10:26:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	10:26:49 PM	Recipe started at 10:26 PM
10/2/2010	10:26:49 PM	Helium valve closed
10/2/2010	10:26:49 PM	H2 valve closed
10/2/2010	10:26:49 PM	BCl3 valve closed
10/2/2010	10:26:49 PM	PH3 valve closed
10/2/2010	10:26:49 PM	SiCl4 pre valve closed
10/2/2010	10:26:49 PM	SiCl4 post valve closed
10/2/2010	10:26:49 PM	Main Vac valve closed
10/2/2010	10:26:49 PM	Bubbler valve closed
10/2/2010	10:26:49 PM	Bypass valve opened
10/2/2010	10:26:49 PM	Helium MFC set to  0.000000
10/2/2010	10:26:49 PM	H2 MFC set to  0.000000
10/2/2010	10:26:49 PM	BCl3 MFC set to  0.000000
10/2/2010	10:26:49 PM	PHl3 MFC set to  0.000000
10/2/2010	10:26:49 PM	SiCl4 MFC set to  0.000000
10/2/2010	10:26:49 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	10:26:49 PM	Tube furnace set to 0
10/2/2010	10:27:45 PM	Helium valve closed
10/2/2010	10:27:45 PM	H2 valve closed
10/2/2010	10:27:45 PM	BCl3 valve closed
10/2/2010	10:27:45 PM	PH3 valve closed
10/2/2010	10:27:45 PM	SiCl4 pre valve closed
10/2/2010	10:27:45 PM	SiCl4 post valve closed
10/2/2010	10:27:45 PM	Bubbler valve closed
10/2/2010	10:27:45 PM	Main Vac valve opened
10/2/2010	10:27:45 PM	Bypass valve opened
10/2/2010	10:27:46 PM	Helium MFC set to  0.000000
10/2/2010	10:27:46 PM	H2 MFC set to  0.000000
10/2/2010	10:27:46 PM	BCl3 MFC set to  0.000000
10/2/2010	10:27:46 PM	PHl3 MFC set to  0.000000
10/2/2010	10:27:46 PM	SiCl4 MFC set to  0.000000
10/2/2010	10:27:46 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	10:27:46 PM	Tube furnace set to 0
10/2/2010	10:27:46 PM	Run finished at 10:27 PM
10/2/2010	10:27:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/2/2010	10:42:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/2/2010	10:43:01 PM	Recipe started at 10:42 PM
10/2/2010	10:43:01 PM	Helium valve closed
10/2/2010	10:43:01 PM	H2 valve closed
10/2/2010	10:43:01 PM	BCl3 valve closed
10/2/2010	10:43:01 PM	PH3 valve closed
10/2/2010	10:43:01 PM	SiCl4 pre valve closed
10/2/2010	10:43:01 PM	SiCl4 post valve closed
10/2/2010	10:43:01 PM	Main Vac valve closed
10/2/2010	10:43:01 PM	Bubbler valve closed
10/2/2010	10:43:01 PM	Bypass valve opened
10/2/2010	10:43:01 PM	Helium MFC set to  0.000000
10/2/2010	10:43:01 PM	H2 MFC set to  0.000000
10/2/2010	10:43:01 PM	BCl3 MFC set to  0.000000
10/2/2010	10:43:01 PM	PHl3 MFC set to  0.000000
10/2/2010	10:43:01 PM	SiCl4 MFC set to  0.000000
10/2/2010	10:43:01 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	10:43:01 PM	Tube furnace set to 0
10/2/2010	10:43:01 PM	Helium valve closed
10/2/2010	10:43:01 PM	H2 valve closed
10/2/2010	10:43:01 PM	BCl3 valve closed
10/2/2010	10:43:01 PM	PH3 valve closed
10/2/2010	10:43:01 PM	SiCl4 pre valve closed
10/2/2010	10:43:01 PM	SiCl4 post valve closed
10/2/2010	10:43:01 PM	Bubbler valve closed
10/2/2010	10:43:01 PM	Main Vac valve opened
10/2/2010	10:43:01 PM	Bypass valve opened
10/2/2010	10:43:01 PM	Helium MFC set to  0.000000
10/2/2010	10:43:01 PM	H2 MFC set to  0.000000
10/2/2010	10:43:01 PM	BCl3 MFC set to  0.000000
10/2/2010	10:43:01 PM	PHl3 MFC set to  0.000000
10/2/2010	10:43:01 PM	SiCl4 MFC set to  0.000000
10/2/2010	10:43:01 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	10:43:01 PM	Tube furnace set to 0
10/2/2010	10:44:01 PM	H2 valve closed
10/2/2010	10:44:01 PM	BCl3 valve closed
10/2/2010	10:44:01 PM	PH3 valve closed
10/2/2010	10:44:01 PM	SiCl4 pre valve closed
10/2/2010	10:44:01 PM	SiCl4 post valve closed
10/2/2010	10:44:01 PM	Bubbler valve closed
10/2/2010	10:44:01 PM	Helium valve opened
10/2/2010	10:44:01 PM	Main Vac valve opened
10/2/2010	10:44:01 PM	Bypass valve opened
10/2/2010	10:44:01 PM	Helium MFC set to  100.000000
10/2/2010	10:44:01 PM	H2 MFC set to  0.000000
10/2/2010	10:44:01 PM	BCl3 MFC set to  0.000000
10/2/2010	10:44:01 PM	PHl3 MFC set to  0.000000
10/2/2010	10:44:01 PM	SiCl4 MFC set to  0.000000
10/2/2010	10:44:01 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	10:44:02 PM	Tube furnace set to 0
10/2/2010	10:45:02 PM	Helium valve closed
10/2/2010	10:45:02 PM	H2 valve closed
10/2/2010	10:45:02 PM	BCl3 valve closed
10/2/2010	10:45:02 PM	PH3 valve closed
10/2/2010	10:45:02 PM	SiCl4 pre valve closed
10/2/2010	10:45:02 PM	SiCl4 post valve closed
10/2/2010	10:45:02 PM	Bubbler valve closed
10/2/2010	10:45:02 PM	Main Vac valve opened
10/2/2010	10:45:02 PM	Bypass valve opened
10/2/2010	10:45:02 PM	Helium MFC set to  0.000000
10/2/2010	10:45:02 PM	H2 MFC set to  0.000000
10/2/2010	10:45:02 PM	BCl3 MFC set to  0.000000
10/2/2010	10:45:02 PM	PHl3 MFC set to  0.000000
10/2/2010	10:45:02 PM	SiCl4 MFC set to  0.000000
10/2/2010	10:45:02 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	10:45:02 PM	Tube furnace set to 0
10/2/2010	10:46:02 PM	H2 valve closed
10/2/2010	10:46:02 PM	BCl3 valve closed
10/2/2010	10:46:02 PM	PH3 valve closed
10/2/2010	10:46:02 PM	SiCl4 pre valve closed
10/2/2010	10:46:02 PM	SiCl4 post valve closed
10/2/2010	10:46:02 PM	Bubbler valve closed
10/2/2010	10:46:02 PM	Helium valve opened
10/2/2010	10:46:02 PM	Main Vac valve opened
10/2/2010	10:46:02 PM	Bypass valve opened
10/2/2010	10:46:02 PM	Helium MFC set to  100.000000
10/2/2010	10:46:02 PM	H2 MFC set to  0.000000
10/2/2010	10:46:02 PM	BCl3 MFC set to  0.000000
10/2/2010	10:46:02 PM	PHl3 MFC set to  0.000000
10/2/2010	10:46:02 PM	SiCl4 MFC set to  0.000000
10/2/2010	10:46:02 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	10:46:02 PM	Tube furnace set to 0
10/2/2010	10:47:02 PM	Helium valve closed
10/2/2010	10:47:02 PM	H2 valve closed
10/2/2010	10:47:02 PM	BCl3 valve closed
10/2/2010	10:47:02 PM	PH3 valve closed
10/2/2010	10:47:02 PM	SiCl4 pre valve closed
10/2/2010	10:47:02 PM	SiCl4 post valve closed
10/2/2010	10:47:02 PM	Bubbler valve closed
10/2/2010	10:47:02 PM	Main Vac valve opened
10/2/2010	10:47:02 PM	Bypass valve opened
10/2/2010	10:47:02 PM	Helium MFC set to  0.000000
10/2/2010	10:47:02 PM	H2 MFC set to  0.000000
10/2/2010	10:47:02 PM	BCl3 MFC set to  0.000000
10/2/2010	10:47:02 PM	PHl3 MFC set to  0.000000
10/2/2010	10:47:02 PM	SiCl4 MFC set to  0.000000
10/2/2010	10:47:02 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	10:47:02 PM	Tube furnace set to 0
10/2/2010	10:48:02 PM	H2 valve closed
10/2/2010	10:48:02 PM	BCl3 valve closed
10/2/2010	10:48:02 PM	PH3 valve closed
10/2/2010	10:48:02 PM	SiCl4 pre valve closed
10/2/2010	10:48:02 PM	SiCl4 post valve closed
10/2/2010	10:48:02 PM	Bubbler valve closed
10/2/2010	10:48:02 PM	Helium valve opened
10/2/2010	10:48:02 PM	Main Vac valve opened
10/2/2010	10:48:02 PM	Bypass valve opened
10/2/2010	10:48:02 PM	Helium MFC set to  100.000000
10/2/2010	10:48:02 PM	H2 MFC set to  0.000000
10/2/2010	10:48:02 PM	BCl3 MFC set to  0.000000
10/2/2010	10:48:02 PM	PHl3 MFC set to  0.000000
10/2/2010	10:48:02 PM	SiCl4 MFC set to  0.000000
10/2/2010	10:48:02 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	10:48:02 PM	Tube furnace set to 0
10/2/2010	10:49:02 PM	Helium valve closed
10/2/2010	10:49:02 PM	H2 valve closed
10/2/2010	10:49:02 PM	BCl3 valve closed
10/2/2010	10:49:02 PM	PH3 valve closed
10/2/2010	10:49:02 PM	SiCl4 pre valve closed
10/2/2010	10:49:02 PM	SiCl4 post valve closed
10/2/2010	10:49:02 PM	Bubbler valve closed
10/2/2010	10:49:02 PM	Main Vac valve opened
10/2/2010	10:49:02 PM	Bypass valve opened
10/2/2010	10:49:02 PM	Helium MFC set to  0.000000
10/2/2010	10:49:02 PM	H2 MFC set to  0.000000
10/2/2010	10:49:02 PM	BCl3 MFC set to  0.000000
10/2/2010	10:49:02 PM	PHl3 MFC set to  0.000000
10/2/2010	10:49:02 PM	SiCl4 MFC set to  0.000000
10/2/2010	10:49:02 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	10:49:03 PM	Tube furnace set to 0
10/2/2010	10:50:03 PM	H2 valve closed
10/2/2010	10:50:03 PM	BCl3 valve closed
10/2/2010	10:50:03 PM	PH3 valve closed
10/2/2010	10:50:03 PM	SiCl4 pre valve closed
10/2/2010	10:50:03 PM	SiCl4 post valve closed
10/2/2010	10:50:03 PM	Bubbler valve closed
10/2/2010	10:50:03 PM	Helium valve opened
10/2/2010	10:50:03 PM	Main Vac valve opened
10/2/2010	10:50:03 PM	Bypass valve opened
10/2/2010	10:50:03 PM	Helium MFC set to  100.000000
10/2/2010	10:50:03 PM	H2 MFC set to  0.000000
10/2/2010	10:50:03 PM	BCl3 MFC set to  0.000000
10/2/2010	10:50:03 PM	PHl3 MFC set to  0.000000
10/2/2010	10:50:03 PM	SiCl4 MFC set to  0.000000
10/2/2010	10:50:03 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	10:50:03 PM	Tube furnace set to 0
10/2/2010	10:51:03 PM	Helium valve closed
10/2/2010	10:51:03 PM	H2 valve closed
10/2/2010	10:51:03 PM	BCl3 valve closed
10/2/2010	10:51:03 PM	PH3 valve closed
10/2/2010	10:51:03 PM	SiCl4 pre valve closed
10/2/2010	10:51:03 PM	SiCl4 post valve closed
10/2/2010	10:51:03 PM	Bubbler valve closed
10/2/2010	10:51:03 PM	Main Vac valve opened
10/2/2010	10:51:03 PM	Bypass valve opened
10/2/2010	10:51:03 PM	Helium MFC set to  0.000000
10/2/2010	10:51:03 PM	H2 MFC set to  0.000000
10/2/2010	10:51:03 PM	BCl3 MFC set to  0.000000
10/2/2010	10:51:03 PM	PHl3 MFC set to  0.000000
10/2/2010	10:51:03 PM	SiCl4 MFC set to  0.000000
10/2/2010	10:51:03 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	10:51:03 PM	Tube furnace set to 0
10/2/2010	10:52:03 PM	H2 valve closed
10/2/2010	10:52:03 PM	BCl3 valve closed
10/2/2010	10:52:03 PM	PH3 valve closed
10/2/2010	10:52:03 PM	SiCl4 pre valve closed
10/2/2010	10:52:03 PM	SiCl4 post valve closed
10/2/2010	10:52:03 PM	Bubbler valve closed
10/2/2010	10:52:03 PM	Helium valve opened
10/2/2010	10:52:03 PM	Main Vac valve opened
10/2/2010	10:52:03 PM	Bypass valve opened
10/2/2010	10:52:03 PM	Helium MFC set to  100.000000
10/2/2010	10:52:03 PM	H2 MFC set to  0.000000
10/2/2010	10:52:03 PM	BCl3 MFC set to  0.000000
10/2/2010	10:52:03 PM	PHl3 MFC set to  0.000000
10/2/2010	10:52:03 PM	SiCl4 MFC set to  0.000000
10/2/2010	10:52:03 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	10:52:03 PM	Tube furnace set to 0
10/2/2010	10:53:03 PM	Helium valve closed
10/2/2010	10:53:03 PM	H2 valve closed
10/2/2010	10:53:03 PM	BCl3 valve closed
10/2/2010	10:53:03 PM	PH3 valve closed
10/2/2010	10:53:03 PM	SiCl4 pre valve closed
10/2/2010	10:53:03 PM	SiCl4 post valve closed
10/2/2010	10:53:03 PM	Bubbler valve closed
10/2/2010	10:53:03 PM	Main Vac valve opened
10/2/2010	10:53:03 PM	Bypass valve opened
10/2/2010	10:53:03 PM	Helium MFC set to  0.000000
10/2/2010	10:53:03 PM	H2 MFC set to  0.000000
10/2/2010	10:53:03 PM	BCl3 MFC set to  0.000000
10/2/2010	10:53:03 PM	PHl3 MFC set to  0.000000
10/2/2010	10:53:03 PM	SiCl4 MFC set to  0.000000
10/2/2010	10:53:03 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	10:53:03 PM	Tube furnace set to 0
10/2/2010	10:54:03 PM	H2 valve closed
10/2/2010	10:54:03 PM	BCl3 valve closed
10/2/2010	10:54:03 PM	PH3 valve closed
10/2/2010	10:54:03 PM	SiCl4 pre valve closed
10/2/2010	10:54:03 PM	SiCl4 post valve closed
10/2/2010	10:54:03 PM	Bubbler valve closed
10/2/2010	10:54:03 PM	Helium valve opened
10/2/2010	10:54:03 PM	Main Vac valve opened
10/2/2010	10:54:03 PM	Bypass valve opened
10/2/2010	10:54:03 PM	Helium MFC set to  100.000000
10/2/2010	10:54:03 PM	H2 MFC set to  0.000000
10/2/2010	10:54:04 PM	BCl3 MFC set to  0.000000
10/2/2010	10:54:04 PM	PHl3 MFC set to  0.000000
10/2/2010	10:54:04 PM	SiCl4 MFC set to  0.000000
10/2/2010	10:54:04 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	10:54:04 PM	Tube furnace set to 0
10/2/2010	10:55:04 PM	Helium valve closed
10/2/2010	10:55:04 PM	H2 valve closed
10/2/2010	10:55:04 PM	BCl3 valve closed
10/2/2010	10:55:04 PM	PH3 valve closed
10/2/2010	10:55:04 PM	SiCl4 pre valve closed
10/2/2010	10:55:04 PM	SiCl4 post valve closed
10/2/2010	10:55:04 PM	Bubbler valve closed
10/2/2010	10:55:04 PM	Main Vac valve opened
10/2/2010	10:55:04 PM	Bypass valve opened
10/2/2010	10:55:04 PM	Helium MFC set to  0.000000
10/2/2010	10:55:04 PM	H2 MFC set to  0.000000
10/2/2010	10:55:04 PM	BCl3 MFC set to  0.000000
10/2/2010	10:55:04 PM	PHl3 MFC set to  0.000000
10/2/2010	10:55:04 PM	SiCl4 MFC set to  0.000000
10/2/2010	10:55:04 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	10:55:04 PM	Tube furnace set to 0
10/2/2010	10:56:04 PM	H2 valve closed
10/2/2010	10:56:04 PM	BCl3 valve closed
10/2/2010	10:56:04 PM	PH3 valve closed
10/2/2010	10:56:04 PM	SiCl4 pre valve closed
10/2/2010	10:56:04 PM	SiCl4 post valve closed
10/2/2010	10:56:04 PM	Bubbler valve closed
10/2/2010	10:56:04 PM	Helium valve opened
10/2/2010	10:56:04 PM	Main Vac valve opened
10/2/2010	10:56:04 PM	Bypass valve opened
10/2/2010	10:56:04 PM	Helium MFC set to  100.000000
10/2/2010	10:56:04 PM	H2 MFC set to  0.000000
10/2/2010	10:56:04 PM	BCl3 MFC set to  0.000000
10/2/2010	10:56:04 PM	PHl3 MFC set to  0.000000
10/2/2010	10:56:04 PM	SiCl4 MFC set to  0.000000
10/2/2010	10:56:04 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	10:56:04 PM	Tube furnace set to 0
10/2/2010	10:57:04 PM	Helium valve closed
10/2/2010	10:57:04 PM	H2 valve closed
10/2/2010	10:57:04 PM	BCl3 valve closed
10/2/2010	10:57:04 PM	PH3 valve closed
10/2/2010	10:57:04 PM	SiCl4 pre valve closed
10/2/2010	10:57:04 PM	SiCl4 post valve closed
10/2/2010	10:57:04 PM	Bubbler valve closed
10/2/2010	10:57:04 PM	Main Vac valve opened
10/2/2010	10:57:04 PM	Bypass valve opened
10/2/2010	10:57:04 PM	Helium MFC set to  0.000000
10/2/2010	10:57:04 PM	H2 MFC set to  0.000000
10/2/2010	10:57:04 PM	BCl3 MFC set to  0.000000
10/2/2010	10:57:04 PM	PHl3 MFC set to  0.000000
10/2/2010	10:57:04 PM	SiCl4 MFC set to  0.000000
10/2/2010	10:57:04 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	10:57:04 PM	Tube furnace set to 0
10/2/2010	10:58:04 PM	H2 valve closed
10/2/2010	10:58:04 PM	BCl3 valve closed
10/2/2010	10:58:04 PM	PH3 valve closed
10/2/2010	10:58:04 PM	SiCl4 pre valve closed
10/2/2010	10:58:04 PM	SiCl4 post valve closed
10/2/2010	10:58:04 PM	Bubbler valve closed
10/2/2010	10:58:04 PM	Helium valve opened
10/2/2010	10:58:04 PM	Main Vac valve opened
10/2/2010	10:58:04 PM	Bypass valve opened
10/2/2010	10:58:04 PM	Helium MFC set to  100.000000
10/2/2010	10:58:04 PM	H2 MFC set to  0.000000
10/2/2010	10:58:04 PM	BCl3 MFC set to  0.000000
10/2/2010	10:58:04 PM	PHl3 MFC set to  0.000000
10/2/2010	10:58:04 PM	SiCl4 MFC set to  0.000000
10/2/2010	10:58:04 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	10:58:04 PM	Tube furnace set to 0
10/2/2010	10:59:05 PM	Helium valve closed
10/2/2010	10:59:05 PM	H2 valve closed
10/2/2010	10:59:05 PM	BCl3 valve closed
10/2/2010	10:59:05 PM	PH3 valve closed
10/2/2010	10:59:05 PM	SiCl4 pre valve closed
10/2/2010	10:59:05 PM	SiCl4 post valve closed
10/2/2010	10:59:05 PM	Bubbler valve closed
10/2/2010	10:59:05 PM	Main Vac valve opened
10/2/2010	10:59:05 PM	Bypass valve opened
10/2/2010	10:59:05 PM	Helium MFC set to  0.000000
10/2/2010	10:59:05 PM	H2 MFC set to  0.000000
10/2/2010	10:59:05 PM	BCl3 MFC set to  0.000000
10/2/2010	10:59:05 PM	PHl3 MFC set to  0.000000
10/2/2010	10:59:05 PM	SiCl4 MFC set to  0.000000
10/2/2010	10:59:05 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	10:59:05 PM	Tube furnace set to 0
10/2/2010	11:00:05 PM	H2 valve closed
10/2/2010	11:00:05 PM	BCl3 valve closed
10/2/2010	11:00:05 PM	PH3 valve closed
10/2/2010	11:00:05 PM	SiCl4 pre valve closed
10/2/2010	11:00:05 PM	SiCl4 post valve closed
10/2/2010	11:00:05 PM	Bubbler valve closed
10/2/2010	11:00:05 PM	Helium valve opened
10/2/2010	11:00:05 PM	Main Vac valve opened
10/2/2010	11:00:05 PM	Bypass valve opened
10/2/2010	11:00:05 PM	Helium MFC set to  100.000000
10/2/2010	11:00:05 PM	H2 MFC set to  0.000000
10/2/2010	11:00:05 PM	BCl3 MFC set to  0.000000
10/2/2010	11:00:05 PM	PHl3 MFC set to  0.000000
10/2/2010	11:00:05 PM	SiCl4 MFC set to  0.000000
10/2/2010	11:00:05 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	11:00:05 PM	Tube furnace set to 0
10/2/2010	11:01:05 PM	Helium valve closed
10/2/2010	11:01:05 PM	H2 valve closed
10/2/2010	11:01:05 PM	BCl3 valve closed
10/2/2010	11:01:05 PM	PH3 valve closed
10/2/2010	11:01:05 PM	SiCl4 pre valve closed
10/2/2010	11:01:05 PM	SiCl4 post valve closed
10/2/2010	11:01:05 PM	Bubbler valve closed
10/2/2010	11:01:05 PM	Main Vac valve opened
10/2/2010	11:01:05 PM	Bypass valve opened
10/2/2010	11:01:05 PM	Helium MFC set to  0.000000
10/2/2010	11:01:05 PM	H2 MFC set to  0.000000
10/2/2010	11:01:05 PM	BCl3 MFC set to  0.000000
10/2/2010	11:01:05 PM	PHl3 MFC set to  0.000000
10/2/2010	11:01:05 PM	SiCl4 MFC set to  0.000000
10/2/2010	11:01:05 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	11:01:05 PM	Tube furnace set to 0
10/2/2010	11:02:05 PM	H2 valve closed
10/2/2010	11:02:05 PM	BCl3 valve closed
10/2/2010	11:02:05 PM	PH3 valve closed
10/2/2010	11:02:05 PM	SiCl4 pre valve closed
10/2/2010	11:02:05 PM	SiCl4 post valve closed
10/2/2010	11:02:05 PM	Bubbler valve closed
10/2/2010	11:02:05 PM	Helium valve opened
10/2/2010	11:02:05 PM	Main Vac valve opened
10/2/2010	11:02:05 PM	Bypass valve opened
10/2/2010	11:02:05 PM	Helium MFC set to  100.000000
10/2/2010	11:02:05 PM	H2 MFC set to  0.000000
10/2/2010	11:02:05 PM	BCl3 MFC set to  0.000000
10/2/2010	11:02:05 PM	PHl3 MFC set to  0.000000
10/2/2010	11:02:05 PM	SiCl4 MFC set to  0.000000
10/2/2010	11:02:05 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	11:02:05 PM	Tube furnace set to 0
10/2/2010	11:03:05 PM	Helium valve closed
10/2/2010	11:03:05 PM	H2 valve closed
10/2/2010	11:03:05 PM	BCl3 valve closed
10/2/2010	11:03:05 PM	PH3 valve closed
10/2/2010	11:03:05 PM	SiCl4 pre valve closed
10/2/2010	11:03:05 PM	SiCl4 post valve closed
10/2/2010	11:03:05 PM	Bubbler valve closed
10/2/2010	11:03:05 PM	Main Vac valve opened
10/2/2010	11:03:05 PM	Bypass valve opened
10/2/2010	11:03:05 PM	Helium MFC set to  0.000000
10/2/2010	11:03:05 PM	H2 MFC set to  0.000000
10/2/2010	11:03:05 PM	BCl3 MFC set to  0.000000
10/2/2010	11:03:05 PM	PHl3 MFC set to  0.000000
10/2/2010	11:03:05 PM	SiCl4 MFC set to  0.000000
10/2/2010	11:03:05 PM	Bypass solenoid MFC set to  0.000000
10/2/2010	11:03:05 PM	Tube furnace set to 0
10/2/2010	11:03:06 PM	Run finished at 11:03 PM
10/2/2010	11:03:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
